8/24/2011	9:34:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	9:34:15 AM	Recipe started at 9:34 AM
8/24/2011	9:34:15 AM	Helium valve closed
8/24/2011	9:34:15 AM	H2 valve closed
8/24/2011	9:34:15 AM	BCl3 valve closed
8/24/2011	9:34:15 AM	PH3 valve closed
8/24/2011	9:34:15 AM	SiCl4 pre valve closed
8/24/2011	9:34:15 AM	SiCl4 post valve closed
8/24/2011	9:34:15 AM	Main Vac valve closed
8/24/2011	9:34:15 AM	Bypass valve closed
8/24/2011	9:34:15 AM	Bubbler valve closed
8/24/2011	9:34:15 AM	Helium MFC set to  0.000000
8/24/2011	9:34:15 AM	H2 MFC set to  0.000000
8/24/2011	9:34:15 AM	BCl3 MFC set to  0.000000
8/24/2011	9:34:15 AM	PHl3 MFC set to  0.000000
8/24/2011	9:34:15 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:34:15 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:34:15 AM	Tube furnace set to 0
8/24/2011	9:34:18 AM	H2 valve closed
8/24/2011	9:34:18 AM	BCl3 valve closed
8/24/2011	9:34:18 AM	PH3 valve closed
8/24/2011	9:34:18 AM	SiCl4 pre valve closed
8/24/2011	9:34:18 AM	SiCl4 post valve closed
8/24/2011	9:34:18 AM	Main Vac valve closed
8/24/2011	9:34:18 AM	Bypass valve closed
8/24/2011	9:34:18 AM	Bubbler valve closed
8/24/2011	9:34:18 AM	Helium valve opened
8/24/2011	9:34:18 AM	Helium MFC set to  500.000000
8/24/2011	9:34:18 AM	H2 MFC set to  0.000000
8/24/2011	9:34:18 AM	BCl3 MFC set to  0.000000
8/24/2011	9:34:18 AM	PHl3 MFC set to  0.000000
8/24/2011	9:34:18 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:34:18 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:34:18 AM	Tube furnace set to 0
8/24/2011	9:35:24 AM	Helium valve closed
8/24/2011	9:35:24 AM	H2 valve closed
8/24/2011	9:35:24 AM	BCl3 valve closed
8/24/2011	9:35:24 AM	PH3 valve closed
8/24/2011	9:35:24 AM	SiCl4 pre valve closed
8/24/2011	9:35:24 AM	SiCl4 post valve closed
8/24/2011	9:35:24 AM	Main Vac valve closed
8/24/2011	9:35:24 AM	Bypass valve closed
8/24/2011	9:35:24 AM	Bubbler valve closed
8/24/2011	9:35:24 AM	Helium MFC set to  0.000000
8/24/2011	9:35:24 AM	H2 MFC set to  0.000000
8/24/2011	9:35:24 AM	BCl3 MFC set to  0.000000
8/24/2011	9:35:24 AM	PHl3 MFC set to  0.000000
8/24/2011	9:35:24 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:35:24 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:35:24 AM	Tube furnace set to 0
8/24/2011	9:35:25 AM	Run finished at 9:35 AM
8/24/2011	9:35:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	9:46:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	9:46:01 AM	Recipe started at 9:46 AM
8/24/2011	9:46:01 AM	Helium valve closed
8/24/2011	9:46:01 AM	H2 valve closed
8/24/2011	9:46:01 AM	BCl3 valve closed
8/24/2011	9:46:01 AM	PH3 valve closed
8/24/2011	9:46:01 AM	SiCl4 pre valve closed
8/24/2011	9:46:01 AM	SiCl4 post valve closed
8/24/2011	9:46:01 AM	Main Vac valve closed
8/24/2011	9:46:01 AM	Bubbler valve closed
8/24/2011	9:46:01 AM	Bypass valve opened
8/24/2011	9:46:01 AM	Helium MFC set to  0.000000
8/24/2011	9:46:01 AM	H2 MFC set to  0.000000
8/24/2011	9:46:01 AM	BCl3 MFC set to  0.000000
8/24/2011	9:46:01 AM	PHl3 MFC set to  0.000000
8/24/2011	9:46:01 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:46:01 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:46:01 AM	Tube furnace set to 0
8/24/2011	9:47:14 AM	Helium valve closed
8/24/2011	9:47:14 AM	H2 valve closed
8/24/2011	9:47:14 AM	BCl3 valve closed
8/24/2011	9:47:14 AM	PH3 valve closed
8/24/2011	9:47:14 AM	SiCl4 pre valve closed
8/24/2011	9:47:14 AM	SiCl4 post valve closed
8/24/2011	9:47:14 AM	Main Vac valve closed
8/24/2011	9:47:14 AM	Bubbler valve closed
8/24/2011	9:47:14 AM	Bypass valve opened
8/24/2011	9:47:14 AM	Helium MFC set to  0.000000
8/24/2011	9:47:14 AM	H2 MFC set to  0.000000
8/24/2011	9:47:14 AM	BCl3 MFC set to  0.000000
8/24/2011	9:47:14 AM	PHl3 MFC set to  0.000000
8/24/2011	9:47:14 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:47:14 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:47:14 AM	Tube furnace set to 0
8/24/2011	9:48:14 AM	Helium valve closed
8/24/2011	9:48:14 AM	H2 valve closed
8/24/2011	9:48:14 AM	BCl3 valve closed
8/24/2011	9:48:14 AM	PH3 valve closed
8/24/2011	9:48:14 AM	SiCl4 pre valve closed
8/24/2011	9:48:14 AM	SiCl4 post valve closed
8/24/2011	9:48:14 AM	Bypass valve closed
8/24/2011	9:48:14 AM	Bubbler valve closed
8/24/2011	9:48:14 AM	Main Vac valve opened
8/24/2011	9:48:14 AM	Helium MFC set to  0.000000
8/24/2011	9:48:14 AM	H2 MFC set to  0.000000
8/24/2011	9:48:14 AM	BCl3 MFC set to  0.000000
8/24/2011	9:48:14 AM	PHl3 MFC set to  0.000000
8/24/2011	9:48:14 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:48:14 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:48:14 AM	Tube furnace set to 0
8/24/2011	9:48:15 AM	Run finished at 9:48 AM
8/24/2011	9:48:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	9:53:15 AM	Main Vac valve closed
8/24/2011	9:53:27 AM	Main Vac valve opened
8/24/2011	9:54:19 AM	Recipe started at 9:54 AM
8/24/2011	9:54:19 AM	Helium valve closed
8/24/2011	9:54:19 AM	H2 valve closed
8/24/2011	9:54:19 AM	BCl3 valve closed
8/24/2011	9:54:19 AM	PH3 valve closed
8/24/2011	9:54:19 AM	SiCl4 pre valve closed
8/24/2011	9:54:19 AM	SiCl4 post valve closed
8/24/2011	9:54:19 AM	Bypass valve closed
8/24/2011	9:54:19 AM	Bubbler valve closed
8/24/2011	9:54:19 AM	Main Vac valve opened
8/24/2011	9:54:19 AM	Helium MFC set to  0.000000
8/24/2011	9:54:19 AM	H2 MFC set to  0.000000
8/24/2011	9:54:19 AM	BCl3 MFC set to  0.000000
8/24/2011	9:54:19 AM	PHl3 MFC set to  0.000000
8/24/2011	9:54:19 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:54:19 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:54:19 AM	Tube furnace set to 150
8/24/2011	9:54:33 AM	H2 valve closed
8/24/2011	9:54:33 AM	BCl3 valve closed
8/24/2011	9:54:33 AM	PH3 valve closed
8/24/2011	9:54:33 AM	SiCl4 pre valve closed
8/24/2011	9:54:33 AM	SiCl4 post valve closed
8/24/2011	9:54:33 AM	Bypass valve closed
8/24/2011	9:54:33 AM	Bubbler valve closed
8/24/2011	9:54:33 AM	Helium valve opened
8/24/2011	9:54:33 AM	Main Vac valve opened
8/24/2011	9:54:33 AM	Helium MFC set to  20.000000
8/24/2011	9:54:33 AM	H2 MFC set to  0.000000
8/24/2011	9:54:33 AM	BCl3 MFC set to  0.000000
8/24/2011	9:54:33 AM	PHl3 MFC set to  0.000000
8/24/2011	9:54:33 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:54:33 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:54:33 AM	Tube furnace set to 150
8/24/2011	9:55:03 AM	Helium valve closed
8/24/2011	9:55:03 AM	H2 valve closed
8/24/2011	9:55:03 AM	BCl3 valve closed
8/24/2011	9:55:03 AM	PH3 valve closed
8/24/2011	9:55:03 AM	SiCl4 pre valve closed
8/24/2011	9:55:03 AM	SiCl4 post valve closed
8/24/2011	9:55:03 AM	Bypass valve closed
8/24/2011	9:55:03 AM	Bubbler valve closed
8/24/2011	9:55:03 AM	Main Vac valve opened
8/24/2011	9:55:03 AM	Helium MFC set to  0.000000
8/24/2011	9:55:03 AM	H2 MFC set to  0.000000
8/24/2011	9:55:03 AM	BCl3 MFC set to  0.000000
8/24/2011	9:55:03 AM	PHl3 MFC set to  0.000000
8/24/2011	9:55:03 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:55:03 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:55:03 AM	Tube furnace set to 150
8/24/2011	9:55:33 AM	H2 valve closed
8/24/2011	9:55:33 AM	BCl3 valve closed
8/24/2011	9:55:33 AM	PH3 valve closed
8/24/2011	9:55:33 AM	SiCl4 pre valve closed
8/24/2011	9:55:33 AM	SiCl4 post valve closed
8/24/2011	9:55:33 AM	Bypass valve closed
8/24/2011	9:55:33 AM	Bubbler valve closed
8/24/2011	9:55:33 AM	Helium valve opened
8/24/2011	9:55:33 AM	Main Vac valve opened
8/24/2011	9:55:33 AM	Helium MFC set to  20.000000
8/24/2011	9:55:33 AM	H2 MFC set to  0.000000
8/24/2011	9:55:33 AM	BCl3 MFC set to  0.000000
8/24/2011	9:55:33 AM	PHl3 MFC set to  0.000000
8/24/2011	9:55:33 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:55:33 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:55:33 AM	Tube furnace set to 150
8/24/2011	9:56:03 AM	Helium valve closed
8/24/2011	9:56:03 AM	H2 valve closed
8/24/2011	9:56:03 AM	BCl3 valve closed
8/24/2011	9:56:03 AM	PH3 valve closed
8/24/2011	9:56:03 AM	SiCl4 pre valve closed
8/24/2011	9:56:03 AM	SiCl4 post valve closed
8/24/2011	9:56:03 AM	Bypass valve closed
8/24/2011	9:56:03 AM	Bubbler valve closed
8/24/2011	9:56:03 AM	Main Vac valve opened
8/24/2011	9:56:03 AM	Helium MFC set to  0.000000
8/24/2011	9:56:03 AM	H2 MFC set to  0.000000
8/24/2011	9:56:03 AM	BCl3 MFC set to  0.000000
8/24/2011	9:56:03 AM	PHl3 MFC set to  0.000000
8/24/2011	9:56:03 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:56:03 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:56:04 AM	Tube furnace set to 150
8/24/2011	9:56:34 AM	H2 valve closed
8/24/2011	9:56:34 AM	BCl3 valve closed
8/24/2011	9:56:34 AM	PH3 valve closed
8/24/2011	9:56:34 AM	SiCl4 pre valve closed
8/24/2011	9:56:34 AM	SiCl4 post valve closed
8/24/2011	9:56:34 AM	Bypass valve closed
8/24/2011	9:56:34 AM	Bubbler valve closed
8/24/2011	9:56:34 AM	Helium valve opened
8/24/2011	9:56:34 AM	Main Vac valve opened
8/24/2011	9:56:34 AM	Helium MFC set to  20.000000
8/24/2011	9:56:34 AM	H2 MFC set to  0.000000
8/24/2011	9:56:34 AM	BCl3 MFC set to  0.000000
8/24/2011	9:56:34 AM	PHl3 MFC set to  0.000000
8/24/2011	9:56:34 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:56:34 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:56:34 AM	Tube furnace set to 150
8/24/2011	9:57:04 AM	Helium valve closed
8/24/2011	9:57:04 AM	H2 valve closed
8/24/2011	9:57:04 AM	BCl3 valve closed
8/24/2011	9:57:04 AM	PH3 valve closed
8/24/2011	9:57:04 AM	SiCl4 pre valve closed
8/24/2011	9:57:04 AM	SiCl4 post valve closed
8/24/2011	9:57:04 AM	Bypass valve closed
8/24/2011	9:57:04 AM	Bubbler valve closed
8/24/2011	9:57:04 AM	Main Vac valve opened
8/24/2011	9:57:04 AM	Helium MFC set to  0.000000
8/24/2011	9:57:04 AM	H2 MFC set to  0.000000
8/24/2011	9:57:04 AM	BCl3 MFC set to  0.000000
8/24/2011	9:57:04 AM	PHl3 MFC set to  0.000000
8/24/2011	9:57:04 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:57:04 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:57:04 AM	Tube furnace set to 150
8/24/2011	9:57:34 AM	H2 valve closed
8/24/2011	9:57:34 AM	BCl3 valve closed
8/24/2011	9:57:34 AM	PH3 valve closed
8/24/2011	9:57:34 AM	SiCl4 pre valve closed
8/24/2011	9:57:34 AM	SiCl4 post valve closed
8/24/2011	9:57:34 AM	Bypass valve closed
8/24/2011	9:57:34 AM	Bubbler valve closed
8/24/2011	9:57:34 AM	Helium valve opened
8/24/2011	9:57:34 AM	Main Vac valve opened
8/24/2011	9:57:34 AM	Helium MFC set to  20.000000
8/24/2011	9:57:34 AM	H2 MFC set to  0.000000
8/24/2011	9:57:34 AM	BCl3 MFC set to  0.000000
8/24/2011	9:57:34 AM	PHl3 MFC set to  0.000000
8/24/2011	9:57:34 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:57:34 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:57:34 AM	Tube furnace set to 150
8/24/2011	9:58:04 AM	Helium valve closed
8/24/2011	9:58:04 AM	H2 valve closed
8/24/2011	9:58:04 AM	BCl3 valve closed
8/24/2011	9:58:04 AM	PH3 valve closed
8/24/2011	9:58:04 AM	SiCl4 pre valve closed
8/24/2011	9:58:04 AM	SiCl4 post valve closed
8/24/2011	9:58:04 AM	Bypass valve closed
8/24/2011	9:58:04 AM	Bubbler valve closed
8/24/2011	9:58:04 AM	Main Vac valve opened
8/24/2011	9:58:04 AM	Helium MFC set to  0.000000
8/24/2011	9:58:04 AM	H2 MFC set to  0.000000
8/24/2011	9:58:04 AM	BCl3 MFC set to  0.000000
8/24/2011	9:58:04 AM	PHl3 MFC set to  0.000000
8/24/2011	9:58:04 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:58:04 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:58:04 AM	Tube furnace set to 150
8/24/2011	9:58:34 AM	H2 valve closed
8/24/2011	9:58:34 AM	BCl3 valve closed
8/24/2011	9:58:34 AM	PH3 valve closed
8/24/2011	9:58:34 AM	SiCl4 pre valve closed
8/24/2011	9:58:34 AM	SiCl4 post valve closed
8/24/2011	9:58:34 AM	Bypass valve closed
8/24/2011	9:58:34 AM	Bubbler valve closed
8/24/2011	9:58:34 AM	Helium valve opened
8/24/2011	9:58:34 AM	Main Vac valve opened
8/24/2011	9:58:34 AM	Helium MFC set to  20.000000
8/24/2011	9:58:34 AM	H2 MFC set to  0.000000
8/24/2011	9:58:34 AM	BCl3 MFC set to  0.000000
8/24/2011	9:58:34 AM	PHl3 MFC set to  0.000000
8/24/2011	9:58:34 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:58:34 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:58:35 AM	Tube furnace set to 150
8/24/2011	9:59:05 AM	Helium valve closed
8/24/2011	9:59:05 AM	H2 valve closed
8/24/2011	9:59:05 AM	BCl3 valve closed
8/24/2011	9:59:05 AM	PH3 valve closed
8/24/2011	9:59:05 AM	SiCl4 pre valve closed
8/24/2011	9:59:05 AM	SiCl4 post valve closed
8/24/2011	9:59:05 AM	Bypass valve closed
8/24/2011	9:59:05 AM	Bubbler valve closed
8/24/2011	9:59:05 AM	Main Vac valve opened
8/24/2011	9:59:05 AM	Helium MFC set to  0.000000
8/24/2011	9:59:05 AM	H2 MFC set to  0.000000
8/24/2011	9:59:05 AM	BCl3 MFC set to  0.000000
8/24/2011	9:59:05 AM	PHl3 MFC set to  0.000000
8/24/2011	9:59:05 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:59:05 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:59:05 AM	Tube furnace set to 150
8/24/2011	9:59:35 AM	H2 valve closed
8/24/2011	9:59:35 AM	BCl3 valve closed
8/24/2011	9:59:35 AM	PH3 valve closed
8/24/2011	9:59:35 AM	SiCl4 pre valve closed
8/24/2011	9:59:35 AM	SiCl4 post valve closed
8/24/2011	9:59:35 AM	Bypass valve closed
8/24/2011	9:59:35 AM	Bubbler valve closed
8/24/2011	9:59:35 AM	Helium valve opened
8/24/2011	9:59:35 AM	Main Vac valve opened
8/24/2011	9:59:35 AM	Helium MFC set to  20.000000
8/24/2011	9:59:35 AM	H2 MFC set to  0.000000
8/24/2011	9:59:35 AM	BCl3 MFC set to  0.000000
8/24/2011	9:59:35 AM	PHl3 MFC set to  0.000000
8/24/2011	9:59:35 AM	SiCl4 MFC set to  0.000000
8/24/2011	9:59:35 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	9:59:35 AM	Tube furnace set to 150
8/24/2011	10:00:05 AM	Helium valve closed
8/24/2011	10:00:05 AM	H2 valve closed
8/24/2011	10:00:05 AM	BCl3 valve closed
8/24/2011	10:00:05 AM	PH3 valve closed
8/24/2011	10:00:05 AM	SiCl4 pre valve closed
8/24/2011	10:00:05 AM	SiCl4 post valve closed
8/24/2011	10:00:05 AM	Bypass valve closed
8/24/2011	10:00:05 AM	Bubbler valve closed
8/24/2011	10:00:05 AM	Main Vac valve opened
8/24/2011	10:00:05 AM	Helium MFC set to  0.000000
8/24/2011	10:00:05 AM	H2 MFC set to  0.000000
8/24/2011	10:00:05 AM	BCl3 MFC set to  0.000000
8/24/2011	10:00:05 AM	PHl3 MFC set to  0.000000
8/24/2011	10:00:05 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:00:05 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:00:05 AM	Tube furnace set to 150
8/24/2011	10:00:35 AM	H2 valve closed
8/24/2011	10:00:35 AM	BCl3 valve closed
8/24/2011	10:00:35 AM	PH3 valve closed
8/24/2011	10:00:35 AM	SiCl4 pre valve closed
8/24/2011	10:00:35 AM	SiCl4 post valve closed
8/24/2011	10:00:35 AM	Bypass valve closed
8/24/2011	10:00:35 AM	Bubbler valve closed
8/24/2011	10:00:35 AM	Helium valve opened
8/24/2011	10:00:35 AM	Main Vac valve opened
8/24/2011	10:00:35 AM	Helium MFC set to  20.000000
8/24/2011	10:00:35 AM	H2 MFC set to  0.000000
8/24/2011	10:00:35 AM	BCl3 MFC set to  0.000000
8/24/2011	10:00:35 AM	PHl3 MFC set to  0.000000
8/24/2011	10:00:35 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:00:35 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:00:35 AM	Tube furnace set to 150
8/24/2011	10:01:05 AM	Helium valve closed
8/24/2011	10:01:05 AM	H2 valve closed
8/24/2011	10:01:05 AM	BCl3 valve closed
8/24/2011	10:01:05 AM	PH3 valve closed
8/24/2011	10:01:05 AM	SiCl4 pre valve closed
8/24/2011	10:01:05 AM	SiCl4 post valve closed
8/24/2011	10:01:05 AM	Bypass valve closed
8/24/2011	10:01:05 AM	Bubbler valve closed
8/24/2011	10:01:05 AM	Main Vac valve opened
8/24/2011	10:01:05 AM	Helium MFC set to  0.000000
8/24/2011	10:01:05 AM	H2 MFC set to  0.000000
8/24/2011	10:01:05 AM	BCl3 MFC set to  0.000000
8/24/2011	10:01:05 AM	PHl3 MFC set to  0.000000
8/24/2011	10:01:05 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:01:05 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:01:06 AM	Tube furnace set to 150
8/24/2011	10:01:36 AM	H2 valve closed
8/24/2011	10:01:36 AM	BCl3 valve closed
8/24/2011	10:01:36 AM	PH3 valve closed
8/24/2011	10:01:36 AM	SiCl4 pre valve closed
8/24/2011	10:01:36 AM	SiCl4 post valve closed
8/24/2011	10:01:36 AM	Bypass valve closed
8/24/2011	10:01:36 AM	Bubbler valve closed
8/24/2011	10:01:36 AM	Helium valve opened
8/24/2011	10:01:36 AM	Main Vac valve opened
8/24/2011	10:01:36 AM	Helium MFC set to  20.000000
8/24/2011	10:01:36 AM	H2 MFC set to  0.000000
8/24/2011	10:01:36 AM	BCl3 MFC set to  0.000000
8/24/2011	10:01:36 AM	PHl3 MFC set to  0.000000
8/24/2011	10:01:36 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:01:36 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:01:36 AM	Tube furnace set to 150
8/24/2011	10:02:06 AM	Helium valve closed
8/24/2011	10:02:06 AM	H2 valve closed
8/24/2011	10:02:06 AM	BCl3 valve closed
8/24/2011	10:02:06 AM	PH3 valve closed
8/24/2011	10:02:06 AM	SiCl4 pre valve closed
8/24/2011	10:02:06 AM	SiCl4 post valve closed
8/24/2011	10:02:06 AM	Bypass valve closed
8/24/2011	10:02:06 AM	Bubbler valve closed
8/24/2011	10:02:06 AM	Main Vac valve opened
8/24/2011	10:02:06 AM	Helium MFC set to  0.000000
8/24/2011	10:02:06 AM	H2 MFC set to  0.000000
8/24/2011	10:02:06 AM	BCl3 MFC set to  0.000000
8/24/2011	10:02:06 AM	PHl3 MFC set to  0.000000
8/24/2011	10:02:06 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:02:06 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:02:06 AM	Tube furnace set to 150
8/24/2011	10:02:36 AM	H2 valve closed
8/24/2011	10:02:36 AM	BCl3 valve closed
8/24/2011	10:02:36 AM	PH3 valve closed
8/24/2011	10:02:36 AM	SiCl4 pre valve closed
8/24/2011	10:02:36 AM	SiCl4 post valve closed
8/24/2011	10:02:36 AM	Bypass valve closed
8/24/2011	10:02:36 AM	Bubbler valve closed
8/24/2011	10:02:36 AM	Helium valve opened
8/24/2011	10:02:36 AM	Main Vac valve opened
8/24/2011	10:02:36 AM	Helium MFC set to  20.000000
8/24/2011	10:02:36 AM	H2 MFC set to  0.000000
8/24/2011	10:02:36 AM	BCl3 MFC set to  0.000000
8/24/2011	10:02:36 AM	PHl3 MFC set to  0.000000
8/24/2011	10:02:36 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:02:36 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:02:36 AM	Tube furnace set to 150
8/24/2011	10:03:06 AM	Helium valve closed
8/24/2011	10:03:06 AM	H2 valve closed
8/24/2011	10:03:06 AM	BCl3 valve closed
8/24/2011	10:03:06 AM	PH3 valve closed
8/24/2011	10:03:06 AM	SiCl4 pre valve closed
8/24/2011	10:03:06 AM	SiCl4 post valve closed
8/24/2011	10:03:06 AM	Bypass valve closed
8/24/2011	10:03:06 AM	Bubbler valve closed
8/24/2011	10:03:06 AM	Main Vac valve opened
8/24/2011	10:03:06 AM	Helium MFC set to  0.000000
8/24/2011	10:03:06 AM	H2 MFC set to  0.000000
8/24/2011	10:03:06 AM	BCl3 MFC set to  0.000000
8/24/2011	10:03:06 AM	PHl3 MFC set to  0.000000
8/24/2011	10:03:06 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:03:06 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:03:06 AM	Tube furnace set to 150
8/24/2011	10:03:36 AM	H2 valve closed
8/24/2011	10:03:36 AM	BCl3 valve closed
8/24/2011	10:03:36 AM	PH3 valve closed
8/24/2011	10:03:36 AM	SiCl4 pre valve closed
8/24/2011	10:03:36 AM	SiCl4 post valve closed
8/24/2011	10:03:36 AM	Bypass valve closed
8/24/2011	10:03:36 AM	Bubbler valve closed
8/24/2011	10:03:36 AM	Helium valve opened
8/24/2011	10:03:36 AM	Main Vac valve opened
8/24/2011	10:03:36 AM	Helium MFC set to  20.000000
8/24/2011	10:03:36 AM	H2 MFC set to  0.000000
8/24/2011	10:03:36 AM	BCl3 MFC set to  0.000000
8/24/2011	10:03:36 AM	PHl3 MFC set to  0.000000
8/24/2011	10:03:36 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:03:36 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:03:37 AM	Tube furnace set to 150
8/24/2011	10:04:07 AM	Helium valve closed
8/24/2011	10:04:07 AM	H2 valve closed
8/24/2011	10:04:07 AM	BCl3 valve closed
8/24/2011	10:04:07 AM	PH3 valve closed
8/24/2011	10:04:07 AM	SiCl4 pre valve closed
8/24/2011	10:04:07 AM	SiCl4 post valve closed
8/24/2011	10:04:07 AM	Bypass valve closed
8/24/2011	10:04:07 AM	Bubbler valve closed
8/24/2011	10:04:07 AM	Main Vac valve opened
8/24/2011	10:04:07 AM	Helium MFC set to  0.000000
8/24/2011	10:04:07 AM	H2 MFC set to  0.000000
8/24/2011	10:04:07 AM	BCl3 MFC set to  0.000000
8/24/2011	10:04:07 AM	PHl3 MFC set to  0.000000
8/24/2011	10:04:07 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:04:07 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:04:07 AM	Tube furnace set to 150
8/24/2011	10:04:08 AM	Run finished at 10:04 AM
8/24/2011	10:05:44 AM	Recipe started at 10:05 AM
8/24/2011	10:05:44 AM	Helium valve closed
8/24/2011	10:05:44 AM	H2 valve closed
8/24/2011	10:05:44 AM	BCl3 valve closed
8/24/2011	10:05:44 AM	PH3 valve closed
8/24/2011	10:05:44 AM	SiCl4 pre valve closed
8/24/2011	10:05:44 AM	SiCl4 post valve closed
8/24/2011	10:05:44 AM	Bypass valve closed
8/24/2011	10:05:44 AM	Bubbler valve closed
8/24/2011	10:05:44 AM	Main Vac valve opened
8/24/2011	10:05:44 AM	Helium MFC set to  0.000000
8/24/2011	10:05:44 AM	H2 MFC set to  0.000000
8/24/2011	10:05:44 AM	BCl3 MFC set to  0.000000
8/24/2011	10:05:44 AM	PHl3 MFC set to  0.000000
8/24/2011	10:05:44 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:05:44 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:05:45 AM	Tube furnace set to 150
8/24/2011	10:05:53 AM	H2 valve closed
8/24/2011	10:05:53 AM	BCl3 valve closed
8/24/2011	10:05:53 AM	PH3 valve closed
8/24/2011	10:05:53 AM	SiCl4 pre valve closed
8/24/2011	10:05:53 AM	SiCl4 post valve closed
8/24/2011	10:05:53 AM	Bypass valve closed
8/24/2011	10:05:53 AM	Bubbler valve closed
8/24/2011	10:05:53 AM	Helium valve opened
8/24/2011	10:05:53 AM	Main Vac valve opened
8/24/2011	10:05:53 AM	Helium MFC set to  20.000000
8/24/2011	10:05:53 AM	H2 MFC set to  0.000000
8/24/2011	10:05:53 AM	BCl3 MFC set to  0.000000
8/24/2011	10:05:53 AM	PHl3 MFC set to  0.000000
8/24/2011	10:05:53 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:05:53 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:05:53 AM	Tube furnace set to 150
8/24/2011	10:06:23 AM	Helium valve closed
8/24/2011	10:06:23 AM	H2 valve closed
8/24/2011	10:06:23 AM	BCl3 valve closed
8/24/2011	10:06:23 AM	PH3 valve closed
8/24/2011	10:06:23 AM	SiCl4 pre valve closed
8/24/2011	10:06:23 AM	SiCl4 post valve closed
8/24/2011	10:06:23 AM	Bypass valve closed
8/24/2011	10:06:23 AM	Bubbler valve closed
8/24/2011	10:06:23 AM	Main Vac valve opened
8/24/2011	10:06:23 AM	Helium MFC set to  0.000000
8/24/2011	10:06:23 AM	H2 MFC set to  0.000000
8/24/2011	10:06:23 AM	BCl3 MFC set to  0.000000
8/24/2011	10:06:23 AM	PHl3 MFC set to  0.000000
8/24/2011	10:06:23 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:06:23 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:06:23 AM	Tube furnace set to 150
8/24/2011	10:06:53 AM	H2 valve closed
8/24/2011	10:06:53 AM	BCl3 valve closed
8/24/2011	10:06:53 AM	PH3 valve closed
8/24/2011	10:06:53 AM	SiCl4 pre valve closed
8/24/2011	10:06:53 AM	SiCl4 post valve closed
8/24/2011	10:06:53 AM	Bypass valve closed
8/24/2011	10:06:53 AM	Bubbler valve closed
8/24/2011	10:06:53 AM	Helium valve opened
8/24/2011	10:06:53 AM	Main Vac valve opened
8/24/2011	10:06:53 AM	Helium MFC set to  20.000000
8/24/2011	10:06:53 AM	H2 MFC set to  0.000000
8/24/2011	10:06:53 AM	BCl3 MFC set to  0.000000
8/24/2011	10:06:53 AM	PHl3 MFC set to  0.000000
8/24/2011	10:06:53 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:06:53 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:06:53 AM	Tube furnace set to 150
8/24/2011	10:07:23 AM	Helium valve closed
8/24/2011	10:07:23 AM	H2 valve closed
8/24/2011	10:07:23 AM	BCl3 valve closed
8/24/2011	10:07:23 AM	PH3 valve closed
8/24/2011	10:07:23 AM	SiCl4 pre valve closed
8/24/2011	10:07:23 AM	SiCl4 post valve closed
8/24/2011	10:07:23 AM	Bypass valve closed
8/24/2011	10:07:23 AM	Bubbler valve closed
8/24/2011	10:07:23 AM	Main Vac valve opened
8/24/2011	10:07:23 AM	Helium MFC set to  0.000000
8/24/2011	10:07:23 AM	H2 MFC set to  0.000000
8/24/2011	10:07:23 AM	BCl3 MFC set to  0.000000
8/24/2011	10:07:23 AM	PHl3 MFC set to  0.000000
8/24/2011	10:07:23 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:07:23 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:07:24 AM	Tube furnace set to 150
8/24/2011	10:07:54 AM	H2 valve closed
8/24/2011	10:07:54 AM	BCl3 valve closed
8/24/2011	10:07:54 AM	PH3 valve closed
8/24/2011	10:07:54 AM	SiCl4 pre valve closed
8/24/2011	10:07:54 AM	SiCl4 post valve closed
8/24/2011	10:07:54 AM	Bypass valve closed
8/24/2011	10:07:54 AM	Bubbler valve closed
8/24/2011	10:07:54 AM	Helium valve opened
8/24/2011	10:07:54 AM	Main Vac valve opened
8/24/2011	10:07:54 AM	Helium MFC set to  20.000000
8/24/2011	10:07:54 AM	H2 MFC set to  0.000000
8/24/2011	10:07:54 AM	BCl3 MFC set to  0.000000
8/24/2011	10:07:54 AM	PHl3 MFC set to  0.000000
8/24/2011	10:07:54 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:07:54 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:07:54 AM	Tube furnace set to 150
8/24/2011	10:08:24 AM	Helium valve closed
8/24/2011	10:08:24 AM	H2 valve closed
8/24/2011	10:08:24 AM	BCl3 valve closed
8/24/2011	10:08:24 AM	PH3 valve closed
8/24/2011	10:08:24 AM	SiCl4 pre valve closed
8/24/2011	10:08:24 AM	SiCl4 post valve closed
8/24/2011	10:08:24 AM	Bypass valve closed
8/24/2011	10:08:24 AM	Bubbler valve closed
8/24/2011	10:08:24 AM	Main Vac valve opened
8/24/2011	10:08:24 AM	Helium MFC set to  0.000000
8/24/2011	10:08:24 AM	H2 MFC set to  0.000000
8/24/2011	10:08:24 AM	BCl3 MFC set to  0.000000
8/24/2011	10:08:24 AM	PHl3 MFC set to  0.000000
8/24/2011	10:08:24 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:08:24 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:08:24 AM	Tube furnace set to 150
8/24/2011	10:08:54 AM	H2 valve closed
8/24/2011	10:08:54 AM	BCl3 valve closed
8/24/2011	10:08:54 AM	PH3 valve closed
8/24/2011	10:08:54 AM	SiCl4 pre valve closed
8/24/2011	10:08:54 AM	SiCl4 post valve closed
8/24/2011	10:08:54 AM	Bypass valve closed
8/24/2011	10:08:54 AM	Bubbler valve closed
8/24/2011	10:08:54 AM	Helium valve opened
8/24/2011	10:08:54 AM	Main Vac valve opened
8/24/2011	10:08:54 AM	Helium MFC set to  20.000000
8/24/2011	10:08:54 AM	H2 MFC set to  0.000000
8/24/2011	10:08:54 AM	BCl3 MFC set to  0.000000
8/24/2011	10:08:54 AM	PHl3 MFC set to  0.000000
8/24/2011	10:08:54 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:08:54 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:08:54 AM	Tube furnace set to 150
8/24/2011	10:09:24 AM	Helium valve closed
8/24/2011	10:09:24 AM	H2 valve closed
8/24/2011	10:09:24 AM	BCl3 valve closed
8/24/2011	10:09:24 AM	PH3 valve closed
8/24/2011	10:09:24 AM	SiCl4 pre valve closed
8/24/2011	10:09:24 AM	SiCl4 post valve closed
8/24/2011	10:09:24 AM	Bypass valve closed
8/24/2011	10:09:24 AM	Bubbler valve closed
8/24/2011	10:09:24 AM	Main Vac valve opened
8/24/2011	10:09:24 AM	Helium MFC set to  0.000000
8/24/2011	10:09:24 AM	H2 MFC set to  0.000000
8/24/2011	10:09:24 AM	BCl3 MFC set to  0.000000
8/24/2011	10:09:24 AM	PHl3 MFC set to  0.000000
8/24/2011	10:09:24 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:09:24 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:09:24 AM	Tube furnace set to 150
8/24/2011	10:09:54 AM	H2 valve closed
8/24/2011	10:09:54 AM	BCl3 valve closed
8/24/2011	10:09:54 AM	PH3 valve closed
8/24/2011	10:09:54 AM	SiCl4 pre valve closed
8/24/2011	10:09:54 AM	SiCl4 post valve closed
8/24/2011	10:09:54 AM	Bypass valve closed
8/24/2011	10:09:54 AM	Bubbler valve closed
8/24/2011	10:09:54 AM	Helium valve opened
8/24/2011	10:09:54 AM	Main Vac valve opened
8/24/2011	10:09:54 AM	Helium MFC set to  20.000000
8/24/2011	10:09:54 AM	H2 MFC set to  0.000000
8/24/2011	10:09:54 AM	BCl3 MFC set to  0.000000
8/24/2011	10:09:54 AM	PHl3 MFC set to  0.000000
8/24/2011	10:09:54 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:09:54 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:09:55 AM	Tube furnace set to 150
8/24/2011	10:10:25 AM	Helium valve closed
8/24/2011	10:10:25 AM	H2 valve closed
8/24/2011	10:10:25 AM	BCl3 valve closed
8/24/2011	10:10:25 AM	PH3 valve closed
8/24/2011	10:10:25 AM	SiCl4 pre valve closed
8/24/2011	10:10:25 AM	SiCl4 post valve closed
8/24/2011	10:10:25 AM	Bypass valve closed
8/24/2011	10:10:25 AM	Bubbler valve closed
8/24/2011	10:10:25 AM	Main Vac valve opened
8/24/2011	10:10:25 AM	Helium MFC set to  0.000000
8/24/2011	10:10:25 AM	H2 MFC set to  0.000000
8/24/2011	10:10:25 AM	BCl3 MFC set to  0.000000
8/24/2011	10:10:25 AM	PHl3 MFC set to  0.000000
8/24/2011	10:10:25 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:10:25 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:10:25 AM	Tube furnace set to 150
8/24/2011	10:10:55 AM	H2 valve closed
8/24/2011	10:10:55 AM	BCl3 valve closed
8/24/2011	10:10:55 AM	PH3 valve closed
8/24/2011	10:10:55 AM	SiCl4 pre valve closed
8/24/2011	10:10:55 AM	SiCl4 post valve closed
8/24/2011	10:10:55 AM	Bypass valve closed
8/24/2011	10:10:55 AM	Bubbler valve closed
8/24/2011	10:10:55 AM	Helium valve opened
8/24/2011	10:10:55 AM	Main Vac valve opened
8/24/2011	10:10:55 AM	Helium MFC set to  20.000000
8/24/2011	10:10:55 AM	H2 MFC set to  0.000000
8/24/2011	10:10:55 AM	BCl3 MFC set to  0.000000
8/24/2011	10:10:55 AM	PHl3 MFC set to  0.000000
8/24/2011	10:10:55 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:10:55 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:10:55 AM	Tube furnace set to 150
8/24/2011	10:11:25 AM	Helium valve closed
8/24/2011	10:11:25 AM	H2 valve closed
8/24/2011	10:11:25 AM	BCl3 valve closed
8/24/2011	10:11:25 AM	PH3 valve closed
8/24/2011	10:11:25 AM	SiCl4 pre valve closed
8/24/2011	10:11:25 AM	SiCl4 post valve closed
8/24/2011	10:11:25 AM	Bypass valve closed
8/24/2011	10:11:25 AM	Bubbler valve closed
8/24/2011	10:11:25 AM	Main Vac valve opened
8/24/2011	10:11:25 AM	Helium MFC set to  0.000000
8/24/2011	10:11:25 AM	H2 MFC set to  0.000000
8/24/2011	10:11:25 AM	BCl3 MFC set to  0.000000
8/24/2011	10:11:25 AM	PHl3 MFC set to  0.000000
8/24/2011	10:11:25 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:11:25 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:11:25 AM	Tube furnace set to 150
8/24/2011	10:11:55 AM	H2 valve closed
8/24/2011	10:11:55 AM	BCl3 valve closed
8/24/2011	10:11:55 AM	PH3 valve closed
8/24/2011	10:11:55 AM	SiCl4 pre valve closed
8/24/2011	10:11:55 AM	SiCl4 post valve closed
8/24/2011	10:11:55 AM	Bypass valve closed
8/24/2011	10:11:55 AM	Bubbler valve closed
8/24/2011	10:11:55 AM	Helium valve opened
8/24/2011	10:11:55 AM	Main Vac valve opened
8/24/2011	10:11:55 AM	Helium MFC set to  20.000000
8/24/2011	10:11:55 AM	H2 MFC set to  0.000000
8/24/2011	10:11:55 AM	BCl3 MFC set to  0.000000
8/24/2011	10:11:55 AM	PHl3 MFC set to  0.000000
8/24/2011	10:11:55 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:11:55 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:11:56 AM	Tube furnace set to 150
8/24/2011	10:12:26 AM	Helium valve closed
8/24/2011	10:12:26 AM	H2 valve closed
8/24/2011	10:12:26 AM	BCl3 valve closed
8/24/2011	10:12:26 AM	PH3 valve closed
8/24/2011	10:12:26 AM	SiCl4 pre valve closed
8/24/2011	10:12:26 AM	SiCl4 post valve closed
8/24/2011	10:12:26 AM	Bypass valve closed
8/24/2011	10:12:26 AM	Bubbler valve closed
8/24/2011	10:12:26 AM	Main Vac valve opened
8/24/2011	10:12:26 AM	Helium MFC set to  0.000000
8/24/2011	10:12:26 AM	H2 MFC set to  0.000000
8/24/2011	10:12:26 AM	BCl3 MFC set to  0.000000
8/24/2011	10:12:26 AM	PHl3 MFC set to  0.000000
8/24/2011	10:12:26 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:12:26 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:12:26 AM	Tube furnace set to 150
8/24/2011	10:12:56 AM	H2 valve closed
8/24/2011	10:12:56 AM	BCl3 valve closed
8/24/2011	10:12:56 AM	PH3 valve closed
8/24/2011	10:12:56 AM	SiCl4 pre valve closed
8/24/2011	10:12:56 AM	SiCl4 post valve closed
8/24/2011	10:12:56 AM	Bypass valve closed
8/24/2011	10:12:56 AM	Bubbler valve closed
8/24/2011	10:12:56 AM	Helium valve opened
8/24/2011	10:12:56 AM	Main Vac valve opened
8/24/2011	10:12:56 AM	Helium MFC set to  20.000000
8/24/2011	10:12:56 AM	H2 MFC set to  0.000000
8/24/2011	10:12:56 AM	BCl3 MFC set to  0.000000
8/24/2011	10:12:56 AM	PHl3 MFC set to  0.000000
8/24/2011	10:12:56 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:12:56 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:12:56 AM	Tube furnace set to 150
8/24/2011	10:13:26 AM	Helium valve closed
8/24/2011	10:13:26 AM	H2 valve closed
8/24/2011	10:13:26 AM	BCl3 valve closed
8/24/2011	10:13:26 AM	PH3 valve closed
8/24/2011	10:13:26 AM	SiCl4 pre valve closed
8/24/2011	10:13:26 AM	SiCl4 post valve closed
8/24/2011	10:13:26 AM	Bypass valve closed
8/24/2011	10:13:26 AM	Bubbler valve closed
8/24/2011	10:13:26 AM	Main Vac valve opened
8/24/2011	10:13:26 AM	Helium MFC set to  0.000000
8/24/2011	10:13:26 AM	H2 MFC set to  0.000000
8/24/2011	10:13:26 AM	BCl3 MFC set to  0.000000
8/24/2011	10:13:26 AM	PHl3 MFC set to  0.000000
8/24/2011	10:13:26 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:13:26 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:13:26 AM	Tube furnace set to 150
8/24/2011	10:13:56 AM	H2 valve closed
8/24/2011	10:13:56 AM	BCl3 valve closed
8/24/2011	10:13:56 AM	PH3 valve closed
8/24/2011	10:13:56 AM	SiCl4 pre valve closed
8/24/2011	10:13:56 AM	SiCl4 post valve closed
8/24/2011	10:13:56 AM	Bypass valve closed
8/24/2011	10:13:56 AM	Bubbler valve closed
8/24/2011	10:13:56 AM	Helium valve opened
8/24/2011	10:13:56 AM	Main Vac valve opened
8/24/2011	10:13:56 AM	Helium MFC set to  20.000000
8/24/2011	10:13:56 AM	H2 MFC set to  0.000000
8/24/2011	10:13:56 AM	BCl3 MFC set to  0.000000
8/24/2011	10:13:56 AM	PHl3 MFC set to  0.000000
8/24/2011	10:13:56 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:13:56 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:13:56 AM	Tube furnace set to 150
8/24/2011	10:14:26 AM	Helium valve closed
8/24/2011	10:14:26 AM	H2 valve closed
8/24/2011	10:14:26 AM	BCl3 valve closed
8/24/2011	10:14:26 AM	PH3 valve closed
8/24/2011	10:14:26 AM	SiCl4 pre valve closed
8/24/2011	10:14:26 AM	SiCl4 post valve closed
8/24/2011	10:14:26 AM	Bypass valve closed
8/24/2011	10:14:26 AM	Bubbler valve closed
8/24/2011	10:14:26 AM	Main Vac valve opened
8/24/2011	10:14:26 AM	Helium MFC set to  0.000000
8/24/2011	10:14:26 AM	H2 MFC set to  0.000000
8/24/2011	10:14:26 AM	BCl3 MFC set to  0.000000
8/24/2011	10:14:26 AM	PHl3 MFC set to  0.000000
8/24/2011	10:14:26 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:14:26 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:14:27 AM	Tube furnace set to 150
8/24/2011	10:14:57 AM	H2 valve closed
8/24/2011	10:14:57 AM	BCl3 valve closed
8/24/2011	10:14:57 AM	PH3 valve closed
8/24/2011	10:14:57 AM	SiCl4 pre valve closed
8/24/2011	10:14:57 AM	SiCl4 post valve closed
8/24/2011	10:14:57 AM	Bypass valve closed
8/24/2011	10:14:57 AM	Bubbler valve closed
8/24/2011	10:14:57 AM	Helium valve opened
8/24/2011	10:14:57 AM	Main Vac valve opened
8/24/2011	10:14:57 AM	Helium MFC set to  20.000000
8/24/2011	10:14:57 AM	H2 MFC set to  0.000000
8/24/2011	10:14:57 AM	BCl3 MFC set to  0.000000
8/24/2011	10:14:57 AM	PHl3 MFC set to  0.000000
8/24/2011	10:14:57 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:14:57 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:14:57 AM	Tube furnace set to 150
8/24/2011	10:15:27 AM	Helium valve closed
8/24/2011	10:15:27 AM	H2 valve closed
8/24/2011	10:15:27 AM	BCl3 valve closed
8/24/2011	10:15:27 AM	PH3 valve closed
8/24/2011	10:15:27 AM	SiCl4 pre valve closed
8/24/2011	10:15:27 AM	SiCl4 post valve closed
8/24/2011	10:15:27 AM	Bypass valve closed
8/24/2011	10:15:27 AM	Bubbler valve closed
8/24/2011	10:15:27 AM	Main Vac valve opened
8/24/2011	10:15:27 AM	Helium MFC set to  0.000000
8/24/2011	10:15:27 AM	H2 MFC set to  0.000000
8/24/2011	10:15:27 AM	BCl3 MFC set to  0.000000
8/24/2011	10:15:27 AM	PHl3 MFC set to  0.000000
8/24/2011	10:15:27 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:15:27 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:15:27 AM	Tube furnace set to 150
8/24/2011	10:15:28 AM	Run finished at 10:15 AM
8/24/2011	10:25:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/24/2011	10:25:08 AM	Recipe started at 10:25 AM
8/24/2011	10:25:08 AM	Helium valve closed
8/24/2011	10:25:08 AM	H2 valve closed
8/24/2011	10:25:08 AM	BCl3 valve closed
8/24/2011	10:25:08 AM	PH3 valve closed
8/24/2011	10:25:08 AM	SiCl4 pre valve closed
8/24/2011	10:25:08 AM	SiCl4 post valve closed
8/24/2011	10:25:08 AM	Main Vac valve closed
8/24/2011	10:25:08 AM	Bypass valve closed
8/24/2011	10:25:08 AM	Bubbler valve closed
8/24/2011	10:25:08 AM	Helium MFC set to  0.000000
8/24/2011	10:25:08 AM	H2 MFC set to  0.000000
8/24/2011	10:25:08 AM	BCl3 MFC set to  0.000000
8/24/2011	10:25:08 AM	PHl3 MFC set to  0.000000
8/24/2011	10:25:08 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:25:08 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:25:09 AM	Tube furnace set to 0
8/24/2011	10:25:09 AM	Run finished at 10:25 AM
8/24/2011	10:25:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/24/2011	10:25:19 AM	Main Vac valve opened
8/24/2011	10:26:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	10:26:25 AM	Recipe started at 10:26 AM
8/24/2011	10:26:25 AM	Helium valve closed
8/24/2011	10:26:25 AM	H2 valve closed
8/24/2011	10:26:25 AM	BCl3 valve closed
8/24/2011	10:26:25 AM	PH3 valve closed
8/24/2011	10:26:25 AM	SiCl4 pre valve closed
8/24/2011	10:26:25 AM	SiCl4 post valve closed
8/24/2011	10:26:25 AM	Main Vac valve closed
8/24/2011	10:26:25 AM	Bypass valve closed
8/24/2011	10:26:25 AM	Bubbler valve closed
8/24/2011	10:26:25 AM	Helium MFC set to  0.000000
8/24/2011	10:26:25 AM	H2 MFC set to  0.000000
8/24/2011	10:26:25 AM	BCl3 MFC set to  0.000000
8/24/2011	10:26:25 AM	PHl3 MFC set to  0.000000
8/24/2011	10:26:25 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:26:25 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:26:25 AM	Tube furnace set to 0
8/24/2011	10:26:28 AM	H2 valve closed
8/24/2011	10:26:28 AM	BCl3 valve closed
8/24/2011	10:26:28 AM	PH3 valve closed
8/24/2011	10:26:28 AM	SiCl4 pre valve closed
8/24/2011	10:26:28 AM	SiCl4 post valve closed
8/24/2011	10:26:28 AM	Main Vac valve closed
8/24/2011	10:26:28 AM	Bypass valve closed
8/24/2011	10:26:28 AM	Bubbler valve closed
8/24/2011	10:26:28 AM	Helium valve opened
8/24/2011	10:26:28 AM	Helium MFC set to  500.000000
8/24/2011	10:26:28 AM	H2 MFC set to  0.000000
8/24/2011	10:26:28 AM	BCl3 MFC set to  0.000000
8/24/2011	10:26:28 AM	PHl3 MFC set to  0.000000
8/24/2011	10:26:28 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:26:28 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:26:28 AM	Tube furnace set to 0
8/24/2011	10:27:31 AM	Helium valve closed
8/24/2011	10:27:31 AM	H2 valve closed
8/24/2011	10:27:31 AM	BCl3 valve closed
8/24/2011	10:27:31 AM	PH3 valve closed
8/24/2011	10:27:31 AM	SiCl4 pre valve closed
8/24/2011	10:27:31 AM	SiCl4 post valve closed
8/24/2011	10:27:31 AM	Main Vac valve closed
8/24/2011	10:27:31 AM	Bypass valve closed
8/24/2011	10:27:31 AM	Bubbler valve closed
8/24/2011	10:27:31 AM	Helium MFC set to  0.000000
8/24/2011	10:27:31 AM	H2 MFC set to  0.000000
8/24/2011	10:27:31 AM	BCl3 MFC set to  0.000000
8/24/2011	10:27:31 AM	PHl3 MFC set to  0.000000
8/24/2011	10:27:31 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:27:31 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:27:31 AM	Tube furnace set to 0
8/24/2011	10:27:32 AM	Run finished at 10:27 AM
8/24/2011	10:27:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	10:30:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	10:30:32 AM	Recipe started at 10:30 AM
8/24/2011	10:30:32 AM	Helium valve closed
8/24/2011	10:30:32 AM	H2 valve closed
8/24/2011	10:30:32 AM	BCl3 valve closed
8/24/2011	10:30:32 AM	PH3 valve closed
8/24/2011	10:30:32 AM	SiCl4 pre valve closed
8/24/2011	10:30:32 AM	SiCl4 post valve closed
8/24/2011	10:30:32 AM	Main Vac valve closed
8/24/2011	10:30:32 AM	Bubbler valve closed
8/24/2011	10:30:32 AM	Bypass valve opened
8/24/2011	10:30:32 AM	Helium MFC set to  0.000000
8/24/2011	10:30:32 AM	H2 MFC set to  0.000000
8/24/2011	10:30:32 AM	BCl3 MFC set to  0.000000
8/24/2011	10:30:32 AM	PHl3 MFC set to  0.000000
8/24/2011	10:30:32 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:30:32 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:30:32 AM	Tube furnace set to 0
8/24/2011	10:31:32 AM	Helium valve closed
8/24/2011	10:31:32 AM	H2 valve closed
8/24/2011	10:31:32 AM	BCl3 valve closed
8/24/2011	10:31:32 AM	PH3 valve closed
8/24/2011	10:31:32 AM	SiCl4 pre valve closed
8/24/2011	10:31:32 AM	SiCl4 post valve closed
8/24/2011	10:31:32 AM	Main Vac valve closed
8/24/2011	10:31:32 AM	Bubbler valve closed
8/24/2011	10:31:32 AM	Bypass valve opened
8/24/2011	10:31:32 AM	Helium MFC set to  0.000000
8/24/2011	10:31:32 AM	H2 MFC set to  0.000000
8/24/2011	10:31:32 AM	BCl3 MFC set to  0.000000
8/24/2011	10:31:32 AM	PHl3 MFC set to  0.000000
8/24/2011	10:31:32 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:31:32 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:31:32 AM	Tube furnace set to 0
8/24/2011	10:31:48 AM	Helium valve closed
8/24/2011	10:31:48 AM	H2 valve closed
8/24/2011	10:31:48 AM	BCl3 valve closed
8/24/2011	10:31:48 AM	PH3 valve closed
8/24/2011	10:31:48 AM	SiCl4 pre valve closed
8/24/2011	10:31:48 AM	SiCl4 post valve closed
8/24/2011	10:31:48 AM	Bypass valve closed
8/24/2011	10:31:48 AM	Bubbler valve closed
8/24/2011	10:31:48 AM	Main Vac valve opened
8/24/2011	10:31:48 AM	Helium MFC set to  0.000000
8/24/2011	10:31:48 AM	H2 MFC set to  0.000000
8/24/2011	10:31:48 AM	BCl3 MFC set to  0.000000
8/24/2011	10:31:48 AM	PHl3 MFC set to  0.000000
8/24/2011	10:31:48 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:31:48 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:31:48 AM	Tube furnace set to 0
8/24/2011	10:31:49 AM	Run finished at 10:31 AM
8/24/2011	10:31:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	10:33:51 AM	Recipe started at 10:33 AM
8/24/2011	10:33:51 AM	Helium valve closed
8/24/2011	10:33:51 AM	H2 valve closed
8/24/2011	10:33:51 AM	BCl3 valve closed
8/24/2011	10:33:51 AM	PH3 valve closed
8/24/2011	10:33:51 AM	SiCl4 pre valve closed
8/24/2011	10:33:51 AM	SiCl4 post valve closed
8/24/2011	10:33:51 AM	Bypass valve closed
8/24/2011	10:33:51 AM	Bubbler valve closed
8/24/2011	10:33:51 AM	Main Vac valve opened
8/24/2011	10:33:51 AM	Helium MFC set to  0.000000
8/24/2011	10:33:51 AM	H2 MFC set to  0.000000
8/24/2011	10:33:51 AM	BCl3 MFC set to  0.000000
8/24/2011	10:33:51 AM	PHl3 MFC set to  0.000000
8/24/2011	10:33:51 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:33:51 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:33:51 AM	Tube furnace set to 150
8/24/2011	10:33:55 AM	H2 valve closed
8/24/2011	10:33:55 AM	BCl3 valve closed
8/24/2011	10:33:55 AM	PH3 valve closed
8/24/2011	10:33:55 AM	SiCl4 pre valve closed
8/24/2011	10:33:55 AM	SiCl4 post valve closed
8/24/2011	10:33:55 AM	Bypass valve closed
8/24/2011	10:33:55 AM	Bubbler valve closed
8/24/2011	10:33:55 AM	Helium valve opened
8/24/2011	10:33:55 AM	Main Vac valve opened
8/24/2011	10:33:55 AM	Helium MFC set to  20.000000
8/24/2011	10:33:55 AM	H2 MFC set to  0.000000
8/24/2011	10:33:55 AM	BCl3 MFC set to  0.000000
8/24/2011	10:33:55 AM	PHl3 MFC set to  0.000000
8/24/2011	10:33:55 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:33:55 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:33:56 AM	Tube furnace set to 150
8/24/2011	10:34:26 AM	Helium valve closed
8/24/2011	10:34:26 AM	H2 valve closed
8/24/2011	10:34:26 AM	BCl3 valve closed
8/24/2011	10:34:26 AM	PH3 valve closed
8/24/2011	10:34:26 AM	SiCl4 pre valve closed
8/24/2011	10:34:26 AM	SiCl4 post valve closed
8/24/2011	10:34:26 AM	Bypass valve closed
8/24/2011	10:34:26 AM	Bubbler valve closed
8/24/2011	10:34:26 AM	Main Vac valve opened
8/24/2011	10:34:26 AM	Helium MFC set to  0.000000
8/24/2011	10:34:26 AM	H2 MFC set to  0.000000
8/24/2011	10:34:26 AM	BCl3 MFC set to  0.000000
8/24/2011	10:34:26 AM	PHl3 MFC set to  0.000000
8/24/2011	10:34:26 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:34:26 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:34:26 AM	Tube furnace set to 150
8/24/2011	10:34:56 AM	H2 valve closed
8/24/2011	10:34:56 AM	BCl3 valve closed
8/24/2011	10:34:56 AM	PH3 valve closed
8/24/2011	10:34:56 AM	SiCl4 pre valve closed
8/24/2011	10:34:56 AM	SiCl4 post valve closed
8/24/2011	10:34:56 AM	Bypass valve closed
8/24/2011	10:34:56 AM	Bubbler valve closed
8/24/2011	10:34:56 AM	Helium valve opened
8/24/2011	10:34:56 AM	Main Vac valve opened
8/24/2011	10:34:56 AM	Helium MFC set to  20.000000
8/24/2011	10:34:56 AM	H2 MFC set to  0.000000
8/24/2011	10:34:56 AM	BCl3 MFC set to  0.000000
8/24/2011	10:34:56 AM	PHl3 MFC set to  0.000000
8/24/2011	10:34:56 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:34:56 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:34:56 AM	Tube furnace set to 150
8/24/2011	10:35:26 AM	Helium valve closed
8/24/2011	10:35:26 AM	H2 valve closed
8/24/2011	10:35:26 AM	BCl3 valve closed
8/24/2011	10:35:26 AM	PH3 valve closed
8/24/2011	10:35:26 AM	SiCl4 pre valve closed
8/24/2011	10:35:26 AM	SiCl4 post valve closed
8/24/2011	10:35:26 AM	Bypass valve closed
8/24/2011	10:35:26 AM	Bubbler valve closed
8/24/2011	10:35:26 AM	Main Vac valve opened
8/24/2011	10:35:26 AM	Helium MFC set to  0.000000
8/24/2011	10:35:26 AM	H2 MFC set to  0.000000
8/24/2011	10:35:26 AM	BCl3 MFC set to  0.000000
8/24/2011	10:35:26 AM	PHl3 MFC set to  0.000000
8/24/2011	10:35:26 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:35:26 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:35:26 AM	Tube furnace set to 150
8/24/2011	10:35:56 AM	H2 valve closed
8/24/2011	10:35:56 AM	BCl3 valve closed
8/24/2011	10:35:56 AM	PH3 valve closed
8/24/2011	10:35:56 AM	SiCl4 pre valve closed
8/24/2011	10:35:56 AM	SiCl4 post valve closed
8/24/2011	10:35:56 AM	Bypass valve closed
8/24/2011	10:35:56 AM	Bubbler valve closed
8/24/2011	10:35:56 AM	Helium valve opened
8/24/2011	10:35:56 AM	Main Vac valve opened
8/24/2011	10:35:56 AM	Helium MFC set to  20.000000
8/24/2011	10:35:56 AM	H2 MFC set to  0.000000
8/24/2011	10:35:56 AM	BCl3 MFC set to  0.000000
8/24/2011	10:35:56 AM	PHl3 MFC set to  0.000000
8/24/2011	10:35:56 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:35:56 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:35:56 AM	Tube furnace set to 150
8/24/2011	10:36:26 AM	Helium valve closed
8/24/2011	10:36:26 AM	H2 valve closed
8/24/2011	10:36:26 AM	BCl3 valve closed
8/24/2011	10:36:26 AM	PH3 valve closed
8/24/2011	10:36:26 AM	SiCl4 pre valve closed
8/24/2011	10:36:26 AM	SiCl4 post valve closed
8/24/2011	10:36:26 AM	Bypass valve closed
8/24/2011	10:36:26 AM	Bubbler valve closed
8/24/2011	10:36:26 AM	Main Vac valve opened
8/24/2011	10:36:26 AM	Helium MFC set to  0.000000
8/24/2011	10:36:26 AM	H2 MFC set to  0.000000
8/24/2011	10:36:26 AM	BCl3 MFC set to  0.000000
8/24/2011	10:36:26 AM	PHl3 MFC set to  0.000000
8/24/2011	10:36:26 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:36:26 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:36:27 AM	Tube furnace set to 150
8/24/2011	10:36:57 AM	H2 valve closed
8/24/2011	10:36:57 AM	BCl3 valve closed
8/24/2011	10:36:57 AM	PH3 valve closed
8/24/2011	10:36:57 AM	SiCl4 pre valve closed
8/24/2011	10:36:57 AM	SiCl4 post valve closed
8/24/2011	10:36:57 AM	Bypass valve closed
8/24/2011	10:36:57 AM	Bubbler valve closed
8/24/2011	10:36:57 AM	Helium valve opened
8/24/2011	10:36:57 AM	Main Vac valve opened
8/24/2011	10:36:57 AM	Helium MFC set to  20.000000
8/24/2011	10:36:57 AM	H2 MFC set to  0.000000
8/24/2011	10:36:57 AM	BCl3 MFC set to  0.000000
8/24/2011	10:36:57 AM	PHl3 MFC set to  0.000000
8/24/2011	10:36:57 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:36:57 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:36:57 AM	Tube furnace set to 150
8/24/2011	10:37:27 AM	Helium valve closed
8/24/2011	10:37:27 AM	H2 valve closed
8/24/2011	10:37:27 AM	BCl3 valve closed
8/24/2011	10:37:27 AM	PH3 valve closed
8/24/2011	10:37:27 AM	SiCl4 pre valve closed
8/24/2011	10:37:27 AM	SiCl4 post valve closed
8/24/2011	10:37:27 AM	Bypass valve closed
8/24/2011	10:37:27 AM	Bubbler valve closed
8/24/2011	10:37:27 AM	Main Vac valve opened
8/24/2011	10:37:27 AM	Helium MFC set to  0.000000
8/24/2011	10:37:27 AM	H2 MFC set to  0.000000
8/24/2011	10:37:27 AM	BCl3 MFC set to  0.000000
8/24/2011	10:37:27 AM	PHl3 MFC set to  0.000000
8/24/2011	10:37:27 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:37:27 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:37:27 AM	Tube furnace set to 150
8/24/2011	10:37:57 AM	H2 valve closed
8/24/2011	10:37:57 AM	BCl3 valve closed
8/24/2011	10:37:57 AM	PH3 valve closed
8/24/2011	10:37:57 AM	SiCl4 pre valve closed
8/24/2011	10:37:57 AM	SiCl4 post valve closed
8/24/2011	10:37:57 AM	Bypass valve closed
8/24/2011	10:37:57 AM	Bubbler valve closed
8/24/2011	10:37:57 AM	Helium valve opened
8/24/2011	10:37:57 AM	Main Vac valve opened
8/24/2011	10:37:57 AM	Helium MFC set to  20.000000
8/24/2011	10:37:57 AM	H2 MFC set to  0.000000
8/24/2011	10:37:57 AM	BCl3 MFC set to  0.000000
8/24/2011	10:37:57 AM	PHl3 MFC set to  0.000000
8/24/2011	10:37:57 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:37:57 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:37:57 AM	Tube furnace set to 150
8/24/2011	10:38:27 AM	Helium valve closed
8/24/2011	10:38:27 AM	H2 valve closed
8/24/2011	10:38:27 AM	BCl3 valve closed
8/24/2011	10:38:27 AM	PH3 valve closed
8/24/2011	10:38:27 AM	SiCl4 pre valve closed
8/24/2011	10:38:27 AM	SiCl4 post valve closed
8/24/2011	10:38:27 AM	Bypass valve closed
8/24/2011	10:38:27 AM	Bubbler valve closed
8/24/2011	10:38:27 AM	Main Vac valve opened
8/24/2011	10:38:27 AM	Helium MFC set to  0.000000
8/24/2011	10:38:27 AM	H2 MFC set to  0.000000
8/24/2011	10:38:27 AM	BCl3 MFC set to  0.000000
8/24/2011	10:38:27 AM	PHl3 MFC set to  0.000000
8/24/2011	10:38:27 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:38:27 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:38:27 AM	Tube furnace set to 150
8/24/2011	10:38:57 AM	H2 valve closed
8/24/2011	10:38:57 AM	BCl3 valve closed
8/24/2011	10:38:57 AM	PH3 valve closed
8/24/2011	10:38:57 AM	SiCl4 pre valve closed
8/24/2011	10:38:57 AM	SiCl4 post valve closed
8/24/2011	10:38:57 AM	Bypass valve closed
8/24/2011	10:38:57 AM	Bubbler valve closed
8/24/2011	10:38:57 AM	Helium valve opened
8/24/2011	10:38:57 AM	Main Vac valve opened
8/24/2011	10:38:57 AM	Helium MFC set to  20.000000
8/24/2011	10:38:57 AM	H2 MFC set to  0.000000
8/24/2011	10:38:57 AM	BCl3 MFC set to  0.000000
8/24/2011	10:38:57 AM	PHl3 MFC set to  0.000000
8/24/2011	10:38:57 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:38:57 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:38:58 AM	Tube furnace set to 150
8/24/2011	10:39:28 AM	Helium valve closed
8/24/2011	10:39:28 AM	H2 valve closed
8/24/2011	10:39:28 AM	BCl3 valve closed
8/24/2011	10:39:28 AM	PH3 valve closed
8/24/2011	10:39:28 AM	SiCl4 pre valve closed
8/24/2011	10:39:28 AM	SiCl4 post valve closed
8/24/2011	10:39:28 AM	Bypass valve closed
8/24/2011	10:39:28 AM	Bubbler valve closed
8/24/2011	10:39:28 AM	Main Vac valve opened
8/24/2011	10:39:28 AM	Helium MFC set to  0.000000
8/24/2011	10:39:28 AM	H2 MFC set to  0.000000
8/24/2011	10:39:28 AM	BCl3 MFC set to  0.000000
8/24/2011	10:39:28 AM	PHl3 MFC set to  0.000000
8/24/2011	10:39:28 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:39:28 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:39:28 AM	Tube furnace set to 150
8/24/2011	10:39:58 AM	H2 valve closed
8/24/2011	10:39:58 AM	BCl3 valve closed
8/24/2011	10:39:58 AM	PH3 valve closed
8/24/2011	10:39:58 AM	SiCl4 pre valve closed
8/24/2011	10:39:58 AM	SiCl4 post valve closed
8/24/2011	10:39:58 AM	Bypass valve closed
8/24/2011	10:39:58 AM	Bubbler valve closed
8/24/2011	10:39:58 AM	Helium valve opened
8/24/2011	10:39:58 AM	Main Vac valve opened
8/24/2011	10:39:58 AM	Helium MFC set to  20.000000
8/24/2011	10:39:58 AM	H2 MFC set to  0.000000
8/24/2011	10:39:58 AM	BCl3 MFC set to  0.000000
8/24/2011	10:39:58 AM	PHl3 MFC set to  0.000000
8/24/2011	10:39:58 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:39:58 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:39:58 AM	Tube furnace set to 150
8/24/2011	10:40:28 AM	Helium valve closed
8/24/2011	10:40:28 AM	H2 valve closed
8/24/2011	10:40:28 AM	BCl3 valve closed
8/24/2011	10:40:28 AM	PH3 valve closed
8/24/2011	10:40:28 AM	SiCl4 pre valve closed
8/24/2011	10:40:28 AM	SiCl4 post valve closed
8/24/2011	10:40:28 AM	Bypass valve closed
8/24/2011	10:40:28 AM	Bubbler valve closed
8/24/2011	10:40:28 AM	Main Vac valve opened
8/24/2011	10:40:28 AM	Helium MFC set to  0.000000
8/24/2011	10:40:28 AM	H2 MFC set to  0.000000
8/24/2011	10:40:28 AM	BCl3 MFC set to  0.000000
8/24/2011	10:40:28 AM	PHl3 MFC set to  0.000000
8/24/2011	10:40:28 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:40:28 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:40:28 AM	Tube furnace set to 150
8/24/2011	10:40:58 AM	H2 valve closed
8/24/2011	10:40:58 AM	BCl3 valve closed
8/24/2011	10:40:58 AM	PH3 valve closed
8/24/2011	10:40:58 AM	SiCl4 pre valve closed
8/24/2011	10:40:58 AM	SiCl4 post valve closed
8/24/2011	10:40:58 AM	Bypass valve closed
8/24/2011	10:40:58 AM	Bubbler valve closed
8/24/2011	10:40:58 AM	Helium valve opened
8/24/2011	10:40:58 AM	Main Vac valve opened
8/24/2011	10:40:58 AM	Helium MFC set to  20.000000
8/24/2011	10:40:58 AM	H2 MFC set to  0.000000
8/24/2011	10:40:58 AM	BCl3 MFC set to  0.000000
8/24/2011	10:40:58 AM	PHl3 MFC set to  0.000000
8/24/2011	10:40:58 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:40:58 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:40:58 AM	Tube furnace set to 150
8/24/2011	10:41:29 AM	Helium valve closed
8/24/2011	10:41:29 AM	H2 valve closed
8/24/2011	10:41:29 AM	BCl3 valve closed
8/24/2011	10:41:29 AM	PH3 valve closed
8/24/2011	10:41:29 AM	SiCl4 pre valve closed
8/24/2011	10:41:29 AM	SiCl4 post valve closed
8/24/2011	10:41:29 AM	Bypass valve closed
8/24/2011	10:41:29 AM	Bubbler valve closed
8/24/2011	10:41:29 AM	Main Vac valve opened
8/24/2011	10:41:29 AM	Helium MFC set to  0.000000
8/24/2011	10:41:29 AM	H2 MFC set to  0.000000
8/24/2011	10:41:29 AM	BCl3 MFC set to  0.000000
8/24/2011	10:41:29 AM	PHl3 MFC set to  0.000000
8/24/2011	10:41:29 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:41:29 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:41:29 AM	Tube furnace set to 150
8/24/2011	10:41:59 AM	H2 valve closed
8/24/2011	10:41:59 AM	BCl3 valve closed
8/24/2011	10:41:59 AM	PH3 valve closed
8/24/2011	10:41:59 AM	SiCl4 pre valve closed
8/24/2011	10:41:59 AM	SiCl4 post valve closed
8/24/2011	10:41:59 AM	Bypass valve closed
8/24/2011	10:41:59 AM	Bubbler valve closed
8/24/2011	10:41:59 AM	Helium valve opened
8/24/2011	10:41:59 AM	Main Vac valve opened
8/24/2011	10:41:59 AM	Helium MFC set to  20.000000
8/24/2011	10:41:59 AM	H2 MFC set to  0.000000
8/24/2011	10:41:59 AM	BCl3 MFC set to  0.000000
8/24/2011	10:41:59 AM	PHl3 MFC set to  0.000000
8/24/2011	10:41:59 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:41:59 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:41:59 AM	Tube furnace set to 150
8/24/2011	10:42:29 AM	Helium valve closed
8/24/2011	10:42:29 AM	H2 valve closed
8/24/2011	10:42:29 AM	BCl3 valve closed
8/24/2011	10:42:29 AM	PH3 valve closed
8/24/2011	10:42:29 AM	SiCl4 pre valve closed
8/24/2011	10:42:29 AM	SiCl4 post valve closed
8/24/2011	10:42:29 AM	Bypass valve closed
8/24/2011	10:42:29 AM	Bubbler valve closed
8/24/2011	10:42:29 AM	Main Vac valve opened
8/24/2011	10:42:29 AM	Helium MFC set to  0.000000
8/24/2011	10:42:29 AM	H2 MFC set to  0.000000
8/24/2011	10:42:29 AM	BCl3 MFC set to  0.000000
8/24/2011	10:42:29 AM	PHl3 MFC set to  0.000000
8/24/2011	10:42:29 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:42:29 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:42:29 AM	Tube furnace set to 150
8/24/2011	10:42:59 AM	H2 valve closed
8/24/2011	10:42:59 AM	BCl3 valve closed
8/24/2011	10:42:59 AM	PH3 valve closed
8/24/2011	10:42:59 AM	SiCl4 pre valve closed
8/24/2011	10:42:59 AM	SiCl4 post valve closed
8/24/2011	10:42:59 AM	Bypass valve closed
8/24/2011	10:42:59 AM	Bubbler valve closed
8/24/2011	10:42:59 AM	Helium valve opened
8/24/2011	10:42:59 AM	Main Vac valve opened
8/24/2011	10:42:59 AM	Helium MFC set to  20.000000
8/24/2011	10:42:59 AM	H2 MFC set to  0.000000
8/24/2011	10:42:59 AM	BCl3 MFC set to  0.000000
8/24/2011	10:42:59 AM	PHl3 MFC set to  0.000000
8/24/2011	10:42:59 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:42:59 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:42:59 AM	Tube furnace set to 150
8/24/2011	10:43:29 AM	Helium valve closed
8/24/2011	10:43:29 AM	H2 valve closed
8/24/2011	10:43:29 AM	BCl3 valve closed
8/24/2011	10:43:29 AM	PH3 valve closed
8/24/2011	10:43:29 AM	SiCl4 pre valve closed
8/24/2011	10:43:29 AM	SiCl4 post valve closed
8/24/2011	10:43:29 AM	Bypass valve closed
8/24/2011	10:43:29 AM	Bubbler valve closed
8/24/2011	10:43:29 AM	Main Vac valve opened
8/24/2011	10:43:29 AM	Helium MFC set to  0.000000
8/24/2011	10:43:29 AM	H2 MFC set to  0.000000
8/24/2011	10:43:29 AM	BCl3 MFC set to  0.000000
8/24/2011	10:43:29 AM	PHl3 MFC set to  0.000000
8/24/2011	10:43:29 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:43:29 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:43:30 AM	Tube furnace set to 150
8/24/2011	10:43:31 AM	Run finished at 10:43 AM
8/24/2011	10:46:07 AM	Recipe started at 10:46 AM
8/24/2011	10:46:07 AM	Helium valve closed
8/24/2011	10:46:07 AM	H2 valve closed
8/24/2011	10:46:07 AM	BCl3 valve closed
8/24/2011	10:46:07 AM	PH3 valve closed
8/24/2011	10:46:07 AM	SiCl4 pre valve closed
8/24/2011	10:46:07 AM	SiCl4 post valve closed
8/24/2011	10:46:07 AM	Bypass valve closed
8/24/2011	10:46:07 AM	Bubbler valve closed
8/24/2011	10:46:07 AM	Main Vac valve opened
8/24/2011	10:46:07 AM	Helium MFC set to  0.000000
8/24/2011	10:46:07 AM	H2 MFC set to  0.000000
8/24/2011	10:46:07 AM	BCl3 MFC set to  0.000000
8/24/2011	10:46:07 AM	PHl3 MFC set to  0.000000
8/24/2011	10:46:07 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:46:07 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:46:07 AM	Tube furnace set to 150
8/24/2011	10:46:11 AM	H2 valve closed
8/24/2011	10:46:11 AM	BCl3 valve closed
8/24/2011	10:46:11 AM	PH3 valve closed
8/24/2011	10:46:11 AM	SiCl4 pre valve closed
8/24/2011	10:46:11 AM	SiCl4 post valve closed
8/24/2011	10:46:11 AM	Bypass valve closed
8/24/2011	10:46:11 AM	Bubbler valve closed
8/24/2011	10:46:11 AM	Helium valve opened
8/24/2011	10:46:11 AM	Main Vac valve opened
8/24/2011	10:46:11 AM	Helium MFC set to  20.000000
8/24/2011	10:46:11 AM	H2 MFC set to  0.000000
8/24/2011	10:46:11 AM	BCl3 MFC set to  0.000000
8/24/2011	10:46:11 AM	PHl3 MFC set to  0.000000
8/24/2011	10:46:11 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:46:11 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:46:11 AM	Tube furnace set to 150
8/24/2011	10:46:41 AM	Helium valve closed
8/24/2011	10:46:41 AM	H2 valve closed
8/24/2011	10:46:41 AM	BCl3 valve closed
8/24/2011	10:46:41 AM	PH3 valve closed
8/24/2011	10:46:41 AM	SiCl4 pre valve closed
8/24/2011	10:46:41 AM	SiCl4 post valve closed
8/24/2011	10:46:41 AM	Bypass valve closed
8/24/2011	10:46:41 AM	Bubbler valve closed
8/24/2011	10:46:41 AM	Main Vac valve opened
8/24/2011	10:46:41 AM	Helium MFC set to  0.000000
8/24/2011	10:46:41 AM	H2 MFC set to  0.000000
8/24/2011	10:46:41 AM	BCl3 MFC set to  0.000000
8/24/2011	10:46:41 AM	PHl3 MFC set to  0.000000
8/24/2011	10:46:41 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:46:41 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:46:41 AM	Tube furnace set to 150
8/24/2011	10:47:11 AM	H2 valve closed
8/24/2011	10:47:11 AM	BCl3 valve closed
8/24/2011	10:47:11 AM	PH3 valve closed
8/24/2011	10:47:11 AM	SiCl4 pre valve closed
8/24/2011	10:47:11 AM	SiCl4 post valve closed
8/24/2011	10:47:11 AM	Bypass valve closed
8/24/2011	10:47:11 AM	Bubbler valve closed
8/24/2011	10:47:11 AM	Helium valve opened
8/24/2011	10:47:11 AM	Main Vac valve opened
8/24/2011	10:47:11 AM	Helium MFC set to  20.000000
8/24/2011	10:47:11 AM	H2 MFC set to  0.000000
8/24/2011	10:47:11 AM	BCl3 MFC set to  0.000000
8/24/2011	10:47:11 AM	PHl3 MFC set to  0.000000
8/24/2011	10:47:11 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:47:11 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:47:11 AM	Tube furnace set to 150
8/24/2011	10:47:41 AM	Helium valve closed
8/24/2011	10:47:41 AM	H2 valve closed
8/24/2011	10:47:41 AM	BCl3 valve closed
8/24/2011	10:47:41 AM	PH3 valve closed
8/24/2011	10:47:41 AM	SiCl4 pre valve closed
8/24/2011	10:47:41 AM	SiCl4 post valve closed
8/24/2011	10:47:41 AM	Bypass valve closed
8/24/2011	10:47:41 AM	Bubbler valve closed
8/24/2011	10:47:41 AM	Main Vac valve opened
8/24/2011	10:47:41 AM	Helium MFC set to  0.000000
8/24/2011	10:47:41 AM	H2 MFC set to  0.000000
8/24/2011	10:47:41 AM	BCl3 MFC set to  0.000000
8/24/2011	10:47:41 AM	PHl3 MFC set to  0.000000
8/24/2011	10:47:41 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:47:41 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:47:41 AM	Tube furnace set to 150
8/24/2011	10:48:11 AM	H2 valve closed
8/24/2011	10:48:11 AM	BCl3 valve closed
8/24/2011	10:48:11 AM	PH3 valve closed
8/24/2011	10:48:11 AM	SiCl4 pre valve closed
8/24/2011	10:48:11 AM	SiCl4 post valve closed
8/24/2011	10:48:11 AM	Bypass valve closed
8/24/2011	10:48:11 AM	Bubbler valve closed
8/24/2011	10:48:11 AM	Helium valve opened
8/24/2011	10:48:11 AM	Main Vac valve opened
8/24/2011	10:48:11 AM	Helium MFC set to  20.000000
8/24/2011	10:48:11 AM	H2 MFC set to  0.000000
8/24/2011	10:48:11 AM	BCl3 MFC set to  0.000000
8/24/2011	10:48:11 AM	PHl3 MFC set to  0.000000
8/24/2011	10:48:11 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:48:11 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:48:12 AM	Tube furnace set to 150
8/24/2011	10:48:42 AM	Helium valve closed
8/24/2011	10:48:42 AM	H2 valve closed
8/24/2011	10:48:42 AM	BCl3 valve closed
8/24/2011	10:48:42 AM	PH3 valve closed
8/24/2011	10:48:42 AM	SiCl4 pre valve closed
8/24/2011	10:48:42 AM	SiCl4 post valve closed
8/24/2011	10:48:42 AM	Bypass valve closed
8/24/2011	10:48:42 AM	Bubbler valve closed
8/24/2011	10:48:42 AM	Main Vac valve opened
8/24/2011	10:48:42 AM	Helium MFC set to  0.000000
8/24/2011	10:48:42 AM	H2 MFC set to  0.000000
8/24/2011	10:48:42 AM	BCl3 MFC set to  0.000000
8/24/2011	10:48:42 AM	PHl3 MFC set to  0.000000
8/24/2011	10:48:42 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:48:42 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:48:42 AM	Tube furnace set to 150
8/24/2011	10:49:12 AM	H2 valve closed
8/24/2011	10:49:12 AM	BCl3 valve closed
8/24/2011	10:49:12 AM	PH3 valve closed
8/24/2011	10:49:12 AM	SiCl4 pre valve closed
8/24/2011	10:49:12 AM	SiCl4 post valve closed
8/24/2011	10:49:12 AM	Bypass valve closed
8/24/2011	10:49:12 AM	Bubbler valve closed
8/24/2011	10:49:12 AM	Helium valve opened
8/24/2011	10:49:12 AM	Main Vac valve opened
8/24/2011	10:49:12 AM	Helium MFC set to  20.000000
8/24/2011	10:49:12 AM	H2 MFC set to  0.000000
8/24/2011	10:49:12 AM	BCl3 MFC set to  0.000000
8/24/2011	10:49:12 AM	PHl3 MFC set to  0.000000
8/24/2011	10:49:12 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:49:12 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:49:12 AM	Tube furnace set to 150
8/24/2011	10:49:42 AM	Helium valve closed
8/24/2011	10:49:42 AM	H2 valve closed
8/24/2011	10:49:42 AM	BCl3 valve closed
8/24/2011	10:49:42 AM	PH3 valve closed
8/24/2011	10:49:42 AM	SiCl4 pre valve closed
8/24/2011	10:49:42 AM	SiCl4 post valve closed
8/24/2011	10:49:42 AM	Bypass valve closed
8/24/2011	10:49:42 AM	Bubbler valve closed
8/24/2011	10:49:42 AM	Main Vac valve opened
8/24/2011	10:49:42 AM	Helium MFC set to  0.000000
8/24/2011	10:49:42 AM	H2 MFC set to  0.000000
8/24/2011	10:49:42 AM	BCl3 MFC set to  0.000000
8/24/2011	10:49:42 AM	PHl3 MFC set to  0.000000
8/24/2011	10:49:42 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:49:42 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:49:42 AM	Tube furnace set to 150
8/24/2011	10:50:12 AM	H2 valve closed
8/24/2011	10:50:12 AM	BCl3 valve closed
8/24/2011	10:50:12 AM	PH3 valve closed
8/24/2011	10:50:12 AM	SiCl4 pre valve closed
8/24/2011	10:50:12 AM	SiCl4 post valve closed
8/24/2011	10:50:12 AM	Bypass valve closed
8/24/2011	10:50:12 AM	Bubbler valve closed
8/24/2011	10:50:12 AM	Helium valve opened
8/24/2011	10:50:12 AM	Main Vac valve opened
8/24/2011	10:50:12 AM	Helium MFC set to  20.000000
8/24/2011	10:50:12 AM	H2 MFC set to  0.000000
8/24/2011	10:50:12 AM	BCl3 MFC set to  0.000000
8/24/2011	10:50:12 AM	PHl3 MFC set to  0.000000
8/24/2011	10:50:12 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:50:12 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:50:12 AM	Tube furnace set to 150
8/24/2011	10:50:42 AM	Helium valve closed
8/24/2011	10:50:42 AM	H2 valve closed
8/24/2011	10:50:42 AM	BCl3 valve closed
8/24/2011	10:50:42 AM	PH3 valve closed
8/24/2011	10:50:42 AM	SiCl4 pre valve closed
8/24/2011	10:50:42 AM	SiCl4 post valve closed
8/24/2011	10:50:42 AM	Bypass valve closed
8/24/2011	10:50:42 AM	Bubbler valve closed
8/24/2011	10:50:42 AM	Main Vac valve opened
8/24/2011	10:50:42 AM	Helium MFC set to  0.000000
8/24/2011	10:50:42 AM	H2 MFC set to  0.000000
8/24/2011	10:50:42 AM	BCl3 MFC set to  0.000000
8/24/2011	10:50:42 AM	PHl3 MFC set to  0.000000
8/24/2011	10:50:42 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:50:42 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:50:43 AM	Tube furnace set to 150
8/24/2011	10:51:13 AM	H2 valve closed
8/24/2011	10:51:13 AM	BCl3 valve closed
8/24/2011	10:51:13 AM	PH3 valve closed
8/24/2011	10:51:13 AM	SiCl4 pre valve closed
8/24/2011	10:51:13 AM	SiCl4 post valve closed
8/24/2011	10:51:13 AM	Bypass valve closed
8/24/2011	10:51:13 AM	Bubbler valve closed
8/24/2011	10:51:13 AM	Helium valve opened
8/24/2011	10:51:13 AM	Main Vac valve opened
8/24/2011	10:51:13 AM	Helium MFC set to  20.000000
8/24/2011	10:51:13 AM	H2 MFC set to  0.000000
8/24/2011	10:51:13 AM	BCl3 MFC set to  0.000000
8/24/2011	10:51:13 AM	PHl3 MFC set to  0.000000
8/24/2011	10:51:13 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:51:13 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:51:13 AM	Tube furnace set to 150
8/24/2011	10:51:43 AM	Helium valve closed
8/24/2011	10:51:43 AM	H2 valve closed
8/24/2011	10:51:43 AM	BCl3 valve closed
8/24/2011	10:51:43 AM	PH3 valve closed
8/24/2011	10:51:43 AM	SiCl4 pre valve closed
8/24/2011	10:51:43 AM	SiCl4 post valve closed
8/24/2011	10:51:43 AM	Bypass valve closed
8/24/2011	10:51:43 AM	Bubbler valve closed
8/24/2011	10:51:43 AM	Main Vac valve opened
8/24/2011	10:51:43 AM	Helium MFC set to  0.000000
8/24/2011	10:51:43 AM	H2 MFC set to  0.000000
8/24/2011	10:51:43 AM	BCl3 MFC set to  0.000000
8/24/2011	10:51:43 AM	PHl3 MFC set to  0.000000
8/24/2011	10:51:43 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:51:43 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:51:43 AM	Tube furnace set to 150
8/24/2011	10:52:13 AM	H2 valve closed
8/24/2011	10:52:13 AM	BCl3 valve closed
8/24/2011	10:52:13 AM	PH3 valve closed
8/24/2011	10:52:13 AM	SiCl4 pre valve closed
8/24/2011	10:52:13 AM	SiCl4 post valve closed
8/24/2011	10:52:13 AM	Bypass valve closed
8/24/2011	10:52:13 AM	Bubbler valve closed
8/24/2011	10:52:13 AM	Helium valve opened
8/24/2011	10:52:13 AM	Main Vac valve opened
8/24/2011	10:52:13 AM	Helium MFC set to  20.000000
8/24/2011	10:52:13 AM	H2 MFC set to  0.000000
8/24/2011	10:52:13 AM	BCl3 MFC set to  0.000000
8/24/2011	10:52:13 AM	PHl3 MFC set to  0.000000
8/24/2011	10:52:13 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:52:13 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:52:13 AM	Tube furnace set to 150
8/24/2011	10:52:43 AM	Helium valve closed
8/24/2011	10:52:43 AM	H2 valve closed
8/24/2011	10:52:43 AM	BCl3 valve closed
8/24/2011	10:52:43 AM	PH3 valve closed
8/24/2011	10:52:43 AM	SiCl4 pre valve closed
8/24/2011	10:52:43 AM	SiCl4 post valve closed
8/24/2011	10:52:43 AM	Bypass valve closed
8/24/2011	10:52:43 AM	Bubbler valve closed
8/24/2011	10:52:43 AM	Main Vac valve opened
8/24/2011	10:52:43 AM	Helium MFC set to  0.000000
8/24/2011	10:52:43 AM	H2 MFC set to  0.000000
8/24/2011	10:52:43 AM	BCl3 MFC set to  0.000000
8/24/2011	10:52:43 AM	PHl3 MFC set to  0.000000
8/24/2011	10:52:43 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:52:43 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:52:43 AM	Tube furnace set to 150
8/24/2011	10:53:13 AM	H2 valve closed
8/24/2011	10:53:13 AM	BCl3 valve closed
8/24/2011	10:53:13 AM	PH3 valve closed
8/24/2011	10:53:13 AM	SiCl4 pre valve closed
8/24/2011	10:53:13 AM	SiCl4 post valve closed
8/24/2011	10:53:13 AM	Bypass valve closed
8/24/2011	10:53:13 AM	Bubbler valve closed
8/24/2011	10:53:13 AM	Helium valve opened
8/24/2011	10:53:13 AM	Main Vac valve opened
8/24/2011	10:53:13 AM	Helium MFC set to  20.000000
8/24/2011	10:53:13 AM	H2 MFC set to  0.000000
8/24/2011	10:53:13 AM	BCl3 MFC set to  0.000000
8/24/2011	10:53:13 AM	PHl3 MFC set to  0.000000
8/24/2011	10:53:13 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:53:13 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:53:14 AM	Tube furnace set to 150
8/24/2011	10:53:44 AM	Helium valve closed
8/24/2011	10:53:44 AM	H2 valve closed
8/24/2011	10:53:44 AM	BCl3 valve closed
8/24/2011	10:53:44 AM	PH3 valve closed
8/24/2011	10:53:44 AM	SiCl4 pre valve closed
8/24/2011	10:53:44 AM	SiCl4 post valve closed
8/24/2011	10:53:44 AM	Bypass valve closed
8/24/2011	10:53:44 AM	Bubbler valve closed
8/24/2011	10:53:44 AM	Main Vac valve opened
8/24/2011	10:53:44 AM	Helium MFC set to  0.000000
8/24/2011	10:53:44 AM	H2 MFC set to  0.000000
8/24/2011	10:53:44 AM	BCl3 MFC set to  0.000000
8/24/2011	10:53:44 AM	PHl3 MFC set to  0.000000
8/24/2011	10:53:44 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:53:44 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:53:44 AM	Tube furnace set to 150
8/24/2011	10:54:14 AM	H2 valve closed
8/24/2011	10:54:14 AM	BCl3 valve closed
8/24/2011	10:54:14 AM	PH3 valve closed
8/24/2011	10:54:14 AM	SiCl4 pre valve closed
8/24/2011	10:54:14 AM	SiCl4 post valve closed
8/24/2011	10:54:14 AM	Bypass valve closed
8/24/2011	10:54:14 AM	Bubbler valve closed
8/24/2011	10:54:14 AM	Helium valve opened
8/24/2011	10:54:14 AM	Main Vac valve opened
8/24/2011	10:54:14 AM	Helium MFC set to  20.000000
8/24/2011	10:54:14 AM	H2 MFC set to  0.000000
8/24/2011	10:54:14 AM	BCl3 MFC set to  0.000000
8/24/2011	10:54:14 AM	PHl3 MFC set to  0.000000
8/24/2011	10:54:14 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:54:14 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:54:14 AM	Tube furnace set to 150
8/24/2011	10:54:44 AM	Helium valve closed
8/24/2011	10:54:44 AM	H2 valve closed
8/24/2011	10:54:44 AM	BCl3 valve closed
8/24/2011	10:54:44 AM	PH3 valve closed
8/24/2011	10:54:44 AM	SiCl4 pre valve closed
8/24/2011	10:54:44 AM	SiCl4 post valve closed
8/24/2011	10:54:44 AM	Bypass valve closed
8/24/2011	10:54:44 AM	Bubbler valve closed
8/24/2011	10:54:44 AM	Main Vac valve opened
8/24/2011	10:54:44 AM	Helium MFC set to  0.000000
8/24/2011	10:54:44 AM	H2 MFC set to  0.000000
8/24/2011	10:54:44 AM	BCl3 MFC set to  0.000000
8/24/2011	10:54:44 AM	PHl3 MFC set to  0.000000
8/24/2011	10:54:44 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:54:44 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:54:44 AM	Tube furnace set to 150
8/24/2011	10:55:14 AM	H2 valve closed
8/24/2011	10:55:14 AM	BCl3 valve closed
8/24/2011	10:55:14 AM	PH3 valve closed
8/24/2011	10:55:14 AM	SiCl4 pre valve closed
8/24/2011	10:55:14 AM	SiCl4 post valve closed
8/24/2011	10:55:14 AM	Bypass valve closed
8/24/2011	10:55:14 AM	Bubbler valve closed
8/24/2011	10:55:14 AM	Helium valve opened
8/24/2011	10:55:14 AM	Main Vac valve opened
8/24/2011	10:55:14 AM	Helium MFC set to  20.000000
8/24/2011	10:55:14 AM	H2 MFC set to  0.000000
8/24/2011	10:55:14 AM	BCl3 MFC set to  0.000000
8/24/2011	10:55:14 AM	PHl3 MFC set to  0.000000
8/24/2011	10:55:14 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:55:14 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:55:14 AM	Tube furnace set to 150
8/24/2011	10:55:44 AM	Helium valve closed
8/24/2011	10:55:44 AM	H2 valve closed
8/24/2011	10:55:44 AM	BCl3 valve closed
8/24/2011	10:55:44 AM	PH3 valve closed
8/24/2011	10:55:44 AM	SiCl4 pre valve closed
8/24/2011	10:55:44 AM	SiCl4 post valve closed
8/24/2011	10:55:44 AM	Bypass valve closed
8/24/2011	10:55:44 AM	Bubbler valve closed
8/24/2011	10:55:44 AM	Main Vac valve opened
8/24/2011	10:55:44 AM	Helium MFC set to  0.000000
8/24/2011	10:55:44 AM	H2 MFC set to  0.000000
8/24/2011	10:55:44 AM	BCl3 MFC set to  0.000000
8/24/2011	10:55:44 AM	PHl3 MFC set to  0.000000
8/24/2011	10:55:44 AM	SiCl4 MFC set to  0.000000
8/24/2011	10:55:44 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:55:45 AM	Tube furnace set to 150
8/24/2011	10:55:46 AM	Run finished at 10:55 AM
8/24/2011	11:02:58 AM	Main Vac valve closed
8/24/2011	11:03:10 AM	Main Vac valve opened
8/24/2011	11:05:09 AM	Main Vac valve closed
8/24/2011	11:05:26 AM	Main Vac valve opened
8/24/2011	11:07:07 AM	Main Vac valve closed
8/24/2011	11:07:18 AM	Main Vac valve opened
8/24/2011	11:11:43 AM	Tube furnace set to 0
8/24/2011	11:14:09 AM	Recipe started at 11:14 AM
8/24/2011	11:14:09 AM	Helium valve closed
8/24/2011	11:14:09 AM	H2 valve closed
8/24/2011	11:14:09 AM	BCl3 valve closed
8/24/2011	11:14:09 AM	PH3 valve closed
8/24/2011	11:14:09 AM	SiCl4 pre valve closed
8/24/2011	11:14:09 AM	SiCl4 post valve closed
8/24/2011	11:14:09 AM	Main Vac valve closed
8/24/2011	11:14:09 AM	Bypass valve closed
8/24/2011	11:14:09 AM	Bubbler valve closed
8/24/2011	11:14:09 AM	Helium MFC set to  0.000000
8/24/2011	11:14:09 AM	H2 MFC set to  0.000000
8/24/2011	11:14:09 AM	BCl3 MFC set to  0.000000
8/24/2011	11:14:09 AM	PHl3 MFC set to  0.000000
8/24/2011	11:14:09 AM	SiCl4 MFC set to  0.000000
8/24/2011	11:14:09 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:14:09 AM	Tube furnace set to 0
8/24/2011	11:14:12 AM	Helium valve closed
8/24/2011	11:14:12 AM	BCl3 valve closed
8/24/2011	11:14:12 AM	PH3 valve closed
8/24/2011	11:14:12 AM	SiCl4 pre valve closed
8/24/2011	11:14:12 AM	SiCl4 post valve closed
8/24/2011	11:14:12 AM	Main Vac valve closed
8/24/2011	11:14:12 AM	Bypass valve closed
8/24/2011	11:14:12 AM	Bubbler valve closed
8/24/2011	11:14:12 AM	H2 valve opened
8/24/2011	11:14:12 AM	Helium MFC set to  0.000000
8/24/2011	11:14:12 AM	H2 MFC set to  500.000000
8/24/2011	11:14:12 AM	BCl3 MFC set to  0.000000
8/24/2011	11:14:12 AM	PHl3 MFC set to  0.000000
8/24/2011	11:14:12 AM	SiCl4 MFC set to  0.000000
8/24/2011	11:14:12 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:14:12 AM	Tube furnace set to 0
8/24/2011	11:15:15 AM	Helium valve closed
8/24/2011	11:15:15 AM	BCl3 valve closed
8/24/2011	11:15:15 AM	PH3 valve closed
8/24/2011	11:15:15 AM	SiCl4 pre valve closed
8/24/2011	11:15:15 AM	SiCl4 post valve closed
8/24/2011	11:15:15 AM	Main Vac valve closed
8/24/2011	11:15:15 AM	Bypass valve closed
8/24/2011	11:15:15 AM	H2 valve opened
8/24/2011	11:15:15 AM	Bubbler valve opened
8/24/2011	11:15:15 AM	Helium MFC set to  0.000000
8/24/2011	11:15:15 AM	H2 MFC set to  500.000000
8/24/2011	11:15:15 AM	BCl3 MFC set to  0.000000
8/24/2011	11:15:15 AM	PHl3 MFC set to  0.000000
8/24/2011	11:15:15 AM	SiCl4 MFC set to  0.000000
8/24/2011	11:15:15 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:15:15 AM	Tube furnace set to 0
8/24/2011	11:15:16 AM	Helium valve closed
8/24/2011	11:15:16 AM	BCl3 valve closed
8/24/2011	11:15:16 AM	PH3 valve closed
8/24/2011	11:15:16 AM	SiCl4 pre valve closed
8/24/2011	11:15:16 AM	SiCl4 post valve closed
8/24/2011	11:15:16 AM	Main Vac valve closed
8/24/2011	11:15:16 AM	Bypass valve closed
8/24/2011	11:15:16 AM	H2 valve opened
8/24/2011	11:15:16 AM	Bubbler valve opened
8/24/2011	11:15:16 AM	Helium MFC set to  0.000000
8/24/2011	11:15:16 AM	H2 MFC set to  500.000000
8/24/2011	11:15:16 AM	BCl3 MFC set to  0.000000
8/24/2011	11:15:16 AM	PHl3 MFC set to  0.000000
8/24/2011	11:15:16 AM	SiCl4 MFC set to  0.000000
8/24/2011	11:15:16 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:15:16 AM	Tube furnace set to 1000
8/24/2011	11:35:16 AM	Helium valve closed
8/24/2011	11:35:16 AM	PH3 valve closed
8/24/2011	11:35:16 AM	Main Vac valve closed
8/24/2011	11:35:16 AM	Bypass valve closed
8/24/2011	11:35:16 AM	H2 valve opened
8/24/2011	11:35:16 AM	BCl3 valve opened
8/24/2011	11:35:16 AM	SiCl4 pre valve opened
8/24/2011	11:35:16 AM	SiCl4 post valve opened
8/24/2011	11:35:16 AM	Bubbler valve opened
8/24/2011	11:35:16 AM	Helium MFC set to  0.000000
8/24/2011	11:35:16 AM	H2 MFC set to  500.000000
8/24/2011	11:35:16 AM	BCl3 MFC set to  2.500000
8/24/2011	11:35:16 AM	PHl3 MFC set to  0.000000
8/24/2011	11:35:16 AM	SiCl4 MFC set to  50.000000
8/24/2011	11:35:16 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:35:16 AM	Tube furnace set to 1000
8/24/2011	11:55:16 AM	Helium valve closed
8/24/2011	11:55:16 AM	BCl3 valve closed
8/24/2011	11:55:16 AM	PH3 valve closed
8/24/2011	11:55:16 AM	SiCl4 pre valve closed
8/24/2011	11:55:16 AM	SiCl4 post valve closed
8/24/2011	11:55:16 AM	Main Vac valve closed
8/24/2011	11:55:16 AM	Bypass valve closed
8/24/2011	11:55:16 AM	H2 valve opened
8/24/2011	11:55:16 AM	Bubbler valve opened
8/24/2011	11:55:16 AM	Helium MFC set to  0.000000
8/24/2011	11:55:16 AM	H2 MFC set to  500.000000
8/24/2011	11:55:16 AM	BCl3 MFC set to  0.000000
8/24/2011	11:55:16 AM	PHl3 MFC set to  0.000000
8/24/2011	11:55:16 AM	SiCl4 MFC set to  0.000000
8/24/2011	11:55:16 AM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:55:16 AM	Tube furnace set to 750
8/24/2011	12:00:16 PM	H2 valve closed
8/24/2011	12:00:16 PM	BCl3 valve closed
8/24/2011	12:00:16 PM	PH3 valve closed
8/24/2011	12:00:16 PM	SiCl4 pre valve closed
8/24/2011	12:00:16 PM	SiCl4 post valve closed
8/24/2011	12:00:16 PM	Main Vac valve closed
8/24/2011	12:00:16 PM	Bypass valve closed
8/24/2011	12:00:16 PM	Helium valve opened
8/24/2011	12:00:16 PM	Bubbler valve opened
8/24/2011	12:00:16 PM	Helium MFC set to  500.000000
8/24/2011	12:00:16 PM	H2 MFC set to  0.000000
8/24/2011	12:00:16 PM	BCl3 MFC set to  0.000000
8/24/2011	12:00:16 PM	PHl3 MFC set to  0.000000
8/24/2011	12:00:16 PM	SiCl4 MFC set to  0.000000
8/24/2011	12:00:16 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	12:00:17 PM	Tube furnace set to 0
8/24/2011	12:20:17 PM	Helium valve closed
8/24/2011	12:20:17 PM	H2 valve closed
8/24/2011	12:20:17 PM	BCl3 valve closed
8/24/2011	12:20:17 PM	PH3 valve closed
8/24/2011	12:20:17 PM	SiCl4 pre valve closed
8/24/2011	12:20:17 PM	SiCl4 post valve closed
8/24/2011	12:20:17 PM	Main Vac valve closed
8/24/2011	12:20:17 PM	Bypass valve closed
8/24/2011	12:20:17 PM	Bubbler valve closed
8/24/2011	12:20:17 PM	Helium MFC set to  0.000000
8/24/2011	12:20:17 PM	H2 MFC set to  0.000000
8/24/2011	12:20:17 PM	BCl3 MFC set to  0.000000
8/24/2011	12:20:17 PM	PHl3 MFC set to  0.000000
8/24/2011	12:20:17 PM	SiCl4 MFC set to  0.000000
8/24/2011	12:20:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	12:20:17 PM	Tube furnace set to 0
8/24/2011	12:20:18 PM	Run finished at 12:20 PM
8/24/2011	1:04:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	1:04:12 PM	Recipe started at 1:04 PM
8/24/2011	1:04:12 PM	Helium valve closed
8/24/2011	1:04:12 PM	H2 valve closed
8/24/2011	1:04:12 PM	BCl3 valve closed
8/24/2011	1:04:12 PM	PH3 valve closed
8/24/2011	1:04:12 PM	SiCl4 pre valve closed
8/24/2011	1:04:12 PM	SiCl4 post valve closed
8/24/2011	1:04:12 PM	Main Vac valve closed
8/24/2011	1:04:12 PM	Bypass valve closed
8/24/2011	1:04:12 PM	Bubbler valve closed
8/24/2011	1:04:12 PM	Helium MFC set to  0.000000
8/24/2011	1:04:12 PM	H2 MFC set to  0.000000
8/24/2011	1:04:12 PM	BCl3 MFC set to  0.000000
8/24/2011	1:04:12 PM	PHl3 MFC set to  0.000000
8/24/2011	1:04:12 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:04:12 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:04:12 PM	Tube furnace set to 0
8/24/2011	1:04:15 PM	H2 valve closed
8/24/2011	1:04:15 PM	BCl3 valve closed
8/24/2011	1:04:15 PM	PH3 valve closed
8/24/2011	1:04:15 PM	SiCl4 pre valve closed
8/24/2011	1:04:15 PM	SiCl4 post valve closed
8/24/2011	1:04:15 PM	Main Vac valve closed
8/24/2011	1:04:15 PM	Bypass valve closed
8/24/2011	1:04:15 PM	Bubbler valve closed
8/24/2011	1:04:15 PM	Helium valve opened
8/24/2011	1:04:15 PM	Helium MFC set to  500.000000
8/24/2011	1:04:15 PM	H2 MFC set to  0.000000
8/24/2011	1:04:15 PM	BCl3 MFC set to  0.000000
8/24/2011	1:04:15 PM	PHl3 MFC set to  0.000000
8/24/2011	1:04:15 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:04:15 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:04:15 PM	Tube furnace set to 0
8/24/2011	1:04:23 PM	Helium valve closed
8/24/2011	1:04:23 PM	H2 valve closed
8/24/2011	1:04:23 PM	BCl3 valve closed
8/24/2011	1:04:23 PM	PH3 valve closed
8/24/2011	1:04:23 PM	SiCl4 pre valve closed
8/24/2011	1:04:23 PM	SiCl4 post valve closed
8/24/2011	1:04:23 PM	Main Vac valve closed
8/24/2011	1:04:23 PM	Bypass valve closed
8/24/2011	1:04:23 PM	Bubbler valve closed
8/24/2011	1:04:23 PM	Helium MFC set to  0.000000
8/24/2011	1:04:23 PM	H2 MFC set to  0.000000
8/24/2011	1:04:23 PM	BCl3 MFC set to  0.000000
8/24/2011	1:04:23 PM	PHl3 MFC set to  0.000000
8/24/2011	1:04:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:04:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:04:24 PM	Tube furnace set to 0
8/24/2011	1:04:25 PM	Run finished at 1:04 PM
8/24/2011	1:04:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	1:11:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	1:11:41 PM	Recipe started at 1:11 PM
8/24/2011	1:11:41 PM	Helium valve closed
8/24/2011	1:11:41 PM	H2 valve closed
8/24/2011	1:11:41 PM	BCl3 valve closed
8/24/2011	1:11:41 PM	PH3 valve closed
8/24/2011	1:11:41 PM	SiCl4 pre valve closed
8/24/2011	1:11:41 PM	SiCl4 post valve closed
8/24/2011	1:11:41 PM	Main Vac valve closed
8/24/2011	1:11:41 PM	Bubbler valve closed
8/24/2011	1:11:41 PM	Bypass valve opened
8/24/2011	1:11:41 PM	Helium MFC set to  0.000000
8/24/2011	1:11:41 PM	H2 MFC set to  0.000000
8/24/2011	1:11:41 PM	BCl3 MFC set to  0.000000
8/24/2011	1:11:41 PM	PHl3 MFC set to  0.000000
8/24/2011	1:11:41 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:11:41 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:11:41 PM	Tube furnace set to 0
8/24/2011	1:12:50 PM	Helium valve closed
8/24/2011	1:12:50 PM	H2 valve closed
8/24/2011	1:12:50 PM	BCl3 valve closed
8/24/2011	1:12:50 PM	PH3 valve closed
8/24/2011	1:12:50 PM	SiCl4 pre valve closed
8/24/2011	1:12:50 PM	SiCl4 post valve closed
8/24/2011	1:12:50 PM	Main Vac valve closed
8/24/2011	1:12:50 PM	Bubbler valve closed
8/24/2011	1:12:50 PM	Bypass valve opened
8/24/2011	1:12:50 PM	Helium MFC set to  0.000000
8/24/2011	1:12:50 PM	H2 MFC set to  0.000000
8/24/2011	1:12:50 PM	BCl3 MFC set to  0.000000
8/24/2011	1:12:50 PM	PHl3 MFC set to  0.000000
8/24/2011	1:12:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:12:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:12:50 PM	Tube furnace set to 0
8/24/2011	1:13:50 PM	Helium valve closed
8/24/2011	1:13:50 PM	H2 valve closed
8/24/2011	1:13:50 PM	BCl3 valve closed
8/24/2011	1:13:50 PM	PH3 valve closed
8/24/2011	1:13:50 PM	SiCl4 pre valve closed
8/24/2011	1:13:50 PM	SiCl4 post valve closed
8/24/2011	1:13:50 PM	Bypass valve closed
8/24/2011	1:13:50 PM	Bubbler valve closed
8/24/2011	1:13:50 PM	Main Vac valve opened
8/24/2011	1:13:50 PM	Helium MFC set to  0.000000
8/24/2011	1:13:50 PM	H2 MFC set to  0.000000
8/24/2011	1:13:50 PM	BCl3 MFC set to  0.000000
8/24/2011	1:13:50 PM	PHl3 MFC set to  0.000000
8/24/2011	1:13:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:13:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:13:50 PM	Tube furnace set to 0
8/24/2011	1:13:51 PM	Run finished at 1:13 PM
8/24/2011	1:13:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	1:21:03 PM	Recipe started at 1:20 PM
8/24/2011	1:21:03 PM	Helium valve closed
8/24/2011	1:21:03 PM	H2 valve closed
8/24/2011	1:21:03 PM	BCl3 valve closed
8/24/2011	1:21:03 PM	PH3 valve closed
8/24/2011	1:21:03 PM	SiCl4 pre valve closed
8/24/2011	1:21:03 PM	SiCl4 post valve closed
8/24/2011	1:21:03 PM	Bypass valve closed
8/24/2011	1:21:03 PM	Bubbler valve closed
8/24/2011	1:21:03 PM	Main Vac valve opened
8/24/2011	1:21:03 PM	Helium MFC set to  0.000000
8/24/2011	1:21:03 PM	H2 MFC set to  0.000000
8/24/2011	1:21:03 PM	BCl3 MFC set to  0.000000
8/24/2011	1:21:03 PM	PHl3 MFC set to  0.000000
8/24/2011	1:21:03 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:21:03 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:21:03 PM	Tube furnace set to 150
8/24/2011	1:21:33 PM	H2 valve closed
8/24/2011	1:21:33 PM	BCl3 valve closed
8/24/2011	1:21:33 PM	PH3 valve closed
8/24/2011	1:21:33 PM	SiCl4 pre valve closed
8/24/2011	1:21:33 PM	SiCl4 post valve closed
8/24/2011	1:21:33 PM	Bypass valve closed
8/24/2011	1:21:33 PM	Bubbler valve closed
8/24/2011	1:21:33 PM	Helium valve opened
8/24/2011	1:21:33 PM	Main Vac valve opened
8/24/2011	1:21:33 PM	Helium MFC set to  20.000000
8/24/2011	1:21:33 PM	H2 MFC set to  0.000000
8/24/2011	1:21:33 PM	BCl3 MFC set to  0.000000
8/24/2011	1:21:33 PM	PHl3 MFC set to  0.000000
8/24/2011	1:21:33 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:21:33 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:21:33 PM	Tube furnace set to 150
8/24/2011	1:22:04 PM	Helium valve closed
8/24/2011	1:22:04 PM	H2 valve closed
8/24/2011	1:22:04 PM	BCl3 valve closed
8/24/2011	1:22:04 PM	PH3 valve closed
8/24/2011	1:22:04 PM	SiCl4 pre valve closed
8/24/2011	1:22:04 PM	SiCl4 post valve closed
8/24/2011	1:22:04 PM	Bypass valve closed
8/24/2011	1:22:04 PM	Bubbler valve closed
8/24/2011	1:22:04 PM	Main Vac valve opened
8/24/2011	1:22:04 PM	Helium MFC set to  0.000000
8/24/2011	1:22:04 PM	H2 MFC set to  0.000000
8/24/2011	1:22:04 PM	BCl3 MFC set to  0.000000
8/24/2011	1:22:04 PM	PHl3 MFC set to  0.000000
8/24/2011	1:22:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:22:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:22:04 PM	Tube furnace set to 150
8/24/2011	1:22:34 PM	H2 valve closed
8/24/2011	1:22:34 PM	BCl3 valve closed
8/24/2011	1:22:34 PM	PH3 valve closed
8/24/2011	1:22:34 PM	SiCl4 pre valve closed
8/24/2011	1:22:34 PM	SiCl4 post valve closed
8/24/2011	1:22:34 PM	Bypass valve closed
8/24/2011	1:22:34 PM	Bubbler valve closed
8/24/2011	1:22:34 PM	Helium valve opened
8/24/2011	1:22:34 PM	Main Vac valve opened
8/24/2011	1:22:34 PM	Helium MFC set to  20.000000
8/24/2011	1:22:34 PM	H2 MFC set to  0.000000
8/24/2011	1:22:34 PM	BCl3 MFC set to  0.000000
8/24/2011	1:22:34 PM	PHl3 MFC set to  0.000000
8/24/2011	1:22:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:22:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:22:34 PM	Tube furnace set to 150
8/24/2011	1:23:04 PM	Helium valve closed
8/24/2011	1:23:04 PM	H2 valve closed
8/24/2011	1:23:04 PM	BCl3 valve closed
8/24/2011	1:23:04 PM	PH3 valve closed
8/24/2011	1:23:04 PM	SiCl4 pre valve closed
8/24/2011	1:23:04 PM	SiCl4 post valve closed
8/24/2011	1:23:04 PM	Bypass valve closed
8/24/2011	1:23:04 PM	Bubbler valve closed
8/24/2011	1:23:04 PM	Main Vac valve opened
8/24/2011	1:23:04 PM	Helium MFC set to  0.000000
8/24/2011	1:23:04 PM	H2 MFC set to  0.000000
8/24/2011	1:23:04 PM	BCl3 MFC set to  0.000000
8/24/2011	1:23:04 PM	PHl3 MFC set to  0.000000
8/24/2011	1:23:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:23:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:23:04 PM	Tube furnace set to 150
8/24/2011	1:23:34 PM	H2 valve closed
8/24/2011	1:23:34 PM	BCl3 valve closed
8/24/2011	1:23:34 PM	PH3 valve closed
8/24/2011	1:23:34 PM	SiCl4 pre valve closed
8/24/2011	1:23:34 PM	SiCl4 post valve closed
8/24/2011	1:23:34 PM	Bypass valve closed
8/24/2011	1:23:34 PM	Bubbler valve closed
8/24/2011	1:23:34 PM	Helium valve opened
8/24/2011	1:23:34 PM	Main Vac valve opened
8/24/2011	1:23:34 PM	Helium MFC set to  20.000000
8/24/2011	1:23:34 PM	H2 MFC set to  0.000000
8/24/2011	1:23:34 PM	BCl3 MFC set to  0.000000
8/24/2011	1:23:34 PM	PHl3 MFC set to  0.000000
8/24/2011	1:23:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:23:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:23:34 PM	Tube furnace set to 150
8/24/2011	1:24:04 PM	Helium valve closed
8/24/2011	1:24:04 PM	H2 valve closed
8/24/2011	1:24:04 PM	BCl3 valve closed
8/24/2011	1:24:04 PM	PH3 valve closed
8/24/2011	1:24:04 PM	SiCl4 pre valve closed
8/24/2011	1:24:04 PM	SiCl4 post valve closed
8/24/2011	1:24:04 PM	Bypass valve closed
8/24/2011	1:24:04 PM	Bubbler valve closed
8/24/2011	1:24:04 PM	Main Vac valve opened
8/24/2011	1:24:04 PM	Helium MFC set to  0.000000
8/24/2011	1:24:04 PM	H2 MFC set to  0.000000
8/24/2011	1:24:04 PM	BCl3 MFC set to  0.000000
8/24/2011	1:24:04 PM	PHl3 MFC set to  0.000000
8/24/2011	1:24:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:24:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:24:05 PM	Tube furnace set to 150
8/24/2011	1:24:35 PM	H2 valve closed
8/24/2011	1:24:35 PM	BCl3 valve closed
8/24/2011	1:24:35 PM	PH3 valve closed
8/24/2011	1:24:35 PM	SiCl4 pre valve closed
8/24/2011	1:24:35 PM	SiCl4 post valve closed
8/24/2011	1:24:35 PM	Bypass valve closed
8/24/2011	1:24:35 PM	Bubbler valve closed
8/24/2011	1:24:35 PM	Helium valve opened
8/24/2011	1:24:35 PM	Main Vac valve opened
8/24/2011	1:24:35 PM	Helium MFC set to  20.000000
8/24/2011	1:24:35 PM	H2 MFC set to  0.000000
8/24/2011	1:24:35 PM	BCl3 MFC set to  0.000000
8/24/2011	1:24:35 PM	PHl3 MFC set to  0.000000
8/24/2011	1:24:35 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:24:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:24:35 PM	Tube furnace set to 150
8/24/2011	1:25:05 PM	Helium valve closed
8/24/2011	1:25:05 PM	H2 valve closed
8/24/2011	1:25:05 PM	BCl3 valve closed
8/24/2011	1:25:05 PM	PH3 valve closed
8/24/2011	1:25:05 PM	SiCl4 pre valve closed
8/24/2011	1:25:05 PM	SiCl4 post valve closed
8/24/2011	1:25:05 PM	Bypass valve closed
8/24/2011	1:25:05 PM	Bubbler valve closed
8/24/2011	1:25:05 PM	Main Vac valve opened
8/24/2011	1:25:05 PM	Helium MFC set to  0.000000
8/24/2011	1:25:05 PM	H2 MFC set to  0.000000
8/24/2011	1:25:05 PM	BCl3 MFC set to  0.000000
8/24/2011	1:25:05 PM	PHl3 MFC set to  0.000000
8/24/2011	1:25:05 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:25:05 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:25:05 PM	Tube furnace set to 150
8/24/2011	1:25:35 PM	H2 valve closed
8/24/2011	1:25:35 PM	BCl3 valve closed
8/24/2011	1:25:35 PM	PH3 valve closed
8/24/2011	1:25:35 PM	SiCl4 pre valve closed
8/24/2011	1:25:35 PM	SiCl4 post valve closed
8/24/2011	1:25:35 PM	Bypass valve closed
8/24/2011	1:25:35 PM	Bubbler valve closed
8/24/2011	1:25:35 PM	Helium valve opened
8/24/2011	1:25:35 PM	Main Vac valve opened
8/24/2011	1:25:35 PM	Helium MFC set to  20.000000
8/24/2011	1:25:35 PM	H2 MFC set to  0.000000
8/24/2011	1:25:35 PM	BCl3 MFC set to  0.000000
8/24/2011	1:25:35 PM	PHl3 MFC set to  0.000000
8/24/2011	1:25:35 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:25:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:25:35 PM	Tube furnace set to 150
8/24/2011	1:26:05 PM	Helium valve closed
8/24/2011	1:26:05 PM	H2 valve closed
8/24/2011	1:26:05 PM	BCl3 valve closed
8/24/2011	1:26:05 PM	PH3 valve closed
8/24/2011	1:26:05 PM	SiCl4 pre valve closed
8/24/2011	1:26:05 PM	SiCl4 post valve closed
8/24/2011	1:26:05 PM	Bypass valve closed
8/24/2011	1:26:05 PM	Bubbler valve closed
8/24/2011	1:26:05 PM	Main Vac valve opened
8/24/2011	1:26:05 PM	Helium MFC set to  0.000000
8/24/2011	1:26:05 PM	H2 MFC set to  0.000000
8/24/2011	1:26:05 PM	BCl3 MFC set to  0.000000
8/24/2011	1:26:05 PM	PHl3 MFC set to  0.000000
8/24/2011	1:26:05 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:26:05 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:26:05 PM	Tube furnace set to 150
8/24/2011	1:26:35 PM	H2 valve closed
8/24/2011	1:26:35 PM	BCl3 valve closed
8/24/2011	1:26:35 PM	PH3 valve closed
8/24/2011	1:26:35 PM	SiCl4 pre valve closed
8/24/2011	1:26:35 PM	SiCl4 post valve closed
8/24/2011	1:26:35 PM	Bypass valve closed
8/24/2011	1:26:35 PM	Bubbler valve closed
8/24/2011	1:26:35 PM	Helium valve opened
8/24/2011	1:26:35 PM	Main Vac valve opened
8/24/2011	1:26:35 PM	Helium MFC set to  20.000000
8/24/2011	1:26:35 PM	H2 MFC set to  0.000000
8/24/2011	1:26:35 PM	BCl3 MFC set to  0.000000
8/24/2011	1:26:35 PM	PHl3 MFC set to  0.000000
8/24/2011	1:26:35 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:26:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:26:36 PM	Tube furnace set to 150
8/24/2011	1:27:06 PM	Helium valve closed
8/24/2011	1:27:06 PM	H2 valve closed
8/24/2011	1:27:06 PM	BCl3 valve closed
8/24/2011	1:27:06 PM	PH3 valve closed
8/24/2011	1:27:06 PM	SiCl4 pre valve closed
8/24/2011	1:27:06 PM	SiCl4 post valve closed
8/24/2011	1:27:06 PM	Bypass valve closed
8/24/2011	1:27:06 PM	Bubbler valve closed
8/24/2011	1:27:06 PM	Main Vac valve opened
8/24/2011	1:27:06 PM	Helium MFC set to  0.000000
8/24/2011	1:27:06 PM	H2 MFC set to  0.000000
8/24/2011	1:27:06 PM	BCl3 MFC set to  0.000000
8/24/2011	1:27:06 PM	PHl3 MFC set to  0.000000
8/24/2011	1:27:06 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:27:06 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:27:06 PM	Tube furnace set to 150
8/24/2011	1:27:36 PM	H2 valve closed
8/24/2011	1:27:36 PM	BCl3 valve closed
8/24/2011	1:27:36 PM	PH3 valve closed
8/24/2011	1:27:36 PM	SiCl4 pre valve closed
8/24/2011	1:27:36 PM	SiCl4 post valve closed
8/24/2011	1:27:36 PM	Bypass valve closed
8/24/2011	1:27:36 PM	Bubbler valve closed
8/24/2011	1:27:36 PM	Helium valve opened
8/24/2011	1:27:36 PM	Main Vac valve opened
8/24/2011	1:27:36 PM	Helium MFC set to  20.000000
8/24/2011	1:27:36 PM	H2 MFC set to  0.000000
8/24/2011	1:27:36 PM	BCl3 MFC set to  0.000000
8/24/2011	1:27:36 PM	PHl3 MFC set to  0.000000
8/24/2011	1:27:36 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:27:36 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:27:36 PM	Tube furnace set to 150
8/24/2011	1:28:06 PM	Helium valve closed
8/24/2011	1:28:06 PM	H2 valve closed
8/24/2011	1:28:06 PM	BCl3 valve closed
8/24/2011	1:28:06 PM	PH3 valve closed
8/24/2011	1:28:06 PM	SiCl4 pre valve closed
8/24/2011	1:28:06 PM	SiCl4 post valve closed
8/24/2011	1:28:06 PM	Bypass valve closed
8/24/2011	1:28:06 PM	Bubbler valve closed
8/24/2011	1:28:06 PM	Main Vac valve opened
8/24/2011	1:28:06 PM	Helium MFC set to  0.000000
8/24/2011	1:28:06 PM	H2 MFC set to  0.000000
8/24/2011	1:28:06 PM	BCl3 MFC set to  0.000000
8/24/2011	1:28:06 PM	PHl3 MFC set to  0.000000
8/24/2011	1:28:06 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:28:06 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:28:06 PM	Tube furnace set to 150
8/24/2011	1:28:36 PM	H2 valve closed
8/24/2011	1:28:36 PM	BCl3 valve closed
8/24/2011	1:28:36 PM	PH3 valve closed
8/24/2011	1:28:36 PM	SiCl4 pre valve closed
8/24/2011	1:28:36 PM	SiCl4 post valve closed
8/24/2011	1:28:36 PM	Bypass valve closed
8/24/2011	1:28:36 PM	Bubbler valve closed
8/24/2011	1:28:36 PM	Helium valve opened
8/24/2011	1:28:36 PM	Main Vac valve opened
8/24/2011	1:28:36 PM	Helium MFC set to  20.000000
8/24/2011	1:28:36 PM	H2 MFC set to  0.000000
8/24/2011	1:28:36 PM	BCl3 MFC set to  0.000000
8/24/2011	1:28:36 PM	PHl3 MFC set to  0.000000
8/24/2011	1:28:36 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:28:36 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:28:37 PM	Tube furnace set to 150
8/24/2011	1:29:07 PM	Helium valve closed
8/24/2011	1:29:07 PM	H2 valve closed
8/24/2011	1:29:07 PM	BCl3 valve closed
8/24/2011	1:29:07 PM	PH3 valve closed
8/24/2011	1:29:07 PM	SiCl4 pre valve closed
8/24/2011	1:29:07 PM	SiCl4 post valve closed
8/24/2011	1:29:07 PM	Bypass valve closed
8/24/2011	1:29:07 PM	Bubbler valve closed
8/24/2011	1:29:07 PM	Main Vac valve opened
8/24/2011	1:29:07 PM	Helium MFC set to  0.000000
8/24/2011	1:29:07 PM	H2 MFC set to  0.000000
8/24/2011	1:29:07 PM	BCl3 MFC set to  0.000000
8/24/2011	1:29:07 PM	PHl3 MFC set to  0.000000
8/24/2011	1:29:07 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:29:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:29:07 PM	Tube furnace set to 150
8/24/2011	1:29:37 PM	H2 valve closed
8/24/2011	1:29:37 PM	BCl3 valve closed
8/24/2011	1:29:37 PM	PH3 valve closed
8/24/2011	1:29:37 PM	SiCl4 pre valve closed
8/24/2011	1:29:37 PM	SiCl4 post valve closed
8/24/2011	1:29:37 PM	Bypass valve closed
8/24/2011	1:29:37 PM	Bubbler valve closed
8/24/2011	1:29:37 PM	Helium valve opened
8/24/2011	1:29:37 PM	Main Vac valve opened
8/24/2011	1:29:37 PM	Helium MFC set to  20.000000
8/24/2011	1:29:37 PM	H2 MFC set to  0.000000
8/24/2011	1:29:37 PM	BCl3 MFC set to  0.000000
8/24/2011	1:29:37 PM	PHl3 MFC set to  0.000000
8/24/2011	1:29:37 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:29:37 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:29:37 PM	Tube furnace set to 150
8/24/2011	1:30:07 PM	Helium valve closed
8/24/2011	1:30:07 PM	H2 valve closed
8/24/2011	1:30:07 PM	BCl3 valve closed
8/24/2011	1:30:07 PM	PH3 valve closed
8/24/2011	1:30:07 PM	SiCl4 pre valve closed
8/24/2011	1:30:07 PM	SiCl4 post valve closed
8/24/2011	1:30:07 PM	Bypass valve closed
8/24/2011	1:30:07 PM	Bubbler valve closed
8/24/2011	1:30:07 PM	Main Vac valve opened
8/24/2011	1:30:07 PM	Helium MFC set to  0.000000
8/24/2011	1:30:07 PM	H2 MFC set to  0.000000
8/24/2011	1:30:07 PM	BCl3 MFC set to  0.000000
8/24/2011	1:30:07 PM	PHl3 MFC set to  0.000000
8/24/2011	1:30:07 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:30:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:30:07 PM	Tube furnace set to 150
8/24/2011	1:30:37 PM	H2 valve closed
8/24/2011	1:30:37 PM	BCl3 valve closed
8/24/2011	1:30:37 PM	PH3 valve closed
8/24/2011	1:30:37 PM	SiCl4 pre valve closed
8/24/2011	1:30:37 PM	SiCl4 post valve closed
8/24/2011	1:30:37 PM	Bypass valve closed
8/24/2011	1:30:37 PM	Bubbler valve closed
8/24/2011	1:30:37 PM	Helium valve opened
8/24/2011	1:30:37 PM	Main Vac valve opened
8/24/2011	1:30:37 PM	Helium MFC set to  20.000000
8/24/2011	1:30:37 PM	H2 MFC set to  0.000000
8/24/2011	1:30:37 PM	BCl3 MFC set to  0.000000
8/24/2011	1:30:37 PM	PHl3 MFC set to  0.000000
8/24/2011	1:30:37 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:30:37 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:30:37 PM	Tube furnace set to 150
8/24/2011	1:31:07 PM	Helium valve closed
8/24/2011	1:31:07 PM	H2 valve closed
8/24/2011	1:31:07 PM	BCl3 valve closed
8/24/2011	1:31:07 PM	PH3 valve closed
8/24/2011	1:31:07 PM	SiCl4 pre valve closed
8/24/2011	1:31:07 PM	SiCl4 post valve closed
8/24/2011	1:31:07 PM	Bypass valve closed
8/24/2011	1:31:07 PM	Bubbler valve closed
8/24/2011	1:31:07 PM	Main Vac valve opened
8/24/2011	1:31:07 PM	Helium MFC set to  0.000000
8/24/2011	1:31:07 PM	H2 MFC set to  0.000000
8/24/2011	1:31:07 PM	BCl3 MFC set to  0.000000
8/24/2011	1:31:07 PM	PHl3 MFC set to  0.000000
8/24/2011	1:31:07 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:31:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:31:08 PM	Tube furnace set to 150
8/24/2011	1:31:09 PM	Run finished at 1:31 PM
8/24/2011	1:32:27 PM	Tube furnace set to 0
8/24/2011	1:34:00 PM	Recipe started at 1:33 PM
8/24/2011	1:34:00 PM	Helium valve closed
8/24/2011	1:34:00 PM	H2 valve closed
8/24/2011	1:34:00 PM	BCl3 valve closed
8/24/2011	1:34:00 PM	PH3 valve closed
8/24/2011	1:34:00 PM	SiCl4 pre valve closed
8/24/2011	1:34:00 PM	SiCl4 post valve closed
8/24/2011	1:34:00 PM	Bypass valve closed
8/24/2011	1:34:00 PM	Bubbler valve closed
8/24/2011	1:34:00 PM	Main Vac valve opened
8/24/2011	1:34:00 PM	Helium MFC set to  0.000000
8/24/2011	1:34:00 PM	H2 MFC set to  0.000000
8/24/2011	1:34:00 PM	BCl3 MFC set to  0.000000
8/24/2011	1:34:00 PM	PHl3 MFC set to  0.000000
8/24/2011	1:34:00 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:34:00 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:34:00 PM	Tube furnace set to 150
8/24/2011	1:34:03 PM	H2 valve closed
8/24/2011	1:34:03 PM	BCl3 valve closed
8/24/2011	1:34:03 PM	PH3 valve closed
8/24/2011	1:34:03 PM	SiCl4 pre valve closed
8/24/2011	1:34:03 PM	SiCl4 post valve closed
8/24/2011	1:34:03 PM	Bypass valve closed
8/24/2011	1:34:03 PM	Bubbler valve closed
8/24/2011	1:34:03 PM	Helium valve opened
8/24/2011	1:34:03 PM	Main Vac valve opened
8/24/2011	1:34:03 PM	Helium MFC set to  20.000000
8/24/2011	1:34:03 PM	H2 MFC set to  0.000000
8/24/2011	1:34:03 PM	BCl3 MFC set to  0.000000
8/24/2011	1:34:03 PM	PHl3 MFC set to  0.000000
8/24/2011	1:34:03 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:34:03 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:34:03 PM	Tube furnace set to 150
8/24/2011	1:34:33 PM	Helium valve closed
8/24/2011	1:34:33 PM	H2 valve closed
8/24/2011	1:34:33 PM	BCl3 valve closed
8/24/2011	1:34:33 PM	PH3 valve closed
8/24/2011	1:34:33 PM	SiCl4 pre valve closed
8/24/2011	1:34:33 PM	SiCl4 post valve closed
8/24/2011	1:34:33 PM	Bypass valve closed
8/24/2011	1:34:33 PM	Bubbler valve closed
8/24/2011	1:34:33 PM	Main Vac valve opened
8/24/2011	1:34:33 PM	Helium MFC set to  0.000000
8/24/2011	1:34:33 PM	H2 MFC set to  0.000000
8/24/2011	1:34:33 PM	BCl3 MFC set to  0.000000
8/24/2011	1:34:33 PM	PHl3 MFC set to  0.000000
8/24/2011	1:34:33 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:34:33 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:34:33 PM	Tube furnace set to 150
8/24/2011	1:35:03 PM	H2 valve closed
8/24/2011	1:35:03 PM	BCl3 valve closed
8/24/2011	1:35:03 PM	PH3 valve closed
8/24/2011	1:35:03 PM	SiCl4 pre valve closed
8/24/2011	1:35:03 PM	SiCl4 post valve closed
8/24/2011	1:35:03 PM	Bypass valve closed
8/24/2011	1:35:03 PM	Bubbler valve closed
8/24/2011	1:35:03 PM	Helium valve opened
8/24/2011	1:35:03 PM	Main Vac valve opened
8/24/2011	1:35:03 PM	Helium MFC set to  20.000000
8/24/2011	1:35:03 PM	H2 MFC set to  0.000000
8/24/2011	1:35:03 PM	BCl3 MFC set to  0.000000
8/24/2011	1:35:03 PM	PHl3 MFC set to  0.000000
8/24/2011	1:35:03 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:35:03 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:35:04 PM	Tube furnace set to 150
8/24/2011	1:35:34 PM	Helium valve closed
8/24/2011	1:35:34 PM	H2 valve closed
8/24/2011	1:35:34 PM	BCl3 valve closed
8/24/2011	1:35:34 PM	PH3 valve closed
8/24/2011	1:35:34 PM	SiCl4 pre valve closed
8/24/2011	1:35:34 PM	SiCl4 post valve closed
8/24/2011	1:35:34 PM	Bypass valve closed
8/24/2011	1:35:34 PM	Bubbler valve closed
8/24/2011	1:35:34 PM	Main Vac valve opened
8/24/2011	1:35:34 PM	Helium MFC set to  0.000000
8/24/2011	1:35:34 PM	H2 MFC set to  0.000000
8/24/2011	1:35:34 PM	BCl3 MFC set to  0.000000
8/24/2011	1:35:34 PM	PHl3 MFC set to  0.000000
8/24/2011	1:35:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:35:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:35:34 PM	Tube furnace set to 150
8/24/2011	1:36:04 PM	H2 valve closed
8/24/2011	1:36:04 PM	BCl3 valve closed
8/24/2011	1:36:04 PM	PH3 valve closed
8/24/2011	1:36:04 PM	SiCl4 pre valve closed
8/24/2011	1:36:04 PM	SiCl4 post valve closed
8/24/2011	1:36:04 PM	Bypass valve closed
8/24/2011	1:36:04 PM	Bubbler valve closed
8/24/2011	1:36:04 PM	Helium valve opened
8/24/2011	1:36:04 PM	Main Vac valve opened
8/24/2011	1:36:04 PM	Helium MFC set to  20.000000
8/24/2011	1:36:04 PM	H2 MFC set to  0.000000
8/24/2011	1:36:04 PM	BCl3 MFC set to  0.000000
8/24/2011	1:36:04 PM	PHl3 MFC set to  0.000000
8/24/2011	1:36:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:36:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:36:04 PM	Tube furnace set to 150
8/24/2011	1:36:34 PM	Helium valve closed
8/24/2011	1:36:34 PM	H2 valve closed
8/24/2011	1:36:34 PM	BCl3 valve closed
8/24/2011	1:36:34 PM	PH3 valve closed
8/24/2011	1:36:34 PM	SiCl4 pre valve closed
8/24/2011	1:36:34 PM	SiCl4 post valve closed
8/24/2011	1:36:34 PM	Bypass valve closed
8/24/2011	1:36:34 PM	Bubbler valve closed
8/24/2011	1:36:34 PM	Main Vac valve opened
8/24/2011	1:36:34 PM	Helium MFC set to  0.000000
8/24/2011	1:36:34 PM	H2 MFC set to  0.000000
8/24/2011	1:36:34 PM	BCl3 MFC set to  0.000000
8/24/2011	1:36:34 PM	PHl3 MFC set to  0.000000
8/24/2011	1:36:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:36:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:36:34 PM	Tube furnace set to 150
8/24/2011	1:37:04 PM	H2 valve closed
8/24/2011	1:37:04 PM	BCl3 valve closed
8/24/2011	1:37:04 PM	PH3 valve closed
8/24/2011	1:37:04 PM	SiCl4 pre valve closed
8/24/2011	1:37:04 PM	SiCl4 post valve closed
8/24/2011	1:37:04 PM	Bypass valve closed
8/24/2011	1:37:04 PM	Bubbler valve closed
8/24/2011	1:37:04 PM	Helium valve opened
8/24/2011	1:37:04 PM	Main Vac valve opened
8/24/2011	1:37:04 PM	Helium MFC set to  20.000000
8/24/2011	1:37:04 PM	H2 MFC set to  0.000000
8/24/2011	1:37:04 PM	BCl3 MFC set to  0.000000
8/24/2011	1:37:04 PM	PHl3 MFC set to  0.000000
8/24/2011	1:37:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:37:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:37:04 PM	Tube furnace set to 150
8/24/2011	1:37:34 PM	Helium valve closed
8/24/2011	1:37:34 PM	H2 valve closed
8/24/2011	1:37:34 PM	BCl3 valve closed
8/24/2011	1:37:34 PM	PH3 valve closed
8/24/2011	1:37:34 PM	SiCl4 pre valve closed
8/24/2011	1:37:34 PM	SiCl4 post valve closed
8/24/2011	1:37:34 PM	Bypass valve closed
8/24/2011	1:37:34 PM	Bubbler valve closed
8/24/2011	1:37:34 PM	Main Vac valve opened
8/24/2011	1:37:34 PM	Helium MFC set to  0.000000
8/24/2011	1:37:34 PM	H2 MFC set to  0.000000
8/24/2011	1:37:34 PM	BCl3 MFC set to  0.000000
8/24/2011	1:37:34 PM	PHl3 MFC set to  0.000000
8/24/2011	1:37:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:37:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:37:35 PM	Tube furnace set to 150
8/24/2011	1:38:05 PM	H2 valve closed
8/24/2011	1:38:05 PM	BCl3 valve closed
8/24/2011	1:38:05 PM	PH3 valve closed
8/24/2011	1:38:05 PM	SiCl4 pre valve closed
8/24/2011	1:38:05 PM	SiCl4 post valve closed
8/24/2011	1:38:05 PM	Bypass valve closed
8/24/2011	1:38:05 PM	Bubbler valve closed
8/24/2011	1:38:05 PM	Helium valve opened
8/24/2011	1:38:05 PM	Main Vac valve opened
8/24/2011	1:38:05 PM	Helium MFC set to  20.000000
8/24/2011	1:38:05 PM	H2 MFC set to  0.000000
8/24/2011	1:38:05 PM	BCl3 MFC set to  0.000000
8/24/2011	1:38:05 PM	PHl3 MFC set to  0.000000
8/24/2011	1:38:05 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:38:05 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:38:05 PM	Tube furnace set to 150
8/24/2011	1:38:35 PM	Helium valve closed
8/24/2011	1:38:35 PM	H2 valve closed
8/24/2011	1:38:35 PM	BCl3 valve closed
8/24/2011	1:38:35 PM	PH3 valve closed
8/24/2011	1:38:35 PM	SiCl4 pre valve closed
8/24/2011	1:38:35 PM	SiCl4 post valve closed
8/24/2011	1:38:35 PM	Bypass valve closed
8/24/2011	1:38:35 PM	Bubbler valve closed
8/24/2011	1:38:35 PM	Main Vac valve opened
8/24/2011	1:38:35 PM	Helium MFC set to  0.000000
8/24/2011	1:38:35 PM	H2 MFC set to  0.000000
8/24/2011	1:38:35 PM	BCl3 MFC set to  0.000000
8/24/2011	1:38:35 PM	PHl3 MFC set to  0.000000
8/24/2011	1:38:35 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:38:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:38:35 PM	Tube furnace set to 150
8/24/2011	1:39:05 PM	H2 valve closed
8/24/2011	1:39:05 PM	BCl3 valve closed
8/24/2011	1:39:05 PM	PH3 valve closed
8/24/2011	1:39:05 PM	SiCl4 pre valve closed
8/24/2011	1:39:05 PM	SiCl4 post valve closed
8/24/2011	1:39:05 PM	Bypass valve closed
8/24/2011	1:39:05 PM	Bubbler valve closed
8/24/2011	1:39:05 PM	Helium valve opened
8/24/2011	1:39:05 PM	Main Vac valve opened
8/24/2011	1:39:05 PM	Helium MFC set to  20.000000
8/24/2011	1:39:05 PM	H2 MFC set to  0.000000
8/24/2011	1:39:05 PM	BCl3 MFC set to  0.000000
8/24/2011	1:39:05 PM	PHl3 MFC set to  0.000000
8/24/2011	1:39:05 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:39:05 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:39:05 PM	Tube furnace set to 150
8/24/2011	1:39:35 PM	Helium valve closed
8/24/2011	1:39:35 PM	H2 valve closed
8/24/2011	1:39:35 PM	BCl3 valve closed
8/24/2011	1:39:35 PM	PH3 valve closed
8/24/2011	1:39:35 PM	SiCl4 pre valve closed
8/24/2011	1:39:35 PM	SiCl4 post valve closed
8/24/2011	1:39:35 PM	Bypass valve closed
8/24/2011	1:39:35 PM	Bubbler valve closed
8/24/2011	1:39:35 PM	Main Vac valve opened
8/24/2011	1:39:35 PM	Helium MFC set to  0.000000
8/24/2011	1:39:35 PM	H2 MFC set to  0.000000
8/24/2011	1:39:35 PM	BCl3 MFC set to  0.000000
8/24/2011	1:39:35 PM	PHl3 MFC set to  0.000000
8/24/2011	1:39:35 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:39:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:39:35 PM	Tube furnace set to 150
8/24/2011	1:40:05 PM	H2 valve closed
8/24/2011	1:40:05 PM	BCl3 valve closed
8/24/2011	1:40:05 PM	PH3 valve closed
8/24/2011	1:40:05 PM	SiCl4 pre valve closed
8/24/2011	1:40:05 PM	SiCl4 post valve closed
8/24/2011	1:40:05 PM	Bypass valve closed
8/24/2011	1:40:05 PM	Bubbler valve closed
8/24/2011	1:40:05 PM	Helium valve opened
8/24/2011	1:40:05 PM	Main Vac valve opened
8/24/2011	1:40:05 PM	Helium MFC set to  20.000000
8/24/2011	1:40:05 PM	H2 MFC set to  0.000000
8/24/2011	1:40:05 PM	BCl3 MFC set to  0.000000
8/24/2011	1:40:05 PM	PHl3 MFC set to  0.000000
8/24/2011	1:40:05 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:40:05 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:40:06 PM	Tube furnace set to 150
8/24/2011	1:40:36 PM	Helium valve closed
8/24/2011	1:40:36 PM	H2 valve closed
8/24/2011	1:40:36 PM	BCl3 valve closed
8/24/2011	1:40:36 PM	PH3 valve closed
8/24/2011	1:40:36 PM	SiCl4 pre valve closed
8/24/2011	1:40:36 PM	SiCl4 post valve closed
8/24/2011	1:40:36 PM	Bypass valve closed
8/24/2011	1:40:36 PM	Bubbler valve closed
8/24/2011	1:40:36 PM	Main Vac valve opened
8/24/2011	1:40:36 PM	Helium MFC set to  0.000000
8/24/2011	1:40:36 PM	H2 MFC set to  0.000000
8/24/2011	1:40:36 PM	BCl3 MFC set to  0.000000
8/24/2011	1:40:36 PM	PHl3 MFC set to  0.000000
8/24/2011	1:40:36 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:40:36 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:40:36 PM	Tube furnace set to 150
8/24/2011	1:41:06 PM	H2 valve closed
8/24/2011	1:41:06 PM	BCl3 valve closed
8/24/2011	1:41:06 PM	PH3 valve closed
8/24/2011	1:41:06 PM	SiCl4 pre valve closed
8/24/2011	1:41:06 PM	SiCl4 post valve closed
8/24/2011	1:41:06 PM	Bypass valve closed
8/24/2011	1:41:06 PM	Bubbler valve closed
8/24/2011	1:41:06 PM	Helium valve opened
8/24/2011	1:41:06 PM	Main Vac valve opened
8/24/2011	1:41:06 PM	Helium MFC set to  20.000000
8/24/2011	1:41:06 PM	H2 MFC set to  0.000000
8/24/2011	1:41:06 PM	BCl3 MFC set to  0.000000
8/24/2011	1:41:06 PM	PHl3 MFC set to  0.000000
8/24/2011	1:41:06 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:41:06 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:41:06 PM	Tube furnace set to 150
8/24/2011	1:41:36 PM	Helium valve closed
8/24/2011	1:41:36 PM	H2 valve closed
8/24/2011	1:41:36 PM	BCl3 valve closed
8/24/2011	1:41:36 PM	PH3 valve closed
8/24/2011	1:41:36 PM	SiCl4 pre valve closed
8/24/2011	1:41:36 PM	SiCl4 post valve closed
8/24/2011	1:41:36 PM	Bypass valve closed
8/24/2011	1:41:36 PM	Bubbler valve closed
8/24/2011	1:41:36 PM	Main Vac valve opened
8/24/2011	1:41:36 PM	Helium MFC set to  0.000000
8/24/2011	1:41:36 PM	H2 MFC set to  0.000000
8/24/2011	1:41:36 PM	BCl3 MFC set to  0.000000
8/24/2011	1:41:36 PM	PHl3 MFC set to  0.000000
8/24/2011	1:41:36 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:41:36 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:41:36 PM	Tube furnace set to 150
8/24/2011	1:42:06 PM	H2 valve closed
8/24/2011	1:42:06 PM	BCl3 valve closed
8/24/2011	1:42:06 PM	PH3 valve closed
8/24/2011	1:42:06 PM	SiCl4 pre valve closed
8/24/2011	1:42:06 PM	SiCl4 post valve closed
8/24/2011	1:42:06 PM	Bypass valve closed
8/24/2011	1:42:06 PM	Bubbler valve closed
8/24/2011	1:42:06 PM	Helium valve opened
8/24/2011	1:42:06 PM	Main Vac valve opened
8/24/2011	1:42:06 PM	Helium MFC set to  20.000000
8/24/2011	1:42:06 PM	H2 MFC set to  0.000000
8/24/2011	1:42:06 PM	BCl3 MFC set to  0.000000
8/24/2011	1:42:06 PM	PHl3 MFC set to  0.000000
8/24/2011	1:42:06 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:42:06 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:42:06 PM	Tube furnace set to 150
8/24/2011	1:42:36 PM	Helium valve closed
8/24/2011	1:42:36 PM	H2 valve closed
8/24/2011	1:42:36 PM	BCl3 valve closed
8/24/2011	1:42:36 PM	PH3 valve closed
8/24/2011	1:42:36 PM	SiCl4 pre valve closed
8/24/2011	1:42:36 PM	SiCl4 post valve closed
8/24/2011	1:42:36 PM	Bypass valve closed
8/24/2011	1:42:36 PM	Bubbler valve closed
8/24/2011	1:42:36 PM	Main Vac valve opened
8/24/2011	1:42:36 PM	Helium MFC set to  0.000000
8/24/2011	1:42:36 PM	H2 MFC set to  0.000000
8/24/2011	1:42:36 PM	BCl3 MFC set to  0.000000
8/24/2011	1:42:36 PM	PHl3 MFC set to  0.000000
8/24/2011	1:42:36 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:42:36 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:42:37 PM	Tube furnace set to 150
8/24/2011	1:43:07 PM	H2 valve closed
8/24/2011	1:43:07 PM	BCl3 valve closed
8/24/2011	1:43:07 PM	PH3 valve closed
8/24/2011	1:43:07 PM	SiCl4 pre valve closed
8/24/2011	1:43:07 PM	SiCl4 post valve closed
8/24/2011	1:43:07 PM	Bypass valve closed
8/24/2011	1:43:07 PM	Bubbler valve closed
8/24/2011	1:43:07 PM	Helium valve opened
8/24/2011	1:43:07 PM	Main Vac valve opened
8/24/2011	1:43:07 PM	Helium MFC set to  20.000000
8/24/2011	1:43:07 PM	H2 MFC set to  0.000000
8/24/2011	1:43:07 PM	BCl3 MFC set to  0.000000
8/24/2011	1:43:07 PM	PHl3 MFC set to  0.000000
8/24/2011	1:43:07 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:43:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:43:07 PM	Tube furnace set to 150
8/24/2011	1:43:37 PM	Helium valve closed
8/24/2011	1:43:37 PM	H2 valve closed
8/24/2011	1:43:37 PM	BCl3 valve closed
8/24/2011	1:43:37 PM	PH3 valve closed
8/24/2011	1:43:37 PM	SiCl4 pre valve closed
8/24/2011	1:43:37 PM	SiCl4 post valve closed
8/24/2011	1:43:37 PM	Bypass valve closed
8/24/2011	1:43:37 PM	Bubbler valve closed
8/24/2011	1:43:37 PM	Main Vac valve opened
8/24/2011	1:43:37 PM	Helium MFC set to  0.000000
8/24/2011	1:43:37 PM	H2 MFC set to  0.000000
8/24/2011	1:43:37 PM	BCl3 MFC set to  0.000000
8/24/2011	1:43:37 PM	PHl3 MFC set to  0.000000
8/24/2011	1:43:37 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:43:37 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:43:37 PM	Tube furnace set to 150
8/24/2011	1:43:38 PM	Run finished at 1:43 PM
8/24/2011	1:44:43 PM	Main Vac valve closed
8/24/2011	1:45:12 PM	Main Vac valve opened
8/24/2011	1:46:51 PM	Recipe started at 1:46 PM
8/24/2011	1:46:51 PM	Helium valve closed
8/24/2011	1:46:51 PM	H2 valve closed
8/24/2011	1:46:51 PM	BCl3 valve closed
8/24/2011	1:46:51 PM	PH3 valve closed
8/24/2011	1:46:51 PM	SiCl4 pre valve closed
8/24/2011	1:46:51 PM	SiCl4 post valve closed
8/24/2011	1:46:51 PM	Main Vac valve closed
8/24/2011	1:46:51 PM	Bypass valve closed
8/24/2011	1:46:51 PM	Bubbler valve closed
8/24/2011	1:46:51 PM	Helium MFC set to  0.000000
8/24/2011	1:46:51 PM	H2 MFC set to  0.000000
8/24/2011	1:46:51 PM	BCl3 MFC set to  0.000000
8/24/2011	1:46:51 PM	PHl3 MFC set to  0.000000
8/24/2011	1:46:51 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:46:51 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:46:51 PM	Tube furnace set to 0
8/24/2011	1:46:54 PM	Helium valve closed
8/24/2011	1:46:54 PM	BCl3 valve closed
8/24/2011	1:46:54 PM	PH3 valve closed
8/24/2011	1:46:54 PM	SiCl4 pre valve closed
8/24/2011	1:46:54 PM	SiCl4 post valve closed
8/24/2011	1:46:54 PM	Main Vac valve closed
8/24/2011	1:46:54 PM	Bypass valve closed
8/24/2011	1:46:54 PM	Bubbler valve closed
8/24/2011	1:46:54 PM	H2 valve opened
8/24/2011	1:46:54 PM	Helium MFC set to  0.000000
8/24/2011	1:46:54 PM	H2 MFC set to  500.000000
8/24/2011	1:46:54 PM	BCl3 MFC set to  0.000000
8/24/2011	1:46:54 PM	PHl3 MFC set to  0.000000
8/24/2011	1:46:54 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:46:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:46:54 PM	Tube furnace set to 0
8/24/2011	1:47:57 PM	Helium valve closed
8/24/2011	1:47:57 PM	BCl3 valve closed
8/24/2011	1:47:57 PM	PH3 valve closed
8/24/2011	1:47:57 PM	SiCl4 pre valve closed
8/24/2011	1:47:57 PM	SiCl4 post valve closed
8/24/2011	1:47:57 PM	Main Vac valve closed
8/24/2011	1:47:57 PM	Bypass valve closed
8/24/2011	1:47:57 PM	H2 valve opened
8/24/2011	1:47:57 PM	Bubbler valve opened
8/24/2011	1:47:57 PM	Helium MFC set to  0.000000
8/24/2011	1:47:57 PM	H2 MFC set to  500.000000
8/24/2011	1:47:57 PM	BCl3 MFC set to  0.000000
8/24/2011	1:47:57 PM	PHl3 MFC set to  0.000000
8/24/2011	1:47:57 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:47:57 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:47:58 PM	Tube furnace set to 0
8/24/2011	1:47:59 PM	Helium valve closed
8/24/2011	1:47:59 PM	BCl3 valve closed
8/24/2011	1:47:59 PM	PH3 valve closed
8/24/2011	1:47:59 PM	SiCl4 pre valve closed
8/24/2011	1:47:59 PM	SiCl4 post valve closed
8/24/2011	1:47:59 PM	Main Vac valve closed
8/24/2011	1:47:59 PM	Bypass valve closed
8/24/2011	1:47:59 PM	H2 valve opened
8/24/2011	1:47:59 PM	Bubbler valve opened
8/24/2011	1:47:59 PM	Helium MFC set to  0.000000
8/24/2011	1:47:59 PM	H2 MFC set to  500.000000
8/24/2011	1:47:59 PM	BCl3 MFC set to  0.000000
8/24/2011	1:47:59 PM	PHl3 MFC set to  0.000000
8/24/2011	1:47:59 PM	SiCl4 MFC set to  0.000000
8/24/2011	1:47:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	1:47:59 PM	Tube furnace set to 1000
8/24/2011	2:07:59 PM	Helium valve closed
8/24/2011	2:07:59 PM	PH3 valve closed
8/24/2011	2:07:59 PM	Main Vac valve closed
8/24/2011	2:07:59 PM	Bypass valve closed
8/24/2011	2:07:59 PM	H2 valve opened
8/24/2011	2:07:59 PM	BCl3 valve opened
8/24/2011	2:07:59 PM	SiCl4 pre valve opened
8/24/2011	2:07:59 PM	SiCl4 post valve opened
8/24/2011	2:07:59 PM	Bubbler valve opened
8/24/2011	2:07:59 PM	Helium MFC set to  0.000000
8/24/2011	2:07:59 PM	H2 MFC set to  500.000000
8/24/2011	2:07:59 PM	BCl3 MFC set to  2.500000
8/24/2011	2:07:59 PM	PHl3 MFC set to  0.000000
8/24/2011	2:07:59 PM	SiCl4 MFC set to  50.000000
8/24/2011	2:07:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	2:07:59 PM	Tube furnace set to 1000
8/24/2011	2:27:59 PM	Helium valve closed
8/24/2011	2:27:59 PM	BCl3 valve closed
8/24/2011	2:27:59 PM	PH3 valve closed
8/24/2011	2:27:59 PM	SiCl4 pre valve closed
8/24/2011	2:27:59 PM	SiCl4 post valve closed
8/24/2011	2:27:59 PM	Main Vac valve closed
8/24/2011	2:27:59 PM	Bypass valve closed
8/24/2011	2:27:59 PM	H2 valve opened
8/24/2011	2:27:59 PM	Bubbler valve opened
8/24/2011	2:27:59 PM	Helium MFC set to  0.000000
8/24/2011	2:27:59 PM	H2 MFC set to  500.000000
8/24/2011	2:27:59 PM	BCl3 MFC set to  0.000000
8/24/2011	2:27:59 PM	PHl3 MFC set to  0.000000
8/24/2011	2:27:59 PM	SiCl4 MFC set to  0.000000
8/24/2011	2:27:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	2:27:59 PM	Tube furnace set to 750
8/24/2011	2:32:59 PM	H2 valve closed
8/24/2011	2:32:59 PM	BCl3 valve closed
8/24/2011	2:32:59 PM	PH3 valve closed
8/24/2011	2:32:59 PM	SiCl4 pre valve closed
8/24/2011	2:32:59 PM	SiCl4 post valve closed
8/24/2011	2:32:59 PM	Main Vac valve closed
8/24/2011	2:32:59 PM	Bypass valve closed
8/24/2011	2:32:59 PM	Helium valve opened
8/24/2011	2:32:59 PM	Bubbler valve opened
8/24/2011	2:32:59 PM	Helium MFC set to  500.000000
8/24/2011	2:32:59 PM	H2 MFC set to  0.000000
8/24/2011	2:32:59 PM	BCl3 MFC set to  0.000000
8/24/2011	2:32:59 PM	PHl3 MFC set to  0.000000
8/24/2011	2:32:59 PM	SiCl4 MFC set to  0.000000
8/24/2011	2:32:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	2:32:59 PM	Tube furnace set to 0
8/24/2011	2:52:59 PM	Helium valve closed
8/24/2011	2:52:59 PM	H2 valve closed
8/24/2011	2:52:59 PM	BCl3 valve closed
8/24/2011	2:52:59 PM	PH3 valve closed
8/24/2011	2:52:59 PM	SiCl4 pre valve closed
8/24/2011	2:52:59 PM	SiCl4 post valve closed
8/24/2011	2:52:59 PM	Main Vac valve closed
8/24/2011	2:52:59 PM	Bypass valve closed
8/24/2011	2:52:59 PM	Bubbler valve closed
8/24/2011	2:52:59 PM	Helium MFC set to  0.000000
8/24/2011	2:52:59 PM	H2 MFC set to  0.000000
8/24/2011	2:52:59 PM	BCl3 MFC set to  0.000000
8/24/2011	2:52:59 PM	PHl3 MFC set to  0.000000
8/24/2011	2:52:59 PM	SiCl4 MFC set to  0.000000
8/24/2011	2:52:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	2:52:59 PM	Tube furnace set to 0
8/24/2011	2:53:00 PM	Run finished at 2:53 PM
8/24/2011	3:01:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	3:01:35 PM	Recipe started at 3:01 PM
8/24/2011	3:01:35 PM	Helium valve closed
8/24/2011	3:01:35 PM	H2 valve closed
8/24/2011	3:01:35 PM	BCl3 valve closed
8/24/2011	3:01:35 PM	PH3 valve closed
8/24/2011	3:01:35 PM	SiCl4 pre valve closed
8/24/2011	3:01:35 PM	SiCl4 post valve closed
8/24/2011	3:01:35 PM	Main Vac valve closed
8/24/2011	3:01:35 PM	Bypass valve closed
8/24/2011	3:01:35 PM	Bubbler valve closed
8/24/2011	3:01:35 PM	Helium MFC set to  0.000000
8/24/2011	3:01:35 PM	H2 MFC set to  0.000000
8/24/2011	3:01:35 PM	BCl3 MFC set to  0.000000
8/24/2011	3:01:35 PM	PHl3 MFC set to  0.000000
8/24/2011	3:01:35 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:01:35 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:01:35 PM	Tube furnace set to 0
8/24/2011	3:01:38 PM	H2 valve closed
8/24/2011	3:01:38 PM	BCl3 valve closed
8/24/2011	3:01:38 PM	PH3 valve closed
8/24/2011	3:01:38 PM	SiCl4 pre valve closed
8/24/2011	3:01:38 PM	SiCl4 post valve closed
8/24/2011	3:01:38 PM	Main Vac valve closed
8/24/2011	3:01:38 PM	Bypass valve closed
8/24/2011	3:01:38 PM	Bubbler valve closed
8/24/2011	3:01:38 PM	Helium valve opened
8/24/2011	3:01:38 PM	Helium MFC set to  500.000000
8/24/2011	3:01:38 PM	H2 MFC set to  0.000000
8/24/2011	3:01:38 PM	BCl3 MFC set to  0.000000
8/24/2011	3:01:38 PM	PHl3 MFC set to  0.000000
8/24/2011	3:01:38 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:01:38 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:01:38 PM	Tube furnace set to 0
8/24/2011	3:01:40 PM	Helium valve closed
8/24/2011	3:01:40 PM	H2 valve closed
8/24/2011	3:01:40 PM	BCl3 valve closed
8/24/2011	3:01:40 PM	PH3 valve closed
8/24/2011	3:01:40 PM	SiCl4 pre valve closed
8/24/2011	3:01:40 PM	SiCl4 post valve closed
8/24/2011	3:01:40 PM	Main Vac valve closed
8/24/2011	3:01:40 PM	Bypass valve closed
8/24/2011	3:01:40 PM	Bubbler valve closed
8/24/2011	3:01:40 PM	Helium MFC set to  0.000000
8/24/2011	3:01:40 PM	H2 MFC set to  0.000000
8/24/2011	3:01:40 PM	BCl3 MFC set to  0.000000
8/24/2011	3:01:40 PM	PHl3 MFC set to  0.000000
8/24/2011	3:01:40 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:01:40 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:01:40 PM	Tube furnace set to 0
8/24/2011	3:01:41 PM	Run finished at 3:01 PM
8/24/2011	3:01:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	3:11:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	3:11:52 PM	Recipe started at 3:11 PM
8/24/2011	3:11:52 PM	Helium valve closed
8/24/2011	3:11:52 PM	H2 valve closed
8/24/2011	3:11:52 PM	BCl3 valve closed
8/24/2011	3:11:52 PM	PH3 valve closed
8/24/2011	3:11:52 PM	SiCl4 pre valve closed
8/24/2011	3:11:52 PM	SiCl4 post valve closed
8/24/2011	3:11:52 PM	Main Vac valve closed
8/24/2011	3:11:52 PM	Bubbler valve closed
8/24/2011	3:11:52 PM	Bypass valve opened
8/24/2011	3:11:52 PM	Helium MFC set to  0.000000
8/24/2011	3:11:52 PM	H2 MFC set to  0.000000
8/24/2011	3:11:52 PM	BCl3 MFC set to  0.000000
8/24/2011	3:11:52 PM	PHl3 MFC set to  0.000000
8/24/2011	3:11:52 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:11:52 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:11:53 PM	Tube furnace set to 0
8/24/2011	3:13:02 PM	Helium valve closed
8/24/2011	3:13:02 PM	H2 valve closed
8/24/2011	3:13:02 PM	BCl3 valve closed
8/24/2011	3:13:02 PM	PH3 valve closed
8/24/2011	3:13:02 PM	SiCl4 pre valve closed
8/24/2011	3:13:02 PM	SiCl4 post valve closed
8/24/2011	3:13:02 PM	Main Vac valve closed
8/24/2011	3:13:02 PM	Bubbler valve closed
8/24/2011	3:13:02 PM	Bypass valve opened
8/24/2011	3:13:02 PM	Helium MFC set to  0.000000
8/24/2011	3:13:02 PM	H2 MFC set to  0.000000
8/24/2011	3:13:02 PM	BCl3 MFC set to  0.000000
8/24/2011	3:13:02 PM	PHl3 MFC set to  0.000000
8/24/2011	3:13:02 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:13:02 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:13:02 PM	Tube furnace set to 0
8/24/2011	3:14:02 PM	Helium valve closed
8/24/2011	3:14:02 PM	H2 valve closed
8/24/2011	3:14:02 PM	BCl3 valve closed
8/24/2011	3:14:02 PM	PH3 valve closed
8/24/2011	3:14:02 PM	SiCl4 pre valve closed
8/24/2011	3:14:02 PM	SiCl4 post valve closed
8/24/2011	3:14:02 PM	Bypass valve closed
8/24/2011	3:14:02 PM	Bubbler valve closed
8/24/2011	3:14:02 PM	Main Vac valve opened
8/24/2011	3:14:02 PM	Helium MFC set to  0.000000
8/24/2011	3:14:02 PM	H2 MFC set to  0.000000
8/24/2011	3:14:02 PM	BCl3 MFC set to  0.000000
8/24/2011	3:14:02 PM	PHl3 MFC set to  0.000000
8/24/2011	3:14:02 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:14:02 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:14:02 PM	Tube furnace set to 0
8/24/2011	3:14:03 PM	Run finished at 3:14 PM
8/24/2011	3:14:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	3:15:45 PM	Recipe started at 3:15 PM
8/24/2011	3:15:45 PM	Helium valve closed
8/24/2011	3:15:45 PM	H2 valve closed
8/24/2011	3:15:45 PM	BCl3 valve closed
8/24/2011	3:15:45 PM	PH3 valve closed
8/24/2011	3:15:45 PM	SiCl4 pre valve closed
8/24/2011	3:15:45 PM	SiCl4 post valve closed
8/24/2011	3:15:45 PM	Bypass valve closed
8/24/2011	3:15:45 PM	Bubbler valve closed
8/24/2011	3:15:45 PM	Main Vac valve opened
8/24/2011	3:15:45 PM	Helium MFC set to  0.000000
8/24/2011	3:15:45 PM	H2 MFC set to  0.000000
8/24/2011	3:15:45 PM	BCl3 MFC set to  0.000000
8/24/2011	3:15:45 PM	PHl3 MFC set to  0.000000
8/24/2011	3:15:45 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:15:45 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:15:45 PM	Tube furnace set to 150
8/24/2011	3:16:15 PM	H2 valve closed
8/24/2011	3:16:15 PM	BCl3 valve closed
8/24/2011	3:16:15 PM	PH3 valve closed
8/24/2011	3:16:15 PM	SiCl4 pre valve closed
8/24/2011	3:16:15 PM	SiCl4 post valve closed
8/24/2011	3:16:15 PM	Bypass valve closed
8/24/2011	3:16:15 PM	Bubbler valve closed
8/24/2011	3:16:15 PM	Helium valve opened
8/24/2011	3:16:15 PM	Main Vac valve opened
8/24/2011	3:16:15 PM	Helium MFC set to  20.000000
8/24/2011	3:16:15 PM	H2 MFC set to  0.000000
8/24/2011	3:16:15 PM	BCl3 MFC set to  0.000000
8/24/2011	3:16:15 PM	PHl3 MFC set to  0.000000
8/24/2011	3:16:15 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:16:15 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:16:16 PM	Tube furnace set to 150
8/24/2011	3:16:46 PM	Helium valve closed
8/24/2011	3:16:46 PM	H2 valve closed
8/24/2011	3:16:46 PM	BCl3 valve closed
8/24/2011	3:16:46 PM	PH3 valve closed
8/24/2011	3:16:46 PM	SiCl4 pre valve closed
8/24/2011	3:16:46 PM	SiCl4 post valve closed
8/24/2011	3:16:46 PM	Bypass valve closed
8/24/2011	3:16:46 PM	Bubbler valve closed
8/24/2011	3:16:46 PM	Main Vac valve opened
8/24/2011	3:16:46 PM	Helium MFC set to  0.000000
8/24/2011	3:16:46 PM	H2 MFC set to  0.000000
8/24/2011	3:16:46 PM	BCl3 MFC set to  0.000000
8/24/2011	3:16:46 PM	PHl3 MFC set to  0.000000
8/24/2011	3:16:46 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:16:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:16:46 PM	Tube furnace set to 150
8/24/2011	3:17:16 PM	H2 valve closed
8/24/2011	3:17:16 PM	BCl3 valve closed
8/24/2011	3:17:16 PM	PH3 valve closed
8/24/2011	3:17:16 PM	SiCl4 pre valve closed
8/24/2011	3:17:16 PM	SiCl4 post valve closed
8/24/2011	3:17:16 PM	Bypass valve closed
8/24/2011	3:17:16 PM	Bubbler valve closed
8/24/2011	3:17:16 PM	Helium valve opened
8/24/2011	3:17:16 PM	Main Vac valve opened
8/24/2011	3:17:16 PM	Helium MFC set to  20.000000
8/24/2011	3:17:16 PM	H2 MFC set to  0.000000
8/24/2011	3:17:16 PM	BCl3 MFC set to  0.000000
8/24/2011	3:17:16 PM	PHl3 MFC set to  0.000000
8/24/2011	3:17:16 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:17:16 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:17:16 PM	Tube furnace set to 150
8/24/2011	3:17:46 PM	Helium valve closed
8/24/2011	3:17:46 PM	H2 valve closed
8/24/2011	3:17:46 PM	BCl3 valve closed
8/24/2011	3:17:46 PM	PH3 valve closed
8/24/2011	3:17:46 PM	SiCl4 pre valve closed
8/24/2011	3:17:46 PM	SiCl4 post valve closed
8/24/2011	3:17:46 PM	Bypass valve closed
8/24/2011	3:17:46 PM	Bubbler valve closed
8/24/2011	3:17:46 PM	Main Vac valve opened
8/24/2011	3:17:46 PM	Helium MFC set to  0.000000
8/24/2011	3:17:46 PM	H2 MFC set to  0.000000
8/24/2011	3:17:46 PM	BCl3 MFC set to  0.000000
8/24/2011	3:17:46 PM	PHl3 MFC set to  0.000000
8/24/2011	3:17:46 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:17:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:17:46 PM	Tube furnace set to 150
8/24/2011	3:18:16 PM	H2 valve closed
8/24/2011	3:18:16 PM	BCl3 valve closed
8/24/2011	3:18:16 PM	PH3 valve closed
8/24/2011	3:18:16 PM	SiCl4 pre valve closed
8/24/2011	3:18:16 PM	SiCl4 post valve closed
8/24/2011	3:18:16 PM	Bypass valve closed
8/24/2011	3:18:16 PM	Bubbler valve closed
8/24/2011	3:18:16 PM	Helium valve opened
8/24/2011	3:18:16 PM	Main Vac valve opened
8/24/2011	3:18:16 PM	Helium MFC set to  20.000000
8/24/2011	3:18:16 PM	H2 MFC set to  0.000000
8/24/2011	3:18:16 PM	BCl3 MFC set to  0.000000
8/24/2011	3:18:16 PM	PHl3 MFC set to  0.000000
8/24/2011	3:18:16 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:18:16 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:18:16 PM	Tube furnace set to 150
8/24/2011	3:18:46 PM	Helium valve closed
8/24/2011	3:18:46 PM	H2 valve closed
8/24/2011	3:18:46 PM	BCl3 valve closed
8/24/2011	3:18:46 PM	PH3 valve closed
8/24/2011	3:18:46 PM	SiCl4 pre valve closed
8/24/2011	3:18:46 PM	SiCl4 post valve closed
8/24/2011	3:18:46 PM	Bypass valve closed
8/24/2011	3:18:46 PM	Bubbler valve closed
8/24/2011	3:18:46 PM	Main Vac valve opened
8/24/2011	3:18:46 PM	Helium MFC set to  0.000000
8/24/2011	3:18:46 PM	H2 MFC set to  0.000000
8/24/2011	3:18:46 PM	BCl3 MFC set to  0.000000
8/24/2011	3:18:46 PM	PHl3 MFC set to  0.000000
8/24/2011	3:18:46 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:18:46 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:18:47 PM	Tube furnace set to 150
8/24/2011	3:19:17 PM	H2 valve closed
8/24/2011	3:19:17 PM	BCl3 valve closed
8/24/2011	3:19:17 PM	PH3 valve closed
8/24/2011	3:19:17 PM	SiCl4 pre valve closed
8/24/2011	3:19:17 PM	SiCl4 post valve closed
8/24/2011	3:19:17 PM	Bypass valve closed
8/24/2011	3:19:17 PM	Bubbler valve closed
8/24/2011	3:19:17 PM	Helium valve opened
8/24/2011	3:19:17 PM	Main Vac valve opened
8/24/2011	3:19:17 PM	Helium MFC set to  20.000000
8/24/2011	3:19:17 PM	H2 MFC set to  0.000000
8/24/2011	3:19:17 PM	BCl3 MFC set to  0.000000
8/24/2011	3:19:17 PM	PHl3 MFC set to  0.000000
8/24/2011	3:19:17 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:19:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:19:17 PM	Tube furnace set to 150
8/24/2011	3:19:47 PM	Helium valve closed
8/24/2011	3:19:47 PM	H2 valve closed
8/24/2011	3:19:47 PM	BCl3 valve closed
8/24/2011	3:19:47 PM	PH3 valve closed
8/24/2011	3:19:47 PM	SiCl4 pre valve closed
8/24/2011	3:19:47 PM	SiCl4 post valve closed
8/24/2011	3:19:47 PM	Bypass valve closed
8/24/2011	3:19:47 PM	Bubbler valve closed
8/24/2011	3:19:47 PM	Main Vac valve opened
8/24/2011	3:19:47 PM	Helium MFC set to  0.000000
8/24/2011	3:19:47 PM	H2 MFC set to  0.000000
8/24/2011	3:19:47 PM	BCl3 MFC set to  0.000000
8/24/2011	3:19:47 PM	PHl3 MFC set to  0.000000
8/24/2011	3:19:47 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:19:47 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:19:47 PM	Tube furnace set to 150
8/24/2011	3:20:17 PM	H2 valve closed
8/24/2011	3:20:17 PM	BCl3 valve closed
8/24/2011	3:20:17 PM	PH3 valve closed
8/24/2011	3:20:17 PM	SiCl4 pre valve closed
8/24/2011	3:20:17 PM	SiCl4 post valve closed
8/24/2011	3:20:17 PM	Bypass valve closed
8/24/2011	3:20:17 PM	Bubbler valve closed
8/24/2011	3:20:17 PM	Helium valve opened
8/24/2011	3:20:17 PM	Main Vac valve opened
8/24/2011	3:20:17 PM	Helium MFC set to  20.000000
8/24/2011	3:20:17 PM	H2 MFC set to  0.000000
8/24/2011	3:20:17 PM	BCl3 MFC set to  0.000000
8/24/2011	3:20:17 PM	PHl3 MFC set to  0.000000
8/24/2011	3:20:17 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:20:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:20:17 PM	Tube furnace set to 150
8/24/2011	3:20:47 PM	Helium valve closed
8/24/2011	3:20:47 PM	H2 valve closed
8/24/2011	3:20:47 PM	BCl3 valve closed
8/24/2011	3:20:47 PM	PH3 valve closed
8/24/2011	3:20:47 PM	SiCl4 pre valve closed
8/24/2011	3:20:47 PM	SiCl4 post valve closed
8/24/2011	3:20:47 PM	Bypass valve closed
8/24/2011	3:20:47 PM	Bubbler valve closed
8/24/2011	3:20:47 PM	Main Vac valve opened
8/24/2011	3:20:47 PM	Helium MFC set to  0.000000
8/24/2011	3:20:47 PM	H2 MFC set to  0.000000
8/24/2011	3:20:47 PM	BCl3 MFC set to  0.000000
8/24/2011	3:20:47 PM	PHl3 MFC set to  0.000000
8/24/2011	3:20:47 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:20:47 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:20:47 PM	Tube furnace set to 150
8/24/2011	3:21:17 PM	H2 valve closed
8/24/2011	3:21:17 PM	BCl3 valve closed
8/24/2011	3:21:17 PM	PH3 valve closed
8/24/2011	3:21:17 PM	SiCl4 pre valve closed
8/24/2011	3:21:17 PM	SiCl4 post valve closed
8/24/2011	3:21:17 PM	Bypass valve closed
8/24/2011	3:21:17 PM	Bubbler valve closed
8/24/2011	3:21:17 PM	Helium valve opened
8/24/2011	3:21:17 PM	Main Vac valve opened
8/24/2011	3:21:17 PM	Helium MFC set to  20.000000
8/24/2011	3:21:17 PM	H2 MFC set to  0.000000
8/24/2011	3:21:17 PM	BCl3 MFC set to  0.000000
8/24/2011	3:21:17 PM	PHl3 MFC set to  0.000000
8/24/2011	3:21:17 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:21:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:21:18 PM	Tube furnace set to 150
8/24/2011	3:21:48 PM	Helium valve closed
8/24/2011	3:21:48 PM	H2 valve closed
8/24/2011	3:21:48 PM	BCl3 valve closed
8/24/2011	3:21:48 PM	PH3 valve closed
8/24/2011	3:21:48 PM	SiCl4 pre valve closed
8/24/2011	3:21:48 PM	SiCl4 post valve closed
8/24/2011	3:21:48 PM	Bypass valve closed
8/24/2011	3:21:48 PM	Bubbler valve closed
8/24/2011	3:21:48 PM	Main Vac valve opened
8/24/2011	3:21:48 PM	Helium MFC set to  0.000000
8/24/2011	3:21:48 PM	H2 MFC set to  0.000000
8/24/2011	3:21:48 PM	BCl3 MFC set to  0.000000
8/24/2011	3:21:48 PM	PHl3 MFC set to  0.000000
8/24/2011	3:21:48 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:21:48 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:21:48 PM	Tube furnace set to 150
8/24/2011	3:22:18 PM	H2 valve closed
8/24/2011	3:22:18 PM	BCl3 valve closed
8/24/2011	3:22:18 PM	PH3 valve closed
8/24/2011	3:22:18 PM	SiCl4 pre valve closed
8/24/2011	3:22:18 PM	SiCl4 post valve closed
8/24/2011	3:22:18 PM	Bypass valve closed
8/24/2011	3:22:18 PM	Bubbler valve closed
8/24/2011	3:22:18 PM	Helium valve opened
8/24/2011	3:22:18 PM	Main Vac valve opened
8/24/2011	3:22:18 PM	Helium MFC set to  20.000000
8/24/2011	3:22:18 PM	H2 MFC set to  0.000000
8/24/2011	3:22:18 PM	BCl3 MFC set to  0.000000
8/24/2011	3:22:18 PM	PHl3 MFC set to  0.000000
8/24/2011	3:22:18 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:22:18 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:22:18 PM	Tube furnace set to 150
8/24/2011	3:22:48 PM	Helium valve closed
8/24/2011	3:22:48 PM	H2 valve closed
8/24/2011	3:22:48 PM	BCl3 valve closed
8/24/2011	3:22:48 PM	PH3 valve closed
8/24/2011	3:22:48 PM	SiCl4 pre valve closed
8/24/2011	3:22:48 PM	SiCl4 post valve closed
8/24/2011	3:22:48 PM	Bypass valve closed
8/24/2011	3:22:48 PM	Bubbler valve closed
8/24/2011	3:22:48 PM	Main Vac valve opened
8/24/2011	3:22:48 PM	Helium MFC set to  0.000000
8/24/2011	3:22:48 PM	H2 MFC set to  0.000000
8/24/2011	3:22:48 PM	BCl3 MFC set to  0.000000
8/24/2011	3:22:48 PM	PHl3 MFC set to  0.000000
8/24/2011	3:22:48 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:22:48 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:22:48 PM	Tube furnace set to 150
8/24/2011	3:23:18 PM	H2 valve closed
8/24/2011	3:23:18 PM	BCl3 valve closed
8/24/2011	3:23:18 PM	PH3 valve closed
8/24/2011	3:23:18 PM	SiCl4 pre valve closed
8/24/2011	3:23:18 PM	SiCl4 post valve closed
8/24/2011	3:23:18 PM	Bypass valve closed
8/24/2011	3:23:18 PM	Bubbler valve closed
8/24/2011	3:23:18 PM	Helium valve opened
8/24/2011	3:23:18 PM	Main Vac valve opened
8/24/2011	3:23:18 PM	Helium MFC set to  20.000000
8/24/2011	3:23:18 PM	H2 MFC set to  0.000000
8/24/2011	3:23:18 PM	BCl3 MFC set to  0.000000
8/24/2011	3:23:18 PM	PHl3 MFC set to  0.000000
8/24/2011	3:23:18 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:23:18 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:23:18 PM	Tube furnace set to 150
8/24/2011	3:23:48 PM	Helium valve closed
8/24/2011	3:23:48 PM	H2 valve closed
8/24/2011	3:23:48 PM	BCl3 valve closed
8/24/2011	3:23:48 PM	PH3 valve closed
8/24/2011	3:23:48 PM	SiCl4 pre valve closed
8/24/2011	3:23:48 PM	SiCl4 post valve closed
8/24/2011	3:23:48 PM	Bypass valve closed
8/24/2011	3:23:48 PM	Bubbler valve closed
8/24/2011	3:23:48 PM	Main Vac valve opened
8/24/2011	3:23:48 PM	Helium MFC set to  0.000000
8/24/2011	3:23:48 PM	H2 MFC set to  0.000000
8/24/2011	3:23:48 PM	BCl3 MFC set to  0.000000
8/24/2011	3:23:48 PM	PHl3 MFC set to  0.000000
8/24/2011	3:23:48 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:23:48 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:23:49 PM	Tube furnace set to 150
8/24/2011	3:24:19 PM	H2 valve closed
8/24/2011	3:24:19 PM	BCl3 valve closed
8/24/2011	3:24:19 PM	PH3 valve closed
8/24/2011	3:24:19 PM	SiCl4 pre valve closed
8/24/2011	3:24:19 PM	SiCl4 post valve closed
8/24/2011	3:24:19 PM	Bypass valve closed
8/24/2011	3:24:19 PM	Bubbler valve closed
8/24/2011	3:24:19 PM	Helium valve opened
8/24/2011	3:24:19 PM	Main Vac valve opened
8/24/2011	3:24:19 PM	Helium MFC set to  20.000000
8/24/2011	3:24:19 PM	H2 MFC set to  0.000000
8/24/2011	3:24:19 PM	BCl3 MFC set to  0.000000
8/24/2011	3:24:19 PM	PHl3 MFC set to  0.000000
8/24/2011	3:24:19 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:24:19 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:24:19 PM	Tube furnace set to 150
8/24/2011	3:24:49 PM	Helium valve closed
8/24/2011	3:24:49 PM	H2 valve closed
8/24/2011	3:24:49 PM	BCl3 valve closed
8/24/2011	3:24:49 PM	PH3 valve closed
8/24/2011	3:24:49 PM	SiCl4 pre valve closed
8/24/2011	3:24:49 PM	SiCl4 post valve closed
8/24/2011	3:24:49 PM	Bypass valve closed
8/24/2011	3:24:49 PM	Bubbler valve closed
8/24/2011	3:24:49 PM	Main Vac valve opened
8/24/2011	3:24:49 PM	Helium MFC set to  0.000000
8/24/2011	3:24:49 PM	H2 MFC set to  0.000000
8/24/2011	3:24:49 PM	BCl3 MFC set to  0.000000
8/24/2011	3:24:49 PM	PHl3 MFC set to  0.000000
8/24/2011	3:24:49 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:24:49 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:24:49 PM	Tube furnace set to 150
8/24/2011	3:25:19 PM	H2 valve closed
8/24/2011	3:25:19 PM	BCl3 valve closed
8/24/2011	3:25:19 PM	PH3 valve closed
8/24/2011	3:25:19 PM	SiCl4 pre valve closed
8/24/2011	3:25:19 PM	SiCl4 post valve closed
8/24/2011	3:25:19 PM	Bypass valve closed
8/24/2011	3:25:19 PM	Bubbler valve closed
8/24/2011	3:25:19 PM	Helium valve opened
8/24/2011	3:25:19 PM	Main Vac valve opened
8/24/2011	3:25:19 PM	Helium MFC set to  20.000000
8/24/2011	3:25:19 PM	H2 MFC set to  0.000000
8/24/2011	3:25:19 PM	BCl3 MFC set to  0.000000
8/24/2011	3:25:19 PM	PHl3 MFC set to  0.000000
8/24/2011	3:25:19 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:25:19 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:25:19 PM	Tube furnace set to 150
8/24/2011	3:25:49 PM	Helium valve closed
8/24/2011	3:25:49 PM	H2 valve closed
8/24/2011	3:25:49 PM	BCl3 valve closed
8/24/2011	3:25:49 PM	PH3 valve closed
8/24/2011	3:25:49 PM	SiCl4 pre valve closed
8/24/2011	3:25:49 PM	SiCl4 post valve closed
8/24/2011	3:25:49 PM	Bypass valve closed
8/24/2011	3:25:49 PM	Bubbler valve closed
8/24/2011	3:25:49 PM	Main Vac valve opened
8/24/2011	3:25:49 PM	Helium MFC set to  0.000000
8/24/2011	3:25:49 PM	H2 MFC set to  0.000000
8/24/2011	3:25:49 PM	BCl3 MFC set to  0.000000
8/24/2011	3:25:49 PM	PHl3 MFC set to  0.000000
8/24/2011	3:25:49 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:25:49 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:25:49 PM	Tube furnace set to 150
8/24/2011	3:25:50 PM	Run finished at 3:25 PM
8/24/2011	3:27:19 PM	Recipe started at 3:27 PM
8/24/2011	3:27:19 PM	Helium valve closed
8/24/2011	3:27:19 PM	H2 valve closed
8/24/2011	3:27:19 PM	BCl3 valve closed
8/24/2011	3:27:19 PM	PH3 valve closed
8/24/2011	3:27:19 PM	SiCl4 pre valve closed
8/24/2011	3:27:19 PM	SiCl4 post valve closed
8/24/2011	3:27:19 PM	Bypass valve closed
8/24/2011	3:27:19 PM	Bubbler valve closed
8/24/2011	3:27:19 PM	Main Vac valve opened
8/24/2011	3:27:19 PM	Helium MFC set to  0.000000
8/24/2011	3:27:19 PM	H2 MFC set to  0.000000
8/24/2011	3:27:19 PM	BCl3 MFC set to  0.000000
8/24/2011	3:27:19 PM	PHl3 MFC set to  0.000000
8/24/2011	3:27:19 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:27:19 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:27:19 PM	Tube furnace set to 150
8/24/2011	3:27:49 PM	H2 valve closed
8/24/2011	3:27:49 PM	BCl3 valve closed
8/24/2011	3:27:49 PM	PH3 valve closed
8/24/2011	3:27:49 PM	SiCl4 pre valve closed
8/24/2011	3:27:49 PM	SiCl4 post valve closed
8/24/2011	3:27:49 PM	Bypass valve closed
8/24/2011	3:27:49 PM	Bubbler valve closed
8/24/2011	3:27:49 PM	Helium valve opened
8/24/2011	3:27:49 PM	Main Vac valve opened
8/24/2011	3:27:49 PM	Helium MFC set to  20.000000
8/24/2011	3:27:49 PM	H2 MFC set to  0.000000
8/24/2011	3:27:49 PM	BCl3 MFC set to  0.000000
8/24/2011	3:27:49 PM	PHl3 MFC set to  0.000000
8/24/2011	3:27:49 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:27:49 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:27:49 PM	Tube furnace set to 150
8/24/2011	3:28:19 PM	Helium valve closed
8/24/2011	3:28:19 PM	H2 valve closed
8/24/2011	3:28:19 PM	BCl3 valve closed
8/24/2011	3:28:19 PM	PH3 valve closed
8/24/2011	3:28:19 PM	SiCl4 pre valve closed
8/24/2011	3:28:19 PM	SiCl4 post valve closed
8/24/2011	3:28:19 PM	Bypass valve closed
8/24/2011	3:28:19 PM	Bubbler valve closed
8/24/2011	3:28:19 PM	Main Vac valve opened
8/24/2011	3:28:19 PM	Helium MFC set to  0.000000
8/24/2011	3:28:19 PM	H2 MFC set to  0.000000
8/24/2011	3:28:19 PM	BCl3 MFC set to  0.000000
8/24/2011	3:28:19 PM	PHl3 MFC set to  0.000000
8/24/2011	3:28:19 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:28:19 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:28:19 PM	Tube furnace set to 150
8/24/2011	3:28:49 PM	H2 valve closed
8/24/2011	3:28:49 PM	BCl3 valve closed
8/24/2011	3:28:49 PM	PH3 valve closed
8/24/2011	3:28:49 PM	SiCl4 pre valve closed
8/24/2011	3:28:49 PM	SiCl4 post valve closed
8/24/2011	3:28:49 PM	Bypass valve closed
8/24/2011	3:28:49 PM	Bubbler valve closed
8/24/2011	3:28:49 PM	Helium valve opened
8/24/2011	3:28:49 PM	Main Vac valve opened
8/24/2011	3:28:49 PM	Helium MFC set to  20.000000
8/24/2011	3:28:49 PM	H2 MFC set to  0.000000
8/24/2011	3:28:49 PM	BCl3 MFC set to  0.000000
8/24/2011	3:28:49 PM	PHl3 MFC set to  0.000000
8/24/2011	3:28:49 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:28:49 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:28:50 PM	Tube furnace set to 150
8/24/2011	3:29:20 PM	Helium valve closed
8/24/2011	3:29:20 PM	H2 valve closed
8/24/2011	3:29:20 PM	BCl3 valve closed
8/24/2011	3:29:20 PM	PH3 valve closed
8/24/2011	3:29:20 PM	SiCl4 pre valve closed
8/24/2011	3:29:20 PM	SiCl4 post valve closed
8/24/2011	3:29:20 PM	Bypass valve closed
8/24/2011	3:29:20 PM	Bubbler valve closed
8/24/2011	3:29:20 PM	Main Vac valve opened
8/24/2011	3:29:20 PM	Helium MFC set to  0.000000
8/24/2011	3:29:20 PM	H2 MFC set to  0.000000
8/24/2011	3:29:20 PM	BCl3 MFC set to  0.000000
8/24/2011	3:29:20 PM	PHl3 MFC set to  0.000000
8/24/2011	3:29:20 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:29:20 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:29:20 PM	Tube furnace set to 150
8/24/2011	3:29:50 PM	H2 valve closed
8/24/2011	3:29:50 PM	BCl3 valve closed
8/24/2011	3:29:50 PM	PH3 valve closed
8/24/2011	3:29:50 PM	SiCl4 pre valve closed
8/24/2011	3:29:50 PM	SiCl4 post valve closed
8/24/2011	3:29:50 PM	Bypass valve closed
8/24/2011	3:29:50 PM	Bubbler valve closed
8/24/2011	3:29:50 PM	Helium valve opened
8/24/2011	3:29:50 PM	Main Vac valve opened
8/24/2011	3:29:50 PM	Helium MFC set to  20.000000
8/24/2011	3:29:50 PM	H2 MFC set to  0.000000
8/24/2011	3:29:50 PM	BCl3 MFC set to  0.000000
8/24/2011	3:29:50 PM	PHl3 MFC set to  0.000000
8/24/2011	3:29:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:29:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:29:50 PM	Tube furnace set to 150
8/24/2011	3:30:20 PM	Helium valve closed
8/24/2011	3:30:20 PM	H2 valve closed
8/24/2011	3:30:20 PM	BCl3 valve closed
8/24/2011	3:30:20 PM	PH3 valve closed
8/24/2011	3:30:20 PM	SiCl4 pre valve closed
8/24/2011	3:30:20 PM	SiCl4 post valve closed
8/24/2011	3:30:20 PM	Bypass valve closed
8/24/2011	3:30:20 PM	Bubbler valve closed
8/24/2011	3:30:20 PM	Main Vac valve opened
8/24/2011	3:30:20 PM	Helium MFC set to  0.000000
8/24/2011	3:30:20 PM	H2 MFC set to  0.000000
8/24/2011	3:30:20 PM	BCl3 MFC set to  0.000000
8/24/2011	3:30:20 PM	PHl3 MFC set to  0.000000
8/24/2011	3:30:20 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:30:20 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:30:20 PM	Tube furnace set to 150
8/24/2011	3:30:50 PM	H2 valve closed
8/24/2011	3:30:50 PM	BCl3 valve closed
8/24/2011	3:30:50 PM	PH3 valve closed
8/24/2011	3:30:50 PM	SiCl4 pre valve closed
8/24/2011	3:30:50 PM	SiCl4 post valve closed
8/24/2011	3:30:50 PM	Bypass valve closed
8/24/2011	3:30:50 PM	Bubbler valve closed
8/24/2011	3:30:50 PM	Helium valve opened
8/24/2011	3:30:50 PM	Main Vac valve opened
8/24/2011	3:30:50 PM	Helium MFC set to  20.000000
8/24/2011	3:30:50 PM	H2 MFC set to  0.000000
8/24/2011	3:30:50 PM	BCl3 MFC set to  0.000000
8/24/2011	3:30:50 PM	PHl3 MFC set to  0.000000
8/24/2011	3:30:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:30:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:30:50 PM	Tube furnace set to 150
8/24/2011	3:31:20 PM	Helium valve closed
8/24/2011	3:31:20 PM	H2 valve closed
8/24/2011	3:31:20 PM	BCl3 valve closed
8/24/2011	3:31:20 PM	PH3 valve closed
8/24/2011	3:31:20 PM	SiCl4 pre valve closed
8/24/2011	3:31:20 PM	SiCl4 post valve closed
8/24/2011	3:31:20 PM	Bypass valve closed
8/24/2011	3:31:20 PM	Bubbler valve closed
8/24/2011	3:31:20 PM	Main Vac valve opened
8/24/2011	3:31:20 PM	Helium MFC set to  0.000000
8/24/2011	3:31:20 PM	H2 MFC set to  0.000000
8/24/2011	3:31:20 PM	BCl3 MFC set to  0.000000
8/24/2011	3:31:20 PM	PHl3 MFC set to  0.000000
8/24/2011	3:31:20 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:31:20 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:31:21 PM	Tube furnace set to 150
8/24/2011	3:31:51 PM	H2 valve closed
8/24/2011	3:31:51 PM	BCl3 valve closed
8/24/2011	3:31:51 PM	PH3 valve closed
8/24/2011	3:31:51 PM	SiCl4 pre valve closed
8/24/2011	3:31:51 PM	SiCl4 post valve closed
8/24/2011	3:31:51 PM	Bypass valve closed
8/24/2011	3:31:51 PM	Bubbler valve closed
8/24/2011	3:31:51 PM	Helium valve opened
8/24/2011	3:31:51 PM	Main Vac valve opened
8/24/2011	3:31:51 PM	Helium MFC set to  20.000000
8/24/2011	3:31:51 PM	H2 MFC set to  0.000000
8/24/2011	3:31:51 PM	BCl3 MFC set to  0.000000
8/24/2011	3:31:51 PM	PHl3 MFC set to  0.000000
8/24/2011	3:31:51 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:31:51 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:31:51 PM	Tube furnace set to 150
8/24/2011	3:32:21 PM	Helium valve closed
8/24/2011	3:32:21 PM	H2 valve closed
8/24/2011	3:32:21 PM	BCl3 valve closed
8/24/2011	3:32:21 PM	PH3 valve closed
8/24/2011	3:32:21 PM	SiCl4 pre valve closed
8/24/2011	3:32:21 PM	SiCl4 post valve closed
8/24/2011	3:32:21 PM	Bypass valve closed
8/24/2011	3:32:21 PM	Bubbler valve closed
8/24/2011	3:32:21 PM	Main Vac valve opened
8/24/2011	3:32:21 PM	Helium MFC set to  0.000000
8/24/2011	3:32:21 PM	H2 MFC set to  0.000000
8/24/2011	3:32:21 PM	BCl3 MFC set to  0.000000
8/24/2011	3:32:21 PM	PHl3 MFC set to  0.000000
8/24/2011	3:32:21 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:32:21 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:32:21 PM	Tube furnace set to 150
8/24/2011	3:32:51 PM	H2 valve closed
8/24/2011	3:32:51 PM	BCl3 valve closed
8/24/2011	3:32:51 PM	PH3 valve closed
8/24/2011	3:32:51 PM	SiCl4 pre valve closed
8/24/2011	3:32:51 PM	SiCl4 post valve closed
8/24/2011	3:32:51 PM	Bypass valve closed
8/24/2011	3:32:51 PM	Bubbler valve closed
8/24/2011	3:32:51 PM	Helium valve opened
8/24/2011	3:32:51 PM	Main Vac valve opened
8/24/2011	3:32:51 PM	Helium MFC set to  20.000000
8/24/2011	3:32:51 PM	H2 MFC set to  0.000000
8/24/2011	3:32:51 PM	BCl3 MFC set to  0.000000
8/24/2011	3:32:51 PM	PHl3 MFC set to  0.000000
8/24/2011	3:32:51 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:32:51 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:32:51 PM	Tube furnace set to 150
8/24/2011	3:33:21 PM	Helium valve closed
8/24/2011	3:33:21 PM	H2 valve closed
8/24/2011	3:33:21 PM	BCl3 valve closed
8/24/2011	3:33:21 PM	PH3 valve closed
8/24/2011	3:33:21 PM	SiCl4 pre valve closed
8/24/2011	3:33:21 PM	SiCl4 post valve closed
8/24/2011	3:33:21 PM	Bypass valve closed
8/24/2011	3:33:21 PM	Bubbler valve closed
8/24/2011	3:33:21 PM	Main Vac valve opened
8/24/2011	3:33:21 PM	Helium MFC set to  0.000000
8/24/2011	3:33:21 PM	H2 MFC set to  0.000000
8/24/2011	3:33:21 PM	BCl3 MFC set to  0.000000
8/24/2011	3:33:21 PM	PHl3 MFC set to  0.000000
8/24/2011	3:33:21 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:33:21 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:33:21 PM	Tube furnace set to 150
8/24/2011	3:33:51 PM	H2 valve closed
8/24/2011	3:33:51 PM	BCl3 valve closed
8/24/2011	3:33:51 PM	PH3 valve closed
8/24/2011	3:33:51 PM	SiCl4 pre valve closed
8/24/2011	3:33:51 PM	SiCl4 post valve closed
8/24/2011	3:33:51 PM	Bypass valve closed
8/24/2011	3:33:51 PM	Bubbler valve closed
8/24/2011	3:33:51 PM	Helium valve opened
8/24/2011	3:33:51 PM	Main Vac valve opened
8/24/2011	3:33:51 PM	Helium MFC set to  20.000000
8/24/2011	3:33:51 PM	H2 MFC set to  0.000000
8/24/2011	3:33:51 PM	BCl3 MFC set to  0.000000
8/24/2011	3:33:51 PM	PHl3 MFC set to  0.000000
8/24/2011	3:33:51 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:33:51 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:33:52 PM	Tube furnace set to 150
8/24/2011	3:34:22 PM	Helium valve closed
8/24/2011	3:34:22 PM	H2 valve closed
8/24/2011	3:34:22 PM	BCl3 valve closed
8/24/2011	3:34:22 PM	PH3 valve closed
8/24/2011	3:34:22 PM	SiCl4 pre valve closed
8/24/2011	3:34:22 PM	SiCl4 post valve closed
8/24/2011	3:34:22 PM	Bypass valve closed
8/24/2011	3:34:22 PM	Bubbler valve closed
8/24/2011	3:34:22 PM	Main Vac valve opened
8/24/2011	3:34:22 PM	Helium MFC set to  0.000000
8/24/2011	3:34:22 PM	H2 MFC set to  0.000000
8/24/2011	3:34:22 PM	BCl3 MFC set to  0.000000
8/24/2011	3:34:22 PM	PHl3 MFC set to  0.000000
8/24/2011	3:34:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:34:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:34:22 PM	Tube furnace set to 150
8/24/2011	3:34:52 PM	H2 valve closed
8/24/2011	3:34:52 PM	BCl3 valve closed
8/24/2011	3:34:52 PM	PH3 valve closed
8/24/2011	3:34:52 PM	SiCl4 pre valve closed
8/24/2011	3:34:52 PM	SiCl4 post valve closed
8/24/2011	3:34:52 PM	Bypass valve closed
8/24/2011	3:34:52 PM	Bubbler valve closed
8/24/2011	3:34:52 PM	Helium valve opened
8/24/2011	3:34:52 PM	Main Vac valve opened
8/24/2011	3:34:52 PM	Helium MFC set to  20.000000
8/24/2011	3:34:52 PM	H2 MFC set to  0.000000
8/24/2011	3:34:52 PM	BCl3 MFC set to  0.000000
8/24/2011	3:34:52 PM	PHl3 MFC set to  0.000000
8/24/2011	3:34:52 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:34:52 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:34:52 PM	Tube furnace set to 150
8/24/2011	3:35:22 PM	Helium valve closed
8/24/2011	3:35:22 PM	H2 valve closed
8/24/2011	3:35:22 PM	BCl3 valve closed
8/24/2011	3:35:22 PM	PH3 valve closed
8/24/2011	3:35:22 PM	SiCl4 pre valve closed
8/24/2011	3:35:22 PM	SiCl4 post valve closed
8/24/2011	3:35:22 PM	Bypass valve closed
8/24/2011	3:35:22 PM	Bubbler valve closed
8/24/2011	3:35:22 PM	Main Vac valve opened
8/24/2011	3:35:22 PM	Helium MFC set to  0.000000
8/24/2011	3:35:22 PM	H2 MFC set to  0.000000
8/24/2011	3:35:22 PM	BCl3 MFC set to  0.000000
8/24/2011	3:35:22 PM	PHl3 MFC set to  0.000000
8/24/2011	3:35:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:35:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:35:22 PM	Tube furnace set to 150
8/24/2011	3:35:52 PM	H2 valve closed
8/24/2011	3:35:52 PM	BCl3 valve closed
8/24/2011	3:35:52 PM	PH3 valve closed
8/24/2011	3:35:52 PM	SiCl4 pre valve closed
8/24/2011	3:35:52 PM	SiCl4 post valve closed
8/24/2011	3:35:52 PM	Bypass valve closed
8/24/2011	3:35:52 PM	Bubbler valve closed
8/24/2011	3:35:52 PM	Helium valve opened
8/24/2011	3:35:52 PM	Main Vac valve opened
8/24/2011	3:35:52 PM	Helium MFC set to  20.000000
8/24/2011	3:35:52 PM	H2 MFC set to  0.000000
8/24/2011	3:35:52 PM	BCl3 MFC set to  0.000000
8/24/2011	3:35:52 PM	PHl3 MFC set to  0.000000
8/24/2011	3:35:52 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:35:52 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:35:52 PM	Tube furnace set to 150
8/24/2011	3:36:22 PM	Helium valve closed
8/24/2011	3:36:22 PM	H2 valve closed
8/24/2011	3:36:22 PM	BCl3 valve closed
8/24/2011	3:36:22 PM	PH3 valve closed
8/24/2011	3:36:22 PM	SiCl4 pre valve closed
8/24/2011	3:36:22 PM	SiCl4 post valve closed
8/24/2011	3:36:22 PM	Bypass valve closed
8/24/2011	3:36:22 PM	Bubbler valve closed
8/24/2011	3:36:22 PM	Main Vac valve opened
8/24/2011	3:36:22 PM	Helium MFC set to  0.000000
8/24/2011	3:36:22 PM	H2 MFC set to  0.000000
8/24/2011	3:36:22 PM	BCl3 MFC set to  0.000000
8/24/2011	3:36:22 PM	PHl3 MFC set to  0.000000
8/24/2011	3:36:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:36:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:36:23 PM	Tube furnace set to 150
8/24/2011	3:36:53 PM	H2 valve closed
8/24/2011	3:36:53 PM	BCl3 valve closed
8/24/2011	3:36:53 PM	PH3 valve closed
8/24/2011	3:36:53 PM	SiCl4 pre valve closed
8/24/2011	3:36:53 PM	SiCl4 post valve closed
8/24/2011	3:36:53 PM	Bypass valve closed
8/24/2011	3:36:53 PM	Bubbler valve closed
8/24/2011	3:36:53 PM	Helium valve opened
8/24/2011	3:36:53 PM	Main Vac valve opened
8/24/2011	3:36:53 PM	Helium MFC set to  20.000000
8/24/2011	3:36:53 PM	H2 MFC set to  0.000000
8/24/2011	3:36:53 PM	BCl3 MFC set to  0.000000
8/24/2011	3:36:53 PM	PHl3 MFC set to  0.000000
8/24/2011	3:36:53 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:36:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:36:53 PM	Tube furnace set to 150
8/24/2011	3:37:23 PM	Helium valve closed
8/24/2011	3:37:23 PM	H2 valve closed
8/24/2011	3:37:23 PM	BCl3 valve closed
8/24/2011	3:37:23 PM	PH3 valve closed
8/24/2011	3:37:23 PM	SiCl4 pre valve closed
8/24/2011	3:37:23 PM	SiCl4 post valve closed
8/24/2011	3:37:23 PM	Bypass valve closed
8/24/2011	3:37:23 PM	Bubbler valve closed
8/24/2011	3:37:23 PM	Main Vac valve opened
8/24/2011	3:37:23 PM	Helium MFC set to  0.000000
8/24/2011	3:37:23 PM	H2 MFC set to  0.000000
8/24/2011	3:37:23 PM	BCl3 MFC set to  0.000000
8/24/2011	3:37:23 PM	PHl3 MFC set to  0.000000
8/24/2011	3:37:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:37:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:37:23 PM	Tube furnace set to 150
8/24/2011	3:37:24 PM	Run finished at 3:37 PM
8/24/2011	3:45:10 PM	Main Vac valve closed
8/24/2011	3:45:32 PM	Main Vac valve opened
8/24/2011	3:46:50 PM	Recipe started at 3:46 PM
8/24/2011	3:46:50 PM	Helium valve closed
8/24/2011	3:46:50 PM	H2 valve closed
8/24/2011	3:46:50 PM	BCl3 valve closed
8/24/2011	3:46:50 PM	PH3 valve closed
8/24/2011	3:46:50 PM	SiCl4 pre valve closed
8/24/2011	3:46:50 PM	SiCl4 post valve closed
8/24/2011	3:46:50 PM	Main Vac valve closed
8/24/2011	3:46:50 PM	Bypass valve closed
8/24/2011	3:46:50 PM	Bubbler valve closed
8/24/2011	3:46:50 PM	Helium MFC set to  0.000000
8/24/2011	3:46:50 PM	H2 MFC set to  0.000000
8/24/2011	3:46:50 PM	BCl3 MFC set to  0.000000
8/24/2011	3:46:50 PM	PHl3 MFC set to  0.000000
8/24/2011	3:46:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:46:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:46:50 PM	Tube furnace set to 0
8/24/2011	3:46:53 PM	Helium valve closed
8/24/2011	3:46:53 PM	BCl3 valve closed
8/24/2011	3:46:53 PM	PH3 valve closed
8/24/2011	3:46:53 PM	SiCl4 pre valve closed
8/24/2011	3:46:53 PM	SiCl4 post valve closed
8/24/2011	3:46:53 PM	Main Vac valve closed
8/24/2011	3:46:53 PM	Bypass valve closed
8/24/2011	3:46:53 PM	Bubbler valve closed
8/24/2011	3:46:53 PM	H2 valve opened
8/24/2011	3:46:53 PM	Helium MFC set to  0.000000
8/24/2011	3:46:53 PM	H2 MFC set to  500.000000
8/24/2011	3:46:53 PM	BCl3 MFC set to  0.000000
8/24/2011	3:46:53 PM	PHl3 MFC set to  0.000000
8/24/2011	3:46:53 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:46:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:46:53 PM	Tube furnace set to 0
8/24/2011	3:47:57 PM	Helium valve closed
8/24/2011	3:47:57 PM	BCl3 valve closed
8/24/2011	3:47:57 PM	PH3 valve closed
8/24/2011	3:47:57 PM	SiCl4 pre valve closed
8/24/2011	3:47:57 PM	SiCl4 post valve closed
8/24/2011	3:47:57 PM	Main Vac valve closed
8/24/2011	3:47:57 PM	Bypass valve closed
8/24/2011	3:47:57 PM	H2 valve opened
8/24/2011	3:47:57 PM	Bubbler valve opened
8/24/2011	3:47:57 PM	Helium MFC set to  0.000000
8/24/2011	3:47:57 PM	H2 MFC set to  500.000000
8/24/2011	3:47:57 PM	BCl3 MFC set to  0.000000
8/24/2011	3:47:57 PM	PHl3 MFC set to  0.000000
8/24/2011	3:47:57 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:47:57 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:47:57 PM	Tube furnace set to 0
8/24/2011	3:47:58 PM	Helium valve closed
8/24/2011	3:47:58 PM	BCl3 valve closed
8/24/2011	3:47:58 PM	PH3 valve closed
8/24/2011	3:47:58 PM	SiCl4 pre valve closed
8/24/2011	3:47:58 PM	SiCl4 post valve closed
8/24/2011	3:47:58 PM	Main Vac valve closed
8/24/2011	3:47:58 PM	Bypass valve closed
8/24/2011	3:47:58 PM	H2 valve opened
8/24/2011	3:47:58 PM	Bubbler valve opened
8/24/2011	3:47:58 PM	Helium MFC set to  0.000000
8/24/2011	3:47:58 PM	H2 MFC set to  500.000000
8/24/2011	3:47:58 PM	BCl3 MFC set to  0.000000
8/24/2011	3:47:58 PM	PHl3 MFC set to  0.000000
8/24/2011	3:47:58 PM	SiCl4 MFC set to  0.000000
8/24/2011	3:47:58 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	3:47:58 PM	Tube furnace set to 1000
8/24/2011	4:07:58 PM	Helium valve closed
8/24/2011	4:07:58 PM	PH3 valve closed
8/24/2011	4:07:58 PM	Main Vac valve closed
8/24/2011	4:07:58 PM	Bypass valve closed
8/24/2011	4:07:58 PM	H2 valve opened
8/24/2011	4:07:58 PM	BCl3 valve opened
8/24/2011	4:07:58 PM	SiCl4 pre valve opened
8/24/2011	4:07:58 PM	SiCl4 post valve opened
8/24/2011	4:07:58 PM	Bubbler valve opened
8/24/2011	4:07:58 PM	Helium MFC set to  0.000000
8/24/2011	4:07:58 PM	H2 MFC set to  500.000000
8/24/2011	4:07:58 PM	BCl3 MFC set to  2.500000
8/24/2011	4:07:58 PM	PHl3 MFC set to  0.000000
8/24/2011	4:07:58 PM	SiCl4 MFC set to  50.000000
8/24/2011	4:07:58 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	4:07:58 PM	Tube furnace set to 1000
8/24/2011	4:27:58 PM	Helium valve closed
8/24/2011	4:27:58 PM	BCl3 valve closed
8/24/2011	4:27:58 PM	PH3 valve closed
8/24/2011	4:27:58 PM	SiCl4 pre valve closed
8/24/2011	4:27:58 PM	SiCl4 post valve closed
8/24/2011	4:27:58 PM	Main Vac valve closed
8/24/2011	4:27:58 PM	Bypass valve closed
8/24/2011	4:27:58 PM	H2 valve opened
8/24/2011	4:27:58 PM	Bubbler valve opened
8/24/2011	4:27:58 PM	Helium MFC set to  0.000000
8/24/2011	4:27:58 PM	H2 MFC set to  500.000000
8/24/2011	4:27:58 PM	BCl3 MFC set to  0.000000
8/24/2011	4:27:58 PM	PHl3 MFC set to  0.000000
8/24/2011	4:27:58 PM	SiCl4 MFC set to  0.000000
8/24/2011	4:27:58 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	4:27:59 PM	Tube furnace set to 750
8/24/2011	4:32:59 PM	H2 valve closed
8/24/2011	4:32:59 PM	BCl3 valve closed
8/24/2011	4:32:59 PM	PH3 valve closed
8/24/2011	4:32:59 PM	SiCl4 pre valve closed
8/24/2011	4:32:59 PM	SiCl4 post valve closed
8/24/2011	4:32:59 PM	Main Vac valve closed
8/24/2011	4:32:59 PM	Bypass valve closed
8/24/2011	4:32:59 PM	Helium valve opened
8/24/2011	4:32:59 PM	Bubbler valve opened
8/24/2011	4:32:59 PM	Helium MFC set to  500.000000
8/24/2011	4:32:59 PM	H2 MFC set to  0.000000
8/24/2011	4:32:59 PM	BCl3 MFC set to  0.000000
8/24/2011	4:32:59 PM	PHl3 MFC set to  0.000000
8/24/2011	4:32:59 PM	SiCl4 MFC set to  0.000000
8/24/2011	4:32:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	4:32:59 PM	Tube furnace set to 0
8/24/2011	4:52:59 PM	Helium valve closed
8/24/2011	4:52:59 PM	H2 valve closed
8/24/2011	4:52:59 PM	BCl3 valve closed
8/24/2011	4:52:59 PM	PH3 valve closed
8/24/2011	4:52:59 PM	SiCl4 pre valve closed
8/24/2011	4:52:59 PM	SiCl4 post valve closed
8/24/2011	4:52:59 PM	Main Vac valve closed
8/24/2011	4:52:59 PM	Bypass valve closed
8/24/2011	4:52:59 PM	Bubbler valve closed
8/24/2011	4:52:59 PM	Helium MFC set to  0.000000
8/24/2011	4:52:59 PM	H2 MFC set to  0.000000
8/24/2011	4:52:59 PM	BCl3 MFC set to  0.000000
8/24/2011	4:52:59 PM	PHl3 MFC set to  0.000000
8/24/2011	4:52:59 PM	SiCl4 MFC set to  0.000000
8/24/2011	4:52:59 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	4:52:59 PM	Tube furnace set to 0
8/24/2011	4:53:00 PM	Run finished at 4:53 PM
8/24/2011	5:30:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	5:30:31 PM	Recipe started at 5:30 PM
8/24/2011	5:30:31 PM	Helium valve closed
8/24/2011	5:30:31 PM	H2 valve closed
8/24/2011	5:30:31 PM	BCl3 valve closed
8/24/2011	5:30:31 PM	PH3 valve closed
8/24/2011	5:30:31 PM	SiCl4 pre valve closed
8/24/2011	5:30:31 PM	SiCl4 post valve closed
8/24/2011	5:30:31 PM	Main Vac valve closed
8/24/2011	5:30:31 PM	Bypass valve closed
8/24/2011	5:30:31 PM	Bubbler valve closed
8/24/2011	5:30:31 PM	Helium MFC set to  0.000000
8/24/2011	5:30:31 PM	H2 MFC set to  0.000000
8/24/2011	5:30:31 PM	BCl3 MFC set to  0.000000
8/24/2011	5:30:31 PM	PHl3 MFC set to  0.000000
8/24/2011	5:30:31 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:30:31 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:30:31 PM	Tube furnace set to 0
8/24/2011	5:30:34 PM	H2 valve closed
8/24/2011	5:30:34 PM	BCl3 valve closed
8/24/2011	5:30:34 PM	PH3 valve closed
8/24/2011	5:30:34 PM	SiCl4 pre valve closed
8/24/2011	5:30:34 PM	SiCl4 post valve closed
8/24/2011	5:30:34 PM	Main Vac valve closed
8/24/2011	5:30:34 PM	Bypass valve closed
8/24/2011	5:30:34 PM	Bubbler valve closed
8/24/2011	5:30:34 PM	Helium valve opened
8/24/2011	5:30:34 PM	Helium MFC set to  500.000000
8/24/2011	5:30:34 PM	H2 MFC set to  0.000000
8/24/2011	5:30:34 PM	BCl3 MFC set to  0.000000
8/24/2011	5:30:34 PM	PHl3 MFC set to  0.000000
8/24/2011	5:30:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:30:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:30:34 PM	Tube furnace set to 0
8/24/2011	5:30:40 PM	Helium valve closed
8/24/2011	5:30:40 PM	H2 valve closed
8/24/2011	5:30:40 PM	BCl3 valve closed
8/24/2011	5:30:40 PM	PH3 valve closed
8/24/2011	5:30:40 PM	SiCl4 pre valve closed
8/24/2011	5:30:40 PM	SiCl4 post valve closed
8/24/2011	5:30:40 PM	Main Vac valve closed
8/24/2011	5:30:40 PM	Bypass valve closed
8/24/2011	5:30:40 PM	Bubbler valve closed
8/24/2011	5:30:40 PM	Helium MFC set to  0.000000
8/24/2011	5:30:40 PM	H2 MFC set to  0.000000
8/24/2011	5:30:41 PM	BCl3 MFC set to  0.000000
8/24/2011	5:30:41 PM	PHl3 MFC set to  0.000000
8/24/2011	5:30:41 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:30:41 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:30:41 PM	Tube furnace set to 0
8/24/2011	5:30:42 PM	Run finished at 5:30 PM
8/24/2011	5:30:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	5:37:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	5:37:17 PM	Recipe started at 5:37 PM
8/24/2011	5:37:17 PM	Helium valve closed
8/24/2011	5:37:17 PM	H2 valve closed
8/24/2011	5:37:17 PM	BCl3 valve closed
8/24/2011	5:37:17 PM	PH3 valve closed
8/24/2011	5:37:17 PM	SiCl4 pre valve closed
8/24/2011	5:37:17 PM	SiCl4 post valve closed
8/24/2011	5:37:17 PM	Main Vac valve closed
8/24/2011	5:37:17 PM	Bubbler valve closed
8/24/2011	5:37:17 PM	Bypass valve opened
8/24/2011	5:37:17 PM	Helium MFC set to  0.000000
8/24/2011	5:37:17 PM	H2 MFC set to  0.000000
8/24/2011	5:37:17 PM	BCl3 MFC set to  0.000000
8/24/2011	5:37:17 PM	PHl3 MFC set to  0.000000
8/24/2011	5:37:17 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:37:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:37:17 PM	Tube furnace set to 0
8/24/2011	5:38:24 PM	Helium valve closed
8/24/2011	5:38:24 PM	H2 valve closed
8/24/2011	5:38:24 PM	BCl3 valve closed
8/24/2011	5:38:24 PM	PH3 valve closed
8/24/2011	5:38:24 PM	SiCl4 pre valve closed
8/24/2011	5:38:24 PM	SiCl4 post valve closed
8/24/2011	5:38:24 PM	Main Vac valve closed
8/24/2011	5:38:24 PM	Bubbler valve closed
8/24/2011	5:38:24 PM	Bypass valve opened
8/24/2011	5:38:24 PM	Helium MFC set to  0.000000
8/24/2011	5:38:24 PM	H2 MFC set to  0.000000
8/24/2011	5:38:24 PM	BCl3 MFC set to  0.000000
8/24/2011	5:38:24 PM	PHl3 MFC set to  0.000000
8/24/2011	5:38:24 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:38:24 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:38:24 PM	Tube furnace set to 0
8/24/2011	5:39:24 PM	Helium valve closed
8/24/2011	5:39:24 PM	H2 valve closed
8/24/2011	5:39:24 PM	BCl3 valve closed
8/24/2011	5:39:24 PM	PH3 valve closed
8/24/2011	5:39:24 PM	SiCl4 pre valve closed
8/24/2011	5:39:24 PM	SiCl4 post valve closed
8/24/2011	5:39:24 PM	Bypass valve closed
8/24/2011	5:39:24 PM	Bubbler valve closed
8/24/2011	5:39:24 PM	Main Vac valve opened
8/24/2011	5:39:24 PM	Helium MFC set to  0.000000
8/24/2011	5:39:24 PM	H2 MFC set to  0.000000
8/24/2011	5:39:24 PM	BCl3 MFC set to  0.000000
8/24/2011	5:39:24 PM	PHl3 MFC set to  0.000000
8/24/2011	5:39:24 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:39:24 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:39:24 PM	Tube furnace set to 0
8/24/2011	5:39:25 PM	Run finished at 5:39 PM
8/24/2011	5:39:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	5:42:50 PM	Recipe started at 5:42 PM
8/24/2011	5:42:50 PM	Helium valve closed
8/24/2011	5:42:50 PM	H2 valve closed
8/24/2011	5:42:50 PM	BCl3 valve closed
8/24/2011	5:42:50 PM	PH3 valve closed
8/24/2011	5:42:50 PM	SiCl4 pre valve closed
8/24/2011	5:42:50 PM	SiCl4 post valve closed
8/24/2011	5:42:50 PM	Bypass valve closed
8/24/2011	5:42:50 PM	Bubbler valve closed
8/24/2011	5:42:50 PM	Main Vac valve opened
8/24/2011	5:42:50 PM	Helium MFC set to  0.000000
8/24/2011	5:42:50 PM	H2 MFC set to  0.000000
8/24/2011	5:42:50 PM	BCl3 MFC set to  0.000000
8/24/2011	5:42:50 PM	PHl3 MFC set to  0.000000
8/24/2011	5:42:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:42:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:42:50 PM	Tube furnace set to 150
8/24/2011	5:43:20 PM	H2 valve closed
8/24/2011	5:43:20 PM	BCl3 valve closed
8/24/2011	5:43:20 PM	PH3 valve closed
8/24/2011	5:43:20 PM	SiCl4 pre valve closed
8/24/2011	5:43:20 PM	SiCl4 post valve closed
8/24/2011	5:43:20 PM	Bypass valve closed
8/24/2011	5:43:20 PM	Bubbler valve closed
8/24/2011	5:43:20 PM	Helium valve opened
8/24/2011	5:43:20 PM	Main Vac valve opened
8/24/2011	5:43:20 PM	Helium MFC set to  20.000000
8/24/2011	5:43:20 PM	H2 MFC set to  0.000000
8/24/2011	5:43:20 PM	BCl3 MFC set to  0.000000
8/24/2011	5:43:20 PM	PHl3 MFC set to  0.000000
8/24/2011	5:43:20 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:43:20 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:43:20 PM	Tube furnace set to 150
8/24/2011	5:43:50 PM	Helium valve closed
8/24/2011	5:43:50 PM	H2 valve closed
8/24/2011	5:43:50 PM	BCl3 valve closed
8/24/2011	5:43:50 PM	PH3 valve closed
8/24/2011	5:43:50 PM	SiCl4 pre valve closed
8/24/2011	5:43:50 PM	SiCl4 post valve closed
8/24/2011	5:43:50 PM	Bypass valve closed
8/24/2011	5:43:50 PM	Bubbler valve closed
8/24/2011	5:43:50 PM	Main Vac valve opened
8/24/2011	5:43:50 PM	Helium MFC set to  0.000000
8/24/2011	5:43:50 PM	H2 MFC set to  0.000000
8/24/2011	5:43:50 PM	BCl3 MFC set to  0.000000
8/24/2011	5:43:50 PM	PHl3 MFC set to  0.000000
8/24/2011	5:43:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:43:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:43:50 PM	Tube furnace set to 150
8/24/2011	5:44:20 PM	H2 valve closed
8/24/2011	5:44:20 PM	BCl3 valve closed
8/24/2011	5:44:20 PM	PH3 valve closed
8/24/2011	5:44:20 PM	SiCl4 pre valve closed
8/24/2011	5:44:20 PM	SiCl4 post valve closed
8/24/2011	5:44:20 PM	Bypass valve closed
8/24/2011	5:44:20 PM	Bubbler valve closed
8/24/2011	5:44:20 PM	Helium valve opened
8/24/2011	5:44:20 PM	Main Vac valve opened
8/24/2011	5:44:20 PM	Helium MFC set to  20.000000
8/24/2011	5:44:20 PM	H2 MFC set to  0.000000
8/24/2011	5:44:20 PM	BCl3 MFC set to  0.000000
8/24/2011	5:44:20 PM	PHl3 MFC set to  0.000000
8/24/2011	5:44:20 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:44:20 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:44:20 PM	Tube furnace set to 150
8/24/2011	5:44:50 PM	Helium valve closed
8/24/2011	5:44:50 PM	H2 valve closed
8/24/2011	5:44:50 PM	BCl3 valve closed
8/24/2011	5:44:50 PM	PH3 valve closed
8/24/2011	5:44:50 PM	SiCl4 pre valve closed
8/24/2011	5:44:50 PM	SiCl4 post valve closed
8/24/2011	5:44:50 PM	Bypass valve closed
8/24/2011	5:44:50 PM	Bubbler valve closed
8/24/2011	5:44:50 PM	Main Vac valve opened
8/24/2011	5:44:50 PM	Helium MFC set to  0.000000
8/24/2011	5:44:50 PM	H2 MFC set to  0.000000
8/24/2011	5:44:50 PM	BCl3 MFC set to  0.000000
8/24/2011	5:44:50 PM	PHl3 MFC set to  0.000000
8/24/2011	5:44:50 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:44:50 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:44:51 PM	Tube furnace set to 150
8/24/2011	5:45:21 PM	H2 valve closed
8/24/2011	5:45:21 PM	BCl3 valve closed
8/24/2011	5:45:21 PM	PH3 valve closed
8/24/2011	5:45:21 PM	SiCl4 pre valve closed
8/24/2011	5:45:21 PM	SiCl4 post valve closed
8/24/2011	5:45:21 PM	Bypass valve closed
8/24/2011	5:45:21 PM	Bubbler valve closed
8/24/2011	5:45:21 PM	Helium valve opened
8/24/2011	5:45:21 PM	Main Vac valve opened
8/24/2011	5:45:21 PM	Helium MFC set to  20.000000
8/24/2011	5:45:21 PM	H2 MFC set to  0.000000
8/24/2011	5:45:21 PM	BCl3 MFC set to  0.000000
8/24/2011	5:45:21 PM	PHl3 MFC set to  0.000000
8/24/2011	5:45:21 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:45:21 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:45:21 PM	Tube furnace set to 150
8/24/2011	5:45:51 PM	Helium valve closed
8/24/2011	5:45:51 PM	H2 valve closed
8/24/2011	5:45:51 PM	BCl3 valve closed
8/24/2011	5:45:51 PM	PH3 valve closed
8/24/2011	5:45:51 PM	SiCl4 pre valve closed
8/24/2011	5:45:51 PM	SiCl4 post valve closed
8/24/2011	5:45:51 PM	Bypass valve closed
8/24/2011	5:45:51 PM	Bubbler valve closed
8/24/2011	5:45:51 PM	Main Vac valve opened
8/24/2011	5:45:51 PM	Helium MFC set to  0.000000
8/24/2011	5:45:51 PM	H2 MFC set to  0.000000
8/24/2011	5:45:51 PM	BCl3 MFC set to  0.000000
8/24/2011	5:45:51 PM	PHl3 MFC set to  0.000000
8/24/2011	5:45:51 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:45:51 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:45:51 PM	Tube furnace set to 150
8/24/2011	5:46:21 PM	H2 valve closed
8/24/2011	5:46:21 PM	BCl3 valve closed
8/24/2011	5:46:21 PM	PH3 valve closed
8/24/2011	5:46:21 PM	SiCl4 pre valve closed
8/24/2011	5:46:21 PM	SiCl4 post valve closed
8/24/2011	5:46:21 PM	Bypass valve closed
8/24/2011	5:46:21 PM	Bubbler valve closed
8/24/2011	5:46:21 PM	Helium valve opened
8/24/2011	5:46:21 PM	Main Vac valve opened
8/24/2011	5:46:21 PM	Helium MFC set to  20.000000
8/24/2011	5:46:21 PM	H2 MFC set to  0.000000
8/24/2011	5:46:21 PM	BCl3 MFC set to  0.000000
8/24/2011	5:46:21 PM	PHl3 MFC set to  0.000000
8/24/2011	5:46:21 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:46:21 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:46:21 PM	Tube furnace set to 150
8/24/2011	5:46:51 PM	Helium valve closed
8/24/2011	5:46:51 PM	H2 valve closed
8/24/2011	5:46:51 PM	BCl3 valve closed
8/24/2011	5:46:51 PM	PH3 valve closed
8/24/2011	5:46:51 PM	SiCl4 pre valve closed
8/24/2011	5:46:51 PM	SiCl4 post valve closed
8/24/2011	5:46:51 PM	Bypass valve closed
8/24/2011	5:46:51 PM	Bubbler valve closed
8/24/2011	5:46:51 PM	Main Vac valve opened
8/24/2011	5:46:51 PM	Helium MFC set to  0.000000
8/24/2011	5:46:51 PM	H2 MFC set to  0.000000
8/24/2011	5:46:51 PM	BCl3 MFC set to  0.000000
8/24/2011	5:46:51 PM	PHl3 MFC set to  0.000000
8/24/2011	5:46:51 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:46:51 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:46:52 PM	Tube furnace set to 150
8/24/2011	5:47:22 PM	H2 valve closed
8/24/2011	5:47:22 PM	BCl3 valve closed
8/24/2011	5:47:22 PM	PH3 valve closed
8/24/2011	5:47:22 PM	SiCl4 pre valve closed
8/24/2011	5:47:22 PM	SiCl4 post valve closed
8/24/2011	5:47:22 PM	Bypass valve closed
8/24/2011	5:47:22 PM	Bubbler valve closed
8/24/2011	5:47:22 PM	Helium valve opened
8/24/2011	5:47:22 PM	Main Vac valve opened
8/24/2011	5:47:22 PM	Helium MFC set to  20.000000
8/24/2011	5:47:22 PM	H2 MFC set to  0.000000
8/24/2011	5:47:22 PM	BCl3 MFC set to  0.000000
8/24/2011	5:47:22 PM	PHl3 MFC set to  0.000000
8/24/2011	5:47:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:47:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:47:22 PM	Tube furnace set to 150
8/24/2011	5:47:52 PM	Helium valve closed
8/24/2011	5:47:52 PM	H2 valve closed
8/24/2011	5:47:52 PM	BCl3 valve closed
8/24/2011	5:47:52 PM	PH3 valve closed
8/24/2011	5:47:52 PM	SiCl4 pre valve closed
8/24/2011	5:47:52 PM	SiCl4 post valve closed
8/24/2011	5:47:52 PM	Bypass valve closed
8/24/2011	5:47:52 PM	Bubbler valve closed
8/24/2011	5:47:52 PM	Main Vac valve opened
8/24/2011	5:47:52 PM	Helium MFC set to  0.000000
8/24/2011	5:47:52 PM	H2 MFC set to  0.000000
8/24/2011	5:47:52 PM	BCl3 MFC set to  0.000000
8/24/2011	5:47:52 PM	PHl3 MFC set to  0.000000
8/24/2011	5:47:52 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:47:52 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:47:52 PM	Tube furnace set to 150
8/24/2011	5:48:22 PM	H2 valve closed
8/24/2011	5:48:22 PM	BCl3 valve closed
8/24/2011	5:48:22 PM	PH3 valve closed
8/24/2011	5:48:22 PM	SiCl4 pre valve closed
8/24/2011	5:48:22 PM	SiCl4 post valve closed
8/24/2011	5:48:22 PM	Bypass valve closed
8/24/2011	5:48:22 PM	Bubbler valve closed
8/24/2011	5:48:22 PM	Helium valve opened
8/24/2011	5:48:22 PM	Main Vac valve opened
8/24/2011	5:48:22 PM	Helium MFC set to  20.000000
8/24/2011	5:48:22 PM	H2 MFC set to  0.000000
8/24/2011	5:48:22 PM	BCl3 MFC set to  0.000000
8/24/2011	5:48:22 PM	PHl3 MFC set to  0.000000
8/24/2011	5:48:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:48:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:48:22 PM	Tube furnace set to 150
8/24/2011	5:48:52 PM	Helium valve closed
8/24/2011	5:48:52 PM	H2 valve closed
8/24/2011	5:48:52 PM	BCl3 valve closed
8/24/2011	5:48:52 PM	PH3 valve closed
8/24/2011	5:48:52 PM	SiCl4 pre valve closed
8/24/2011	5:48:52 PM	SiCl4 post valve closed
8/24/2011	5:48:52 PM	Bypass valve closed
8/24/2011	5:48:52 PM	Bubbler valve closed
8/24/2011	5:48:52 PM	Main Vac valve opened
8/24/2011	5:48:52 PM	Helium MFC set to  0.000000
8/24/2011	5:48:52 PM	H2 MFC set to  0.000000
8/24/2011	5:48:52 PM	BCl3 MFC set to  0.000000
8/24/2011	5:48:52 PM	PHl3 MFC set to  0.000000
8/24/2011	5:48:52 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:48:52 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:48:52 PM	Tube furnace set to 150
8/24/2011	5:49:22 PM	H2 valve closed
8/24/2011	5:49:22 PM	BCl3 valve closed
8/24/2011	5:49:22 PM	PH3 valve closed
8/24/2011	5:49:22 PM	SiCl4 pre valve closed
8/24/2011	5:49:22 PM	SiCl4 post valve closed
8/24/2011	5:49:22 PM	Bypass valve closed
8/24/2011	5:49:22 PM	Bubbler valve closed
8/24/2011	5:49:22 PM	Helium valve opened
8/24/2011	5:49:22 PM	Main Vac valve opened
8/24/2011	5:49:22 PM	Helium MFC set to  20.000000
8/24/2011	5:49:22 PM	H2 MFC set to  0.000000
8/24/2011	5:49:22 PM	BCl3 MFC set to  0.000000
8/24/2011	5:49:22 PM	PHl3 MFC set to  0.000000
8/24/2011	5:49:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:49:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:49:23 PM	Tube furnace set to 150
8/24/2011	5:49:53 PM	Helium valve closed
8/24/2011	5:49:53 PM	H2 valve closed
8/24/2011	5:49:53 PM	BCl3 valve closed
8/24/2011	5:49:53 PM	PH3 valve closed
8/24/2011	5:49:53 PM	SiCl4 pre valve closed
8/24/2011	5:49:53 PM	SiCl4 post valve closed
8/24/2011	5:49:53 PM	Bypass valve closed
8/24/2011	5:49:53 PM	Bubbler valve closed
8/24/2011	5:49:53 PM	Main Vac valve opened
8/24/2011	5:49:53 PM	Helium MFC set to  0.000000
8/24/2011	5:49:53 PM	H2 MFC set to  0.000000
8/24/2011	5:49:53 PM	BCl3 MFC set to  0.000000
8/24/2011	5:49:53 PM	PHl3 MFC set to  0.000000
8/24/2011	5:49:53 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:49:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:49:53 PM	Tube furnace set to 150
8/24/2011	5:50:23 PM	H2 valve closed
8/24/2011	5:50:23 PM	BCl3 valve closed
8/24/2011	5:50:23 PM	PH3 valve closed
8/24/2011	5:50:23 PM	SiCl4 pre valve closed
8/24/2011	5:50:23 PM	SiCl4 post valve closed
8/24/2011	5:50:23 PM	Bypass valve closed
8/24/2011	5:50:23 PM	Bubbler valve closed
8/24/2011	5:50:23 PM	Helium valve opened
8/24/2011	5:50:23 PM	Main Vac valve opened
8/24/2011	5:50:23 PM	Helium MFC set to  20.000000
8/24/2011	5:50:23 PM	H2 MFC set to  0.000000
8/24/2011	5:50:23 PM	BCl3 MFC set to  0.000000
8/24/2011	5:50:23 PM	PHl3 MFC set to  0.000000
8/24/2011	5:50:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:50:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:50:23 PM	Tube furnace set to 150
8/24/2011	5:50:53 PM	Helium valve closed
8/24/2011	5:50:53 PM	H2 valve closed
8/24/2011	5:50:53 PM	BCl3 valve closed
8/24/2011	5:50:53 PM	PH3 valve closed
8/24/2011	5:50:53 PM	SiCl4 pre valve closed
8/24/2011	5:50:53 PM	SiCl4 post valve closed
8/24/2011	5:50:53 PM	Bypass valve closed
8/24/2011	5:50:53 PM	Bubbler valve closed
8/24/2011	5:50:53 PM	Main Vac valve opened
8/24/2011	5:50:53 PM	Helium MFC set to  0.000000
8/24/2011	5:50:53 PM	H2 MFC set to  0.000000
8/24/2011	5:50:53 PM	BCl3 MFC set to  0.000000
8/24/2011	5:50:53 PM	PHl3 MFC set to  0.000000
8/24/2011	5:50:53 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:50:53 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:50:53 PM	Tube furnace set to 150
8/24/2011	5:51:23 PM	H2 valve closed
8/24/2011	5:51:23 PM	BCl3 valve closed
8/24/2011	5:51:23 PM	PH3 valve closed
8/24/2011	5:51:23 PM	SiCl4 pre valve closed
8/24/2011	5:51:23 PM	SiCl4 post valve closed
8/24/2011	5:51:23 PM	Bypass valve closed
8/24/2011	5:51:23 PM	Bubbler valve closed
8/24/2011	5:51:23 PM	Helium valve opened
8/24/2011	5:51:23 PM	Main Vac valve opened
8/24/2011	5:51:23 PM	Helium MFC set to  20.000000
8/24/2011	5:51:23 PM	H2 MFC set to  0.000000
8/24/2011	5:51:23 PM	BCl3 MFC set to  0.000000
8/24/2011	5:51:23 PM	PHl3 MFC set to  0.000000
8/24/2011	5:51:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:51:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:51:23 PM	Tube furnace set to 150
8/24/2011	5:51:53 PM	Helium valve closed
8/24/2011	5:51:53 PM	H2 valve closed
8/24/2011	5:51:53 PM	BCl3 valve closed
8/24/2011	5:51:53 PM	PH3 valve closed
8/24/2011	5:51:53 PM	SiCl4 pre valve closed
8/24/2011	5:51:54 PM	SiCl4 post valve closed
8/24/2011	5:51:54 PM	Bypass valve closed
8/24/2011	5:51:54 PM	Bubbler valve closed
8/24/2011	5:51:54 PM	Main Vac valve opened
8/24/2011	5:51:54 PM	Helium MFC set to  0.000000
8/24/2011	5:51:54 PM	H2 MFC set to  0.000000
8/24/2011	5:51:54 PM	BCl3 MFC set to  0.000000
8/24/2011	5:51:54 PM	PHl3 MFC set to  0.000000
8/24/2011	5:51:54 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:51:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:51:54 PM	Tube furnace set to 150
8/24/2011	5:52:24 PM	H2 valve closed
8/24/2011	5:52:24 PM	BCl3 valve closed
8/24/2011	5:52:24 PM	PH3 valve closed
8/24/2011	5:52:24 PM	SiCl4 pre valve closed
8/24/2011	5:52:24 PM	SiCl4 post valve closed
8/24/2011	5:52:24 PM	Bypass valve closed
8/24/2011	5:52:24 PM	Bubbler valve closed
8/24/2011	5:52:24 PM	Helium valve opened
8/24/2011	5:52:24 PM	Main Vac valve opened
8/24/2011	5:52:24 PM	Helium MFC set to  20.000000
8/24/2011	5:52:24 PM	H2 MFC set to  0.000000
8/24/2011	5:52:24 PM	BCl3 MFC set to  0.000000
8/24/2011	5:52:24 PM	PHl3 MFC set to  0.000000
8/24/2011	5:52:24 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:52:24 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:52:24 PM	Tube furnace set to 150
8/24/2011	5:52:54 PM	Helium valve closed
8/24/2011	5:52:54 PM	H2 valve closed
8/24/2011	5:52:54 PM	BCl3 valve closed
8/24/2011	5:52:54 PM	PH3 valve closed
8/24/2011	5:52:54 PM	SiCl4 pre valve closed
8/24/2011	5:52:54 PM	SiCl4 post valve closed
8/24/2011	5:52:54 PM	Bypass valve closed
8/24/2011	5:52:54 PM	Bubbler valve closed
8/24/2011	5:52:54 PM	Main Vac valve opened
8/24/2011	5:52:54 PM	Helium MFC set to  0.000000
8/24/2011	5:52:54 PM	H2 MFC set to  0.000000
8/24/2011	5:52:54 PM	BCl3 MFC set to  0.000000
8/24/2011	5:52:54 PM	PHl3 MFC set to  0.000000
8/24/2011	5:52:54 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:52:54 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:52:54 PM	Tube furnace set to 150
8/24/2011	5:52:55 PM	Run finished at 5:52 PM
8/24/2011	5:56:58 PM	Recipe started at 5:56 PM
8/24/2011	5:56:58 PM	Helium valve closed
8/24/2011	5:56:58 PM	H2 valve closed
8/24/2011	5:56:58 PM	BCl3 valve closed
8/24/2011	5:56:58 PM	PH3 valve closed
8/24/2011	5:56:58 PM	SiCl4 pre valve closed
8/24/2011	5:56:58 PM	SiCl4 post valve closed
8/24/2011	5:56:58 PM	Bypass valve closed
8/24/2011	5:56:58 PM	Bubbler valve closed
8/24/2011	5:56:58 PM	Main Vac valve opened
8/24/2011	5:56:58 PM	Helium MFC set to  0.000000
8/24/2011	5:56:58 PM	H2 MFC set to  0.000000
8/24/2011	5:56:58 PM	BCl3 MFC set to  0.000000
8/24/2011	5:56:58 PM	PHl3 MFC set to  0.000000
8/24/2011	5:56:58 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:56:58 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:56:58 PM	Tube furnace set to 150
8/24/2011	5:57:00 PM	H2 valve closed
8/24/2011	5:57:00 PM	BCl3 valve closed
8/24/2011	5:57:00 PM	PH3 valve closed
8/24/2011	5:57:00 PM	SiCl4 pre valve closed
8/24/2011	5:57:00 PM	SiCl4 post valve closed
8/24/2011	5:57:00 PM	Bypass valve closed
8/24/2011	5:57:00 PM	Bubbler valve closed
8/24/2011	5:57:00 PM	Helium valve opened
8/24/2011	5:57:00 PM	Main Vac valve opened
8/24/2011	5:57:00 PM	Helium MFC set to  20.000000
8/24/2011	5:57:00 PM	H2 MFC set to  0.000000
8/24/2011	5:57:00 PM	BCl3 MFC set to  0.000000
8/24/2011	5:57:00 PM	PHl3 MFC set to  0.000000
8/24/2011	5:57:00 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:57:00 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:57:00 PM	Tube furnace set to 150
8/24/2011	5:57:30 PM	Helium valve closed
8/24/2011	5:57:30 PM	H2 valve closed
8/24/2011	5:57:30 PM	BCl3 valve closed
8/24/2011	5:57:30 PM	PH3 valve closed
8/24/2011	5:57:30 PM	SiCl4 pre valve closed
8/24/2011	5:57:30 PM	SiCl4 post valve closed
8/24/2011	5:57:30 PM	Bypass valve closed
8/24/2011	5:57:30 PM	Bubbler valve closed
8/24/2011	5:57:30 PM	Main Vac valve opened
8/24/2011	5:57:30 PM	Helium MFC set to  0.000000
8/24/2011	5:57:30 PM	H2 MFC set to  0.000000
8/24/2011	5:57:30 PM	BCl3 MFC set to  0.000000
8/24/2011	5:57:30 PM	PHl3 MFC set to  0.000000
8/24/2011	5:57:30 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:57:30 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:57:31 PM	Tube furnace set to 150
8/24/2011	5:58:01 PM	H2 valve closed
8/24/2011	5:58:01 PM	BCl3 valve closed
8/24/2011	5:58:01 PM	PH3 valve closed
8/24/2011	5:58:01 PM	SiCl4 pre valve closed
8/24/2011	5:58:01 PM	SiCl4 post valve closed
8/24/2011	5:58:01 PM	Bypass valve closed
8/24/2011	5:58:01 PM	Bubbler valve closed
8/24/2011	5:58:01 PM	Helium valve opened
8/24/2011	5:58:01 PM	Main Vac valve opened
8/24/2011	5:58:01 PM	Helium MFC set to  20.000000
8/24/2011	5:58:01 PM	H2 MFC set to  0.000000
8/24/2011	5:58:01 PM	BCl3 MFC set to  0.000000
8/24/2011	5:58:01 PM	PHl3 MFC set to  0.000000
8/24/2011	5:58:01 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:58:01 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:58:01 PM	Tube furnace set to 150
8/24/2011	5:58:31 PM	Helium valve closed
8/24/2011	5:58:31 PM	H2 valve closed
8/24/2011	5:58:31 PM	BCl3 valve closed
8/24/2011	5:58:31 PM	PH3 valve closed
8/24/2011	5:58:31 PM	SiCl4 pre valve closed
8/24/2011	5:58:31 PM	SiCl4 post valve closed
8/24/2011	5:58:31 PM	Bypass valve closed
8/24/2011	5:58:31 PM	Bubbler valve closed
8/24/2011	5:58:31 PM	Main Vac valve opened
8/24/2011	5:58:31 PM	Helium MFC set to  0.000000
8/24/2011	5:58:31 PM	H2 MFC set to  0.000000
8/24/2011	5:58:31 PM	BCl3 MFC set to  0.000000
8/24/2011	5:58:31 PM	PHl3 MFC set to  0.000000
8/24/2011	5:58:31 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:58:31 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:58:31 PM	Tube furnace set to 150
8/24/2011	5:59:01 PM	H2 valve closed
8/24/2011	5:59:01 PM	BCl3 valve closed
8/24/2011	5:59:01 PM	PH3 valve closed
8/24/2011	5:59:01 PM	SiCl4 pre valve closed
8/24/2011	5:59:01 PM	SiCl4 post valve closed
8/24/2011	5:59:01 PM	Bypass valve closed
8/24/2011	5:59:01 PM	Bubbler valve closed
8/24/2011	5:59:01 PM	Helium valve opened
8/24/2011	5:59:01 PM	Main Vac valve opened
8/24/2011	5:59:01 PM	Helium MFC set to  20.000000
8/24/2011	5:59:01 PM	H2 MFC set to  0.000000
8/24/2011	5:59:01 PM	BCl3 MFC set to  0.000000
8/24/2011	5:59:01 PM	PHl3 MFC set to  0.000000
8/24/2011	5:59:01 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:59:01 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:59:01 PM	Tube furnace set to 150
8/24/2011	5:59:31 PM	Helium valve closed
8/24/2011	5:59:31 PM	H2 valve closed
8/24/2011	5:59:31 PM	BCl3 valve closed
8/24/2011	5:59:31 PM	PH3 valve closed
8/24/2011	5:59:31 PM	SiCl4 pre valve closed
8/24/2011	5:59:31 PM	SiCl4 post valve closed
8/24/2011	5:59:31 PM	Bypass valve closed
8/24/2011	5:59:31 PM	Bubbler valve closed
8/24/2011	5:59:31 PM	Main Vac valve opened
8/24/2011	5:59:31 PM	Helium MFC set to  0.000000
8/24/2011	5:59:31 PM	H2 MFC set to  0.000000
8/24/2011	5:59:31 PM	BCl3 MFC set to  0.000000
8/24/2011	5:59:31 PM	PHl3 MFC set to  0.000000
8/24/2011	5:59:31 PM	SiCl4 MFC set to  0.000000
8/24/2011	5:59:31 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	5:59:31 PM	Tube furnace set to 150
8/24/2011	6:00:01 PM	H2 valve closed
8/24/2011	6:00:01 PM	BCl3 valve closed
8/24/2011	6:00:01 PM	PH3 valve closed
8/24/2011	6:00:01 PM	SiCl4 pre valve closed
8/24/2011	6:00:01 PM	SiCl4 post valve closed
8/24/2011	6:00:01 PM	Bypass valve closed
8/24/2011	6:00:01 PM	Bubbler valve closed
8/24/2011	6:00:01 PM	Helium valve opened
8/24/2011	6:00:01 PM	Main Vac valve opened
8/24/2011	6:00:01 PM	Helium MFC set to  20.000000
8/24/2011	6:00:01 PM	H2 MFC set to  0.000000
8/24/2011	6:00:01 PM	BCl3 MFC set to  0.000000
8/24/2011	6:00:01 PM	PHl3 MFC set to  0.000000
8/24/2011	6:00:01 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:00:01 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:00:02 PM	Tube furnace set to 150
8/24/2011	6:00:32 PM	Helium valve closed
8/24/2011	6:00:32 PM	H2 valve closed
8/24/2011	6:00:32 PM	BCl3 valve closed
8/24/2011	6:00:32 PM	PH3 valve closed
8/24/2011	6:00:32 PM	SiCl4 pre valve closed
8/24/2011	6:00:32 PM	SiCl4 post valve closed
8/24/2011	6:00:32 PM	Bypass valve closed
8/24/2011	6:00:32 PM	Bubbler valve closed
8/24/2011	6:00:32 PM	Main Vac valve opened
8/24/2011	6:00:32 PM	Helium MFC set to  0.000000
8/24/2011	6:00:32 PM	H2 MFC set to  0.000000
8/24/2011	6:00:32 PM	BCl3 MFC set to  0.000000
8/24/2011	6:00:32 PM	PHl3 MFC set to  0.000000
8/24/2011	6:00:32 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:00:32 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:00:32 PM	Tube furnace set to 150
8/24/2011	6:01:02 PM	H2 valve closed
8/24/2011	6:01:02 PM	BCl3 valve closed
8/24/2011	6:01:02 PM	PH3 valve closed
8/24/2011	6:01:02 PM	SiCl4 pre valve closed
8/24/2011	6:01:02 PM	SiCl4 post valve closed
8/24/2011	6:01:02 PM	Bypass valve closed
8/24/2011	6:01:02 PM	Bubbler valve closed
8/24/2011	6:01:02 PM	Helium valve opened
8/24/2011	6:01:02 PM	Main Vac valve opened
8/24/2011	6:01:02 PM	Helium MFC set to  20.000000
8/24/2011	6:01:02 PM	H2 MFC set to  0.000000
8/24/2011	6:01:02 PM	BCl3 MFC set to  0.000000
8/24/2011	6:01:02 PM	PHl3 MFC set to  0.000000
8/24/2011	6:01:02 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:01:02 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:01:02 PM	Tube furnace set to 150
8/24/2011	6:01:32 PM	Helium valve closed
8/24/2011	6:01:32 PM	H2 valve closed
8/24/2011	6:01:32 PM	BCl3 valve closed
8/24/2011	6:01:32 PM	PH3 valve closed
8/24/2011	6:01:32 PM	SiCl4 pre valve closed
8/24/2011	6:01:32 PM	SiCl4 post valve closed
8/24/2011	6:01:32 PM	Bypass valve closed
8/24/2011	6:01:32 PM	Bubbler valve closed
8/24/2011	6:01:32 PM	Main Vac valve opened
8/24/2011	6:01:32 PM	Helium MFC set to  0.000000
8/24/2011	6:01:32 PM	H2 MFC set to  0.000000
8/24/2011	6:01:32 PM	BCl3 MFC set to  0.000000
8/24/2011	6:01:32 PM	PHl3 MFC set to  0.000000
8/24/2011	6:01:32 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:01:32 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:01:32 PM	Tube furnace set to 150
8/24/2011	6:02:02 PM	H2 valve closed
8/24/2011	6:02:02 PM	BCl3 valve closed
8/24/2011	6:02:02 PM	PH3 valve closed
8/24/2011	6:02:02 PM	SiCl4 pre valve closed
8/24/2011	6:02:02 PM	SiCl4 post valve closed
8/24/2011	6:02:02 PM	Bypass valve closed
8/24/2011	6:02:02 PM	Bubbler valve closed
8/24/2011	6:02:02 PM	Helium valve opened
8/24/2011	6:02:02 PM	Main Vac valve opened
8/24/2011	6:02:02 PM	Helium MFC set to  20.000000
8/24/2011	6:02:02 PM	H2 MFC set to  0.000000
8/24/2011	6:02:02 PM	BCl3 MFC set to  0.000000
8/24/2011	6:02:02 PM	PHl3 MFC set to  0.000000
8/24/2011	6:02:02 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:02:02 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:02:02 PM	Tube furnace set to 150
8/24/2011	6:02:32 PM	Helium valve closed
8/24/2011	6:02:32 PM	H2 valve closed
8/24/2011	6:02:32 PM	BCl3 valve closed
8/24/2011	6:02:32 PM	PH3 valve closed
8/24/2011	6:02:32 PM	SiCl4 pre valve closed
8/24/2011	6:02:32 PM	SiCl4 post valve closed
8/24/2011	6:02:33 PM	Bypass valve closed
8/24/2011	6:02:33 PM	Bubbler valve closed
8/24/2011	6:02:33 PM	Main Vac valve opened
8/24/2011	6:02:33 PM	Helium MFC set to  0.000000
8/24/2011	6:02:33 PM	H2 MFC set to  0.000000
8/24/2011	6:02:33 PM	BCl3 MFC set to  0.000000
8/24/2011	6:02:33 PM	PHl3 MFC set to  0.000000
8/24/2011	6:02:33 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:02:33 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:02:33 PM	Tube furnace set to 150
8/24/2011	6:03:03 PM	H2 valve closed
8/24/2011	6:03:03 PM	BCl3 valve closed
8/24/2011	6:03:03 PM	PH3 valve closed
8/24/2011	6:03:03 PM	SiCl4 pre valve closed
8/24/2011	6:03:03 PM	SiCl4 post valve closed
8/24/2011	6:03:03 PM	Bypass valve closed
8/24/2011	6:03:03 PM	Bubbler valve closed
8/24/2011	6:03:03 PM	Helium valve opened
8/24/2011	6:03:03 PM	Main Vac valve opened
8/24/2011	6:03:03 PM	Helium MFC set to  20.000000
8/24/2011	6:03:03 PM	H2 MFC set to  0.000000
8/24/2011	6:03:03 PM	BCl3 MFC set to  0.000000
8/24/2011	6:03:03 PM	PHl3 MFC set to  0.000000
8/24/2011	6:03:03 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:03:03 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:03:03 PM	Tube furnace set to 150
8/24/2011	6:03:33 PM	Helium valve closed
8/24/2011	6:03:33 PM	H2 valve closed
8/24/2011	6:03:33 PM	BCl3 valve closed
8/24/2011	6:03:33 PM	PH3 valve closed
8/24/2011	6:03:33 PM	SiCl4 pre valve closed
8/24/2011	6:03:33 PM	SiCl4 post valve closed
8/24/2011	6:03:33 PM	Bypass valve closed
8/24/2011	6:03:33 PM	Bubbler valve closed
8/24/2011	6:03:33 PM	Main Vac valve opened
8/24/2011	6:03:33 PM	Helium MFC set to  0.000000
8/24/2011	6:03:33 PM	H2 MFC set to  0.000000
8/24/2011	6:03:33 PM	BCl3 MFC set to  0.000000
8/24/2011	6:03:33 PM	PHl3 MFC set to  0.000000
8/24/2011	6:03:33 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:03:33 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:03:33 PM	Tube furnace set to 150
8/24/2011	6:04:03 PM	H2 valve closed
8/24/2011	6:04:03 PM	BCl3 valve closed
8/24/2011	6:04:03 PM	PH3 valve closed
8/24/2011	6:04:03 PM	SiCl4 pre valve closed
8/24/2011	6:04:03 PM	SiCl4 post valve closed
8/24/2011	6:04:03 PM	Bypass valve closed
8/24/2011	6:04:03 PM	Bubbler valve closed
8/24/2011	6:04:03 PM	Helium valve opened
8/24/2011	6:04:03 PM	Main Vac valve opened
8/24/2011	6:04:03 PM	Helium MFC set to  20.000000
8/24/2011	6:04:03 PM	H2 MFC set to  0.000000
8/24/2011	6:04:03 PM	BCl3 MFC set to  0.000000
8/24/2011	6:04:03 PM	PHl3 MFC set to  0.000000
8/24/2011	6:04:03 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:04:03 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:04:03 PM	Tube furnace set to 150
8/24/2011	6:04:33 PM	Helium valve closed
8/24/2011	6:04:33 PM	H2 valve closed
8/24/2011	6:04:33 PM	BCl3 valve closed
8/24/2011	6:04:33 PM	PH3 valve closed
8/24/2011	6:04:33 PM	SiCl4 pre valve closed
8/24/2011	6:04:33 PM	SiCl4 post valve closed
8/24/2011	6:04:33 PM	Bypass valve closed
8/24/2011	6:04:33 PM	Bubbler valve closed
8/24/2011	6:04:33 PM	Main Vac valve opened
8/24/2011	6:04:33 PM	Helium MFC set to  0.000000
8/24/2011	6:04:33 PM	H2 MFC set to  0.000000
8/24/2011	6:04:33 PM	BCl3 MFC set to  0.000000
8/24/2011	6:04:33 PM	PHl3 MFC set to  0.000000
8/24/2011	6:04:33 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:04:33 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:04:34 PM	Tube furnace set to 150
8/24/2011	6:05:04 PM	H2 valve closed
8/24/2011	6:05:04 PM	BCl3 valve closed
8/24/2011	6:05:04 PM	PH3 valve closed
8/24/2011	6:05:04 PM	SiCl4 pre valve closed
8/24/2011	6:05:04 PM	SiCl4 post valve closed
8/24/2011	6:05:04 PM	Bypass valve closed
8/24/2011	6:05:04 PM	Bubbler valve closed
8/24/2011	6:05:04 PM	Helium valve opened
8/24/2011	6:05:04 PM	Main Vac valve opened
8/24/2011	6:05:04 PM	Helium MFC set to  20.000000
8/24/2011	6:05:04 PM	H2 MFC set to  0.000000
8/24/2011	6:05:04 PM	BCl3 MFC set to  0.000000
8/24/2011	6:05:04 PM	PHl3 MFC set to  0.000000
8/24/2011	6:05:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:05:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:05:04 PM	Tube furnace set to 150
8/24/2011	6:05:34 PM	Helium valve closed
8/24/2011	6:05:34 PM	H2 valve closed
8/24/2011	6:05:34 PM	BCl3 valve closed
8/24/2011	6:05:34 PM	PH3 valve closed
8/24/2011	6:05:34 PM	SiCl4 pre valve closed
8/24/2011	6:05:34 PM	SiCl4 post valve closed
8/24/2011	6:05:34 PM	Bypass valve closed
8/24/2011	6:05:34 PM	Bubbler valve closed
8/24/2011	6:05:34 PM	Main Vac valve opened
8/24/2011	6:05:34 PM	Helium MFC set to  0.000000
8/24/2011	6:05:34 PM	H2 MFC set to  0.000000
8/24/2011	6:05:34 PM	BCl3 MFC set to  0.000000
8/24/2011	6:05:34 PM	PHl3 MFC set to  0.000000
8/24/2011	6:05:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:05:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:05:34 PM	Tube furnace set to 150
8/24/2011	6:06:04 PM	H2 valve closed
8/24/2011	6:06:04 PM	BCl3 valve closed
8/24/2011	6:06:04 PM	PH3 valve closed
8/24/2011	6:06:04 PM	SiCl4 pre valve closed
8/24/2011	6:06:04 PM	SiCl4 post valve closed
8/24/2011	6:06:04 PM	Bypass valve closed
8/24/2011	6:06:04 PM	Bubbler valve closed
8/24/2011	6:06:04 PM	Helium valve opened
8/24/2011	6:06:04 PM	Main Vac valve opened
8/24/2011	6:06:04 PM	Helium MFC set to  20.000000
8/24/2011	6:06:04 PM	H2 MFC set to  0.000000
8/24/2011	6:06:04 PM	BCl3 MFC set to  0.000000
8/24/2011	6:06:04 PM	PHl3 MFC set to  0.000000
8/24/2011	6:06:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:06:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:06:04 PM	Tube furnace set to 150
8/24/2011	6:06:34 PM	Helium valve closed
8/24/2011	6:06:34 PM	H2 valve closed
8/24/2011	6:06:34 PM	BCl3 valve closed
8/24/2011	6:06:34 PM	PH3 valve closed
8/24/2011	6:06:34 PM	SiCl4 pre valve closed
8/24/2011	6:06:34 PM	SiCl4 post valve closed
8/24/2011	6:06:34 PM	Bypass valve closed
8/24/2011	6:06:34 PM	Bubbler valve closed
8/24/2011	6:06:34 PM	Main Vac valve opened
8/24/2011	6:06:34 PM	Helium MFC set to  0.000000
8/24/2011	6:06:34 PM	H2 MFC set to  0.000000
8/24/2011	6:06:34 PM	BCl3 MFC set to  0.000000
8/24/2011	6:06:34 PM	PHl3 MFC set to  0.000000
8/24/2011	6:06:34 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:06:34 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:06:34 PM	Tube furnace set to 150
8/24/2011	6:06:35 PM	Run finished at 6:06 PM
8/24/2011	6:09:34 PM	Main Vac valve closed
8/24/2011	6:09:57 PM	Main Vac valve opened
8/24/2011	6:11:14 PM	Recipe started at 6:11 PM
8/24/2011	6:11:14 PM	Helium valve closed
8/24/2011	6:11:14 PM	H2 valve closed
8/24/2011	6:11:14 PM	BCl3 valve closed
8/24/2011	6:11:14 PM	PH3 valve closed
8/24/2011	6:11:14 PM	SiCl4 pre valve closed
8/24/2011	6:11:14 PM	SiCl4 post valve closed
8/24/2011	6:11:14 PM	Main Vac valve closed
8/24/2011	6:11:14 PM	Bypass valve closed
8/24/2011	6:11:14 PM	Bubbler valve closed
8/24/2011	6:11:14 PM	Helium MFC set to  0.000000
8/24/2011	6:11:14 PM	H2 MFC set to  0.000000
8/24/2011	6:11:14 PM	BCl3 MFC set to  0.000000
8/24/2011	6:11:14 PM	PHl3 MFC set to  0.000000
8/24/2011	6:11:14 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:11:14 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:11:14 PM	Tube furnace set to 0
8/24/2011	6:11:17 PM	Helium valve closed
8/24/2011	6:11:17 PM	BCl3 valve closed
8/24/2011	6:11:17 PM	PH3 valve closed
8/24/2011	6:11:17 PM	SiCl4 pre valve closed
8/24/2011	6:11:17 PM	SiCl4 post valve closed
8/24/2011	6:11:17 PM	Main Vac valve closed
8/24/2011	6:11:17 PM	Bypass valve closed
8/24/2011	6:11:17 PM	Bubbler valve closed
8/24/2011	6:11:17 PM	H2 valve opened
8/24/2011	6:11:17 PM	Helium MFC set to  0.000000
8/24/2011	6:11:17 PM	H2 MFC set to  500.000000
8/24/2011	6:11:17 PM	BCl3 MFC set to  0.000000
8/24/2011	6:11:17 PM	PHl3 MFC set to  0.000000
8/24/2011	6:11:17 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:11:17 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:11:17 PM	Tube furnace set to 0
8/24/2011	6:12:21 PM	Helium valve closed
8/24/2011	6:12:21 PM	BCl3 valve closed
8/24/2011	6:12:21 PM	PH3 valve closed
8/24/2011	6:12:21 PM	SiCl4 pre valve closed
8/24/2011	6:12:21 PM	SiCl4 post valve closed
8/24/2011	6:12:21 PM	Main Vac valve closed
8/24/2011	6:12:21 PM	Bypass valve closed
8/24/2011	6:12:21 PM	H2 valve opened
8/24/2011	6:12:21 PM	Bubbler valve opened
8/24/2011	6:12:21 PM	Helium MFC set to  0.000000
8/24/2011	6:12:21 PM	H2 MFC set to  500.000000
8/24/2011	6:12:21 PM	BCl3 MFC set to  0.000000
8/24/2011	6:12:21 PM	PHl3 MFC set to  0.000000
8/24/2011	6:12:21 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:12:21 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:12:21 PM	Tube furnace set to 0
8/24/2011	6:12:22 PM	Helium valve closed
8/24/2011	6:12:22 PM	BCl3 valve closed
8/24/2011	6:12:22 PM	PH3 valve closed
8/24/2011	6:12:22 PM	SiCl4 pre valve closed
8/24/2011	6:12:22 PM	SiCl4 post valve closed
8/24/2011	6:12:22 PM	Main Vac valve closed
8/24/2011	6:12:22 PM	Bypass valve closed
8/24/2011	6:12:22 PM	H2 valve opened
8/24/2011	6:12:22 PM	Bubbler valve opened
8/24/2011	6:12:22 PM	Helium MFC set to  0.000000
8/24/2011	6:12:22 PM	H2 MFC set to  500.000000
8/24/2011	6:12:22 PM	BCl3 MFC set to  0.000000
8/24/2011	6:12:22 PM	PHl3 MFC set to  0.000000
8/24/2011	6:12:22 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:12:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:12:22 PM	Tube furnace set to 1000
8/24/2011	6:32:22 PM	Helium valve closed
8/24/2011	6:32:22 PM	PH3 valve closed
8/24/2011	6:32:22 PM	Main Vac valve closed
8/24/2011	6:32:22 PM	Bypass valve closed
8/24/2011	6:32:22 PM	H2 valve opened
8/24/2011	6:32:22 PM	BCl3 valve opened
8/24/2011	6:32:22 PM	SiCl4 pre valve opened
8/24/2011	6:32:22 PM	SiCl4 post valve opened
8/24/2011	6:32:22 PM	Bubbler valve opened
8/24/2011	6:32:22 PM	Helium MFC set to  0.000000
8/24/2011	6:32:22 PM	H2 MFC set to  500.000000
8/24/2011	6:32:22 PM	BCl3 MFC set to  2.500000
8/24/2011	6:32:22 PM	PHl3 MFC set to  0.000000
8/24/2011	6:32:22 PM	SiCl4 MFC set to  50.000000
8/24/2011	6:32:22 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:32:23 PM	Tube furnace set to 1000
8/24/2011	6:52:22 PM	Helium valve closed
8/24/2011	6:52:22 PM	BCl3 valve closed
8/24/2011	6:52:22 PM	PH3 valve closed
8/24/2011	6:52:22 PM	SiCl4 pre valve closed
8/24/2011	6:52:22 PM	SiCl4 post valve closed
8/24/2011	6:52:23 PM	Main Vac valve closed
8/24/2011	6:52:23 PM	Bypass valve closed
8/24/2011	6:52:23 PM	H2 valve opened
8/24/2011	6:52:23 PM	Bubbler valve opened
8/24/2011	6:52:23 PM	Helium MFC set to  0.000000
8/24/2011	6:52:23 PM	H2 MFC set to  500.000000
8/24/2011	6:52:23 PM	BCl3 MFC set to  0.000000
8/24/2011	6:52:23 PM	PHl3 MFC set to  0.000000
8/24/2011	6:52:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:52:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:52:23 PM	Tube furnace set to 750
8/24/2011	6:57:23 PM	H2 valve closed
8/24/2011	6:57:23 PM	BCl3 valve closed
8/24/2011	6:57:23 PM	PH3 valve closed
8/24/2011	6:57:23 PM	SiCl4 pre valve closed
8/24/2011	6:57:23 PM	SiCl4 post valve closed
8/24/2011	6:57:23 PM	Main Vac valve closed
8/24/2011	6:57:23 PM	Bypass valve closed
8/24/2011	6:57:23 PM	Helium valve opened
8/24/2011	6:57:23 PM	Bubbler valve opened
8/24/2011	6:57:23 PM	Helium MFC set to  500.000000
8/24/2011	6:57:23 PM	H2 MFC set to  0.000000
8/24/2011	6:57:23 PM	BCl3 MFC set to  0.000000
8/24/2011	6:57:23 PM	PHl3 MFC set to  0.000000
8/24/2011	6:57:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	6:57:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	6:57:23 PM	Tube furnace set to 0
8/24/2011	7:17:23 PM	Helium valve closed
8/24/2011	7:17:23 PM	H2 valve closed
8/24/2011	7:17:23 PM	BCl3 valve closed
8/24/2011	7:17:23 PM	PH3 valve closed
8/24/2011	7:17:23 PM	SiCl4 pre valve closed
8/24/2011	7:17:23 PM	SiCl4 post valve closed
8/24/2011	7:17:23 PM	Main Vac valve closed
8/24/2011	7:17:23 PM	Bypass valve closed
8/24/2011	7:17:23 PM	Bubbler valve closed
8/24/2011	7:17:23 PM	Helium MFC set to  0.000000
8/24/2011	7:17:23 PM	H2 MFC set to  0.000000
8/24/2011	7:17:23 PM	BCl3 MFC set to  0.000000
8/24/2011	7:17:23 PM	PHl3 MFC set to  0.000000
8/24/2011	7:17:23 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:17:23 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:17:23 PM	Tube furnace set to 0
8/24/2011	7:17:24 PM	Run finished at 7:17 PM
8/24/2011	7:31:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	7:31:05 PM	Recipe started at 7:31 PM
8/24/2011	7:31:05 PM	Helium valve closed
8/24/2011	7:31:05 PM	H2 valve closed
8/24/2011	7:31:05 PM	BCl3 valve closed
8/24/2011	7:31:05 PM	PH3 valve closed
8/24/2011	7:31:05 PM	SiCl4 pre valve closed
8/24/2011	7:31:05 PM	SiCl4 post valve closed
8/24/2011	7:31:05 PM	Main Vac valve closed
8/24/2011	7:31:05 PM	Bypass valve closed
8/24/2011	7:31:05 PM	Bubbler valve closed
8/24/2011	7:31:05 PM	Helium MFC set to  0.000000
8/24/2011	7:31:05 PM	H2 MFC set to  0.000000
8/24/2011	7:31:05 PM	BCl3 MFC set to  0.000000
8/24/2011	7:31:05 PM	PHl3 MFC set to  0.000000
8/24/2011	7:31:05 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:31:05 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:31:06 PM	Tube furnace set to 0
8/24/2011	7:31:09 PM	H2 valve closed
8/24/2011	7:31:09 PM	BCl3 valve closed
8/24/2011	7:31:09 PM	PH3 valve closed
8/24/2011	7:31:09 PM	SiCl4 pre valve closed
8/24/2011	7:31:09 PM	SiCl4 post valve closed
8/24/2011	7:31:09 PM	Main Vac valve closed
8/24/2011	7:31:09 PM	Bypass valve closed
8/24/2011	7:31:09 PM	Bubbler valve closed
8/24/2011	7:31:09 PM	Helium valve opened
8/24/2011	7:31:09 PM	Helium MFC set to  500.000000
8/24/2011	7:31:09 PM	H2 MFC set to  0.000000
8/24/2011	7:31:09 PM	BCl3 MFC set to  0.000000
8/24/2011	7:31:09 PM	PHl3 MFC set to  0.000000
8/24/2011	7:31:09 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:31:09 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:31:09 PM	Tube furnace set to 0
8/24/2011	7:31:13 PM	Helium valve closed
8/24/2011	7:31:13 PM	H2 valve closed
8/24/2011	7:31:13 PM	BCl3 valve closed
8/24/2011	7:31:13 PM	PH3 valve closed
8/24/2011	7:31:13 PM	SiCl4 pre valve closed
8/24/2011	7:31:13 PM	SiCl4 post valve closed
8/24/2011	7:31:13 PM	Main Vac valve closed
8/24/2011	7:31:13 PM	Bypass valve closed
8/24/2011	7:31:13 PM	Bubbler valve closed
8/24/2011	7:31:13 PM	Helium MFC set to  0.000000
8/24/2011	7:31:13 PM	H2 MFC set to  0.000000
8/24/2011	7:31:13 PM	BCl3 MFC set to  0.000000
8/24/2011	7:31:13 PM	PHl3 MFC set to  0.000000
8/24/2011	7:31:13 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:31:13 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:31:13 PM	Tube furnace set to 0
8/24/2011	7:31:14 PM	Run finished at 7:31 PM
8/24/2011	7:31:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	7:33:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	7:33:08 PM	Recipe started at 7:33 PM
8/24/2011	7:33:08 PM	Helium valve closed
8/24/2011	7:33:08 PM	H2 valve closed
8/24/2011	7:33:08 PM	BCl3 valve closed
8/24/2011	7:33:08 PM	PH3 valve closed
8/24/2011	7:33:08 PM	SiCl4 pre valve closed
8/24/2011	7:33:08 PM	SiCl4 post valve closed
8/24/2011	7:33:08 PM	Main Vac valve closed
8/24/2011	7:33:08 PM	Bubbler valve closed
8/24/2011	7:33:08 PM	Bypass valve opened
8/24/2011	7:33:08 PM	Helium MFC set to  0.000000
8/24/2011	7:33:08 PM	H2 MFC set to  0.000000
8/24/2011	7:33:08 PM	BCl3 MFC set to  0.000000
8/24/2011	7:33:08 PM	PHl3 MFC set to  0.000000
8/24/2011	7:33:08 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:33:08 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:33:09 PM	Tube furnace set to 0
8/24/2011	7:34:11 PM	Helium valve closed
8/24/2011	7:34:11 PM	H2 valve closed
8/24/2011	7:34:11 PM	BCl3 valve closed
8/24/2011	7:34:11 PM	PH3 valve closed
8/24/2011	7:34:11 PM	SiCl4 pre valve closed
8/24/2011	7:34:11 PM	SiCl4 post valve closed
8/24/2011	7:34:11 PM	Main Vac valve closed
8/24/2011	7:34:11 PM	Bubbler valve closed
8/24/2011	7:34:11 PM	Bypass valve opened
8/24/2011	7:34:11 PM	Helium MFC set to  0.000000
8/24/2011	7:34:11 PM	H2 MFC set to  0.000000
8/24/2011	7:34:11 PM	BCl3 MFC set to  0.000000
8/24/2011	7:34:11 PM	PHl3 MFC set to  0.000000
8/24/2011	7:34:11 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:34:11 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:34:11 PM	Tube furnace set to 0
8/24/2011	7:35:11 PM	Helium valve closed
8/24/2011	7:35:11 PM	H2 valve closed
8/24/2011	7:35:11 PM	BCl3 valve closed
8/24/2011	7:35:11 PM	PH3 valve closed
8/24/2011	7:35:11 PM	SiCl4 pre valve closed
8/24/2011	7:35:11 PM	SiCl4 post valve closed
8/24/2011	7:35:11 PM	Bypass valve closed
8/24/2011	7:35:11 PM	Bubbler valve closed
8/24/2011	7:35:11 PM	Main Vac valve opened
8/24/2011	7:35:11 PM	Helium MFC set to  0.000000
8/24/2011	7:35:11 PM	H2 MFC set to  0.000000
8/24/2011	7:35:11 PM	BCl3 MFC set to  0.000000
8/24/2011	7:35:11 PM	PHl3 MFC set to  0.000000
8/24/2011	7:35:11 PM	SiCl4 MFC set to  0.000000
8/24/2011	7:35:11 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	7:35:11 PM	Tube furnace set to 0
8/24/2011	7:35:12 PM	Run finished at 7:35 PM
8/24/2011	7:35:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	10:56:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	10:56:04 PM	Recipe started at 10:56 PM
8/24/2011	10:56:04 PM	Helium valve closed
8/24/2011	10:56:04 PM	H2 valve closed
8/24/2011	10:56:04 PM	BCl3 valve closed
8/24/2011	10:56:04 PM	PH3 valve closed
8/24/2011	10:56:04 PM	SiCl4 pre valve closed
8/24/2011	10:56:04 PM	SiCl4 post valve closed
8/24/2011	10:56:04 PM	Main Vac valve closed
8/24/2011	10:56:04 PM	Bypass valve closed
8/24/2011	10:56:04 PM	Bubbler valve closed
8/24/2011	10:56:04 PM	Helium MFC set to  0.000000
8/24/2011	10:56:04 PM	H2 MFC set to  0.000000
8/24/2011	10:56:04 PM	BCl3 MFC set to  0.000000
8/24/2011	10:56:04 PM	PHl3 MFC set to  0.000000
8/24/2011	10:56:04 PM	SiCl4 MFC set to  0.000000
8/24/2011	10:56:04 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:56:04 PM	Tube furnace set to 0
8/24/2011	10:56:07 PM	H2 valve closed
8/24/2011	10:56:07 PM	BCl3 valve closed
8/24/2011	10:56:07 PM	PH3 valve closed
8/24/2011	10:56:07 PM	SiCl4 pre valve closed
8/24/2011	10:56:07 PM	SiCl4 post valve closed
8/24/2011	10:56:07 PM	Main Vac valve closed
8/24/2011	10:56:07 PM	Bypass valve closed
8/24/2011	10:56:07 PM	Bubbler valve closed
8/24/2011	10:56:07 PM	Helium valve opened
8/24/2011	10:56:07 PM	Helium MFC set to  500.000000
8/24/2011	10:56:07 PM	H2 MFC set to  0.000000
8/24/2011	10:56:07 PM	BCl3 MFC set to  0.000000
8/24/2011	10:56:07 PM	PHl3 MFC set to  0.000000
8/24/2011	10:56:07 PM	SiCl4 MFC set to  0.000000
8/24/2011	10:56:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:56:08 PM	Tube furnace set to 0
8/24/2011	10:57:13 PM	Helium valve closed
8/24/2011	10:57:13 PM	H2 valve closed
8/24/2011	10:57:13 PM	BCl3 valve closed
8/24/2011	10:57:13 PM	PH3 valve closed
8/24/2011	10:57:13 PM	SiCl4 pre valve closed
8/24/2011	10:57:13 PM	SiCl4 post valve closed
8/24/2011	10:57:13 PM	Main Vac valve closed
8/24/2011	10:57:13 PM	Bypass valve closed
8/24/2011	10:57:13 PM	Bubbler valve closed
8/24/2011	10:57:13 PM	Helium MFC set to  0.000000
8/24/2011	10:57:13 PM	H2 MFC set to  0.000000
8/24/2011	10:57:13 PM	BCl3 MFC set to  0.000000
8/24/2011	10:57:13 PM	PHl3 MFC set to  0.000000
8/24/2011	10:57:13 PM	SiCl4 MFC set to  0.000000
8/24/2011	10:57:13 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	10:57:13 PM	Tube furnace set to 0
8/24/2011	10:57:14 PM	Run finished at 10:57 PM
8/24/2011	10:57:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/24/2011	11:16:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/24/2011	11:16:55 PM	Recipe started at 11:16 PM
8/24/2011	11:16:55 PM	Helium valve closed
8/24/2011	11:16:55 PM	H2 valve closed
8/24/2011	11:16:55 PM	BCl3 valve closed
8/24/2011	11:16:55 PM	PH3 valve closed
8/24/2011	11:16:55 PM	SiCl4 pre valve closed
8/24/2011	11:16:55 PM	SiCl4 post valve closed
8/24/2011	11:16:55 PM	Main Vac valve closed
8/24/2011	11:16:55 PM	Bubbler valve closed
8/24/2011	11:16:55 PM	Bypass valve opened
8/24/2011	11:16:55 PM	Helium MFC set to  0.000000
8/24/2011	11:16:55 PM	H2 MFC set to  0.000000
8/24/2011	11:16:55 PM	BCl3 MFC set to  0.000000
8/24/2011	11:16:55 PM	PHl3 MFC set to  0.000000
8/24/2011	11:16:55 PM	SiCl4 MFC set to  0.000000
8/24/2011	11:16:55 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:16:55 PM	Tube furnace set to 0
8/24/2011	11:18:07 PM	Helium valve closed
8/24/2011	11:18:07 PM	H2 valve closed
8/24/2011	11:18:07 PM	BCl3 valve closed
8/24/2011	11:18:07 PM	PH3 valve closed
8/24/2011	11:18:07 PM	SiCl4 pre valve closed
8/24/2011	11:18:07 PM	SiCl4 post valve closed
8/24/2011	11:18:07 PM	Main Vac valve closed
8/24/2011	11:18:07 PM	Bubbler valve closed
8/24/2011	11:18:07 PM	Bypass valve opened
8/24/2011	11:18:07 PM	Helium MFC set to  0.000000
8/24/2011	11:18:07 PM	H2 MFC set to  0.000000
8/24/2011	11:18:07 PM	BCl3 MFC set to  0.000000
8/24/2011	11:18:07 PM	PHl3 MFC set to  0.000000
8/24/2011	11:18:07 PM	SiCl4 MFC set to  0.000000
8/24/2011	11:18:07 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:18:08 PM	Tube furnace set to 0
8/24/2011	11:18:12 PM	Helium valve closed
8/24/2011	11:18:12 PM	H2 valve closed
8/24/2011	11:18:12 PM	BCl3 valve closed
8/24/2011	11:18:12 PM	PH3 valve closed
8/24/2011	11:18:12 PM	SiCl4 pre valve closed
8/24/2011	11:18:12 PM	SiCl4 post valve closed
8/24/2011	11:18:12 PM	Bypass valve closed
8/24/2011	11:18:12 PM	Bubbler valve closed
8/24/2011	11:18:12 PM	Main Vac valve opened
8/24/2011	11:18:12 PM	Helium MFC set to  0.000000
8/24/2011	11:18:12 PM	H2 MFC set to  0.000000
8/24/2011	11:18:12 PM	BCl3 MFC set to  0.000000
8/24/2011	11:18:12 PM	PHl3 MFC set to  0.000000
8/24/2011	11:18:12 PM	SiCl4 MFC set to  0.000000
8/24/2011	11:18:12 PM	Bypass solenoid MFC set to  0.000000
8/24/2011	11:18:13 PM	Tube furnace set to 0
8/24/2011	11:18:14 PM	Run finished at 11:18 PM
8/24/2011	11:18:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
